FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2125187798> ?p ?o ?g. }

• W2125187798 abstract "This paper reports the drift of Cu ions in various low-permittivity polymer dielectrics to identify Cu barrier requirements for future ULSI integration. Bias-temperature stressing was conducted on Cu-insulator-semiconductor capacitors to investigate Cu+ penetration into the polymers. Our study shows that Cu/sup +/ ions drift readily into poly(arylene ether) and fluorinated polyimide, but much more slowly into benzocyclobutene. A thin nitride cap layer can stop the drift. A physical model has been developed to explain the kinetics of Cu/sup +/ drift." @default.
• W2125187798 created "2016-06-24" @default.
• W2125187798 creator A5001628148 @default.
• W2125187798 creator A5004702061 @default.
• W2125187798 creator A5024702898 @default.
• W2125187798 creator A5066440288 @default.
• W2125187798 creator A5085572420 @default.
• W2125187798 date "2002-11-27" @default.
• W2125187798 modified "2023-09-24" @default.
• W2125187798 title "Copper drift in low-K polymer dielectrics for ULSI metallization" @default.
• W2125187798 cites W2065883032 @default.
• W2125187798 cites W2084645196 @default.
• W2125187798 cites W2120062652 @default.
• W2125187798 cites W2146857372 @default.
• W2125187798 cites W2167893819 @default.
• W2125187798 cites W2171464926 @default.
• W2125187798 cites W2533938810 @default.
• W2125187798 cites W2538472476 @default.
• W2125187798 cites W2540410941 @default.
• W2125187798 doi "https://doi.org/10.1109/vlsit.1998.689185" @default.
• W2125187798 hasPublicationYear "2002" @default.
• W2125187798 type Work @default.
• W2125187798 sameAs 2125187798 @default.
• W2125187798 citedByCount "16" @default.
• W2125187798 countsByYear W21251877982012 @default.
• W2125187798 countsByYear W21251877982016 @default.
• W2125187798 crossrefType "proceedings-article" @default.
• W2125187798 hasAuthorship W2125187798A5001628148 @default.
• W2125187798 hasAuthorship W2125187798A5004702061 @default.
• W2125187798 hasAuthorship W2125187798A5024702898 @default.
• W2125187798 hasAuthorship W2125187798A5066440288 @default.
• W2125187798 hasAuthorship W2125187798A5085572420 @default.
• W2125187798 hasConcept C108225325 @default.
• W2125187798 hasConcept C116372231 @default.
• W2125187798 hasConcept C119599485 @default.
• W2125187798 hasConcept C127413603 @default.
• W2125187798 hasConcept C133386390 @default.
• W2125187798 hasConcept C145148216 @default.
• W2125187798 hasConcept C159985019 @default.
• W2125187798 hasConcept C165801399 @default.
• W2125187798 hasConcept C168651791 @default.
• W2125187798 hasConcept C178790620 @default.
• W2125187798 hasConcept C185592680 @default.
• W2125187798 hasConcept C191897082 @default.
• W2125187798 hasConcept C192562407 @default.
• W2125187798 hasConcept C212702 @default.
• W2125187798 hasConcept C24326235 @default.
• W2125187798 hasConcept C2776366733 @default.
• W2125187798 hasConcept C2779227376 @default.
• W2125187798 hasConcept C2779843779 @default.
• W2125187798 hasConcept C2780263894 @default.
• W2125187798 hasConcept C2780965675 @default.
• W2125187798 hasConcept C2781076698 @default.
• W2125187798 hasConcept C49040817 @default.
• W2125187798 hasConcept C52192207 @default.
• W2125187798 hasConcept C521977710 @default.
• W2125187798 hasConcept C544778455 @default.
• W2125187798 hasConceptScore W2125187798C108225325 @default.
• W2125187798 hasConceptScore W2125187798C116372231 @default.
• W2125187798 hasConceptScore W2125187798C119599485 @default.
• W2125187798 hasConceptScore W2125187798C127413603 @default.
• W2125187798 hasConceptScore W2125187798C133386390 @default.
• W2125187798 hasConceptScore W2125187798C145148216 @default.
• W2125187798 hasConceptScore W2125187798C159985019 @default.
• W2125187798 hasConceptScore W2125187798C165801399 @default.
• W2125187798 hasConceptScore W2125187798C168651791 @default.
• W2125187798 hasConceptScore W2125187798C178790620 @default.
• W2125187798 hasConceptScore W2125187798C185592680 @default.
• W2125187798 hasConceptScore W2125187798C191897082 @default.
• W2125187798 hasConceptScore W2125187798C192562407 @default.
• W2125187798 hasConceptScore W2125187798C212702 @default.
• W2125187798 hasConceptScore W2125187798C24326235 @default.
• W2125187798 hasConceptScore W2125187798C2776366733 @default.
• W2125187798 hasConceptScore W2125187798C2779227376 @default.
• W2125187798 hasConceptScore W2125187798C2779843779 @default.
• W2125187798 hasConceptScore W2125187798C2780263894 @default.
• W2125187798 hasConceptScore W2125187798C2780965675 @default.
• W2125187798 hasConceptScore W2125187798C2781076698 @default.
• W2125187798 hasConceptScore W2125187798C49040817 @default.
• W2125187798 hasConceptScore W2125187798C52192207 @default.
• W2125187798 hasConceptScore W2125187798C521977710 @default.
• W2125187798 hasConceptScore W2125187798C544778455 @default.
• W2125187798 hasLocation W21251877981 @default.
• W2125187798 hasOpenAccess W2125187798 @default.
• W2125187798 hasPrimaryLocation W21251877981 @default.
• W2125187798 hasRelatedWork W1510486425 @default.
• W2125187798 hasRelatedWork W1510514933 @default.
• W2125187798 hasRelatedWork W1671960874 @default.
• W2125187798 hasRelatedWork W1894262035 @default.
• W2125187798 hasRelatedWork W1908492041 @default.
• W2125187798 hasRelatedWork W1950757337 @default.
• W2125187798 hasRelatedWork W1958892800 @default.
• W2125187798 hasRelatedWork W2047064021 @default.
• W2125187798 hasRelatedWork W2054268771 @default.
• W2125187798 hasRelatedWork W2075468795 @default.
• W2125187798 hasRelatedWork W2119226416 @default.
• W2125187798 hasRelatedWork W2135951921 @default.
• W2125187798 hasRelatedWork W2145207196 @default.
• W2125187798 hasRelatedWork W2147752981 @default.
• W2125187798 hasRelatedWork W2167694748 @default.

• next