FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2125290596> ?p ?o ?g. }

• W2125290596 abstract "This paper reports a MEMS gyroscope that is driven by the rotating carrier's angular velocity. The structure and fabrication are introduced in the paper. The silicon processing and simulating of the sensing unit are studied. We use coventor ware to simulate structure. And in process, we use spray coating instead of spinning coating. In simulation, the first modal frequency we obtained is 220.38Hz, it is nearly we calculated. A conformal resist of 3μm thickness is obtained at 35mm Z-height, 100mm/min travel rate, 3ml/min flow rate. In step surface coating it gets more uniform thickness that associates with line width, a better line width would get a more precise pattern. Thus, it provides an opportunity of a precision patterning on a wafer." @default.
• W2125290596 created "2016-06-24" @default.
• W2125290596 creator A5022928235 @default.
• W2125290596 creator A5034675261 @default.
• W2125290596 creator A5040421381 @default.
• W2125290596 creator A5056645942 @default.
• W2125290596 creator A5063137915 @default.
• W2125290596 date "2010-10-01" @default.
• W2125290596 modified "2023-09-25" @default.
• W2125290596 title "Study of a MEMS gyroscope sensing unit simulate and process" @default.
• W2125290596 cites W1562661071 @default.
• W2125290596 cites W1914911940 @default.
• W2125290596 cites W2123594635 @default.
• W2125290596 cites W2352054969 @default.
• W2125290596 cites W2365458599 @default.
• W2125290596 cites W247147244 @default.
• W2125290596 cites W589744691 @default.
• W2125290596 doi "https://doi.org/10.1109/iccas.2010.5669734" @default.
• W2125290596 hasPublicationYear "2010" @default.
• W2125290596 type Work @default.
• W2125290596 sameAs 2125290596 @default.
• W2125290596 citedByCount "0" @default.
• W2125290596 crossrefType "proceedings-article" @default.
• W2125290596 hasAuthorship W2125290596A5022928235 @default.
• W2125290596 hasAuthorship W2125290596A5034675261 @default.
• W2125290596 hasAuthorship W2125290596A5040421381 @default.
• W2125290596 hasAuthorship W2125290596A5056645942 @default.
• W2125290596 hasAuthorship W2125290596A5063137915 @default.
• W2125290596 hasConcept C111919701 @default.
• W2125290596 hasConcept C120665830 @default.
• W2125290596 hasConcept C121332964 @default.
• W2125290596 hasConcept C127413603 @default.
• W2125290596 hasConcept C134306372 @default.
• W2125290596 hasConcept C136525101 @default.
• W2125290596 hasConcept C142724271 @default.
• W2125290596 hasConcept C146978453 @default.
• W2125290596 hasConcept C154815118 @default.
• W2125290596 hasConcept C158488048 @default.
• W2125290596 hasConcept C159985019 @default.
• W2125290596 hasConcept C160671074 @default.
• W2125290596 hasConcept C171250308 @default.
• W2125290596 hasConcept C192562407 @default.
• W2125290596 hasConcept C198352243 @default.
• W2125290596 hasConcept C204787440 @default.
• W2125290596 hasConcept C24890656 @default.
• W2125290596 hasConcept C2524010 @default.
• W2125290596 hasConcept C2779227376 @default.
• W2125290596 hasConcept C2781448156 @default.
• W2125290596 hasConcept C33923547 @default.
• W2125290596 hasConcept C37977207 @default.
• W2125290596 hasConcept C41008148 @default.
• W2125290596 hasConcept C49040817 @default.
• W2125290596 hasConcept C53524968 @default.
• W2125290596 hasConcept C544956773 @default.
• W2125290596 hasConcept C71924100 @default.
• W2125290596 hasConcept C72768775 @default.
• W2125290596 hasConcept C98045186 @default.
• W2125290596 hasConcept C98214594 @default.
• W2125290596 hasConceptScore W2125290596C111919701 @default.
• W2125290596 hasConceptScore W2125290596C120665830 @default.
• W2125290596 hasConceptScore W2125290596C121332964 @default.
• W2125290596 hasConceptScore W2125290596C127413603 @default.
• W2125290596 hasConceptScore W2125290596C134306372 @default.
• W2125290596 hasConceptScore W2125290596C136525101 @default.
• W2125290596 hasConceptScore W2125290596C142724271 @default.
• W2125290596 hasConceptScore W2125290596C146978453 @default.
• W2125290596 hasConceptScore W2125290596C154815118 @default.
• W2125290596 hasConceptScore W2125290596C158488048 @default.
• W2125290596 hasConceptScore W2125290596C159985019 @default.
• W2125290596 hasConceptScore W2125290596C160671074 @default.
• W2125290596 hasConceptScore W2125290596C171250308 @default.
• W2125290596 hasConceptScore W2125290596C192562407 @default.
• W2125290596 hasConceptScore W2125290596C198352243 @default.
• W2125290596 hasConceptScore W2125290596C204787440 @default.
• W2125290596 hasConceptScore W2125290596C24890656 @default.
• W2125290596 hasConceptScore W2125290596C2524010 @default.
• W2125290596 hasConceptScore W2125290596C2779227376 @default.
• W2125290596 hasConceptScore W2125290596C2781448156 @default.
• W2125290596 hasConceptScore W2125290596C33923547 @default.
• W2125290596 hasConceptScore W2125290596C37977207 @default.
• W2125290596 hasConceptScore W2125290596C41008148 @default.
• W2125290596 hasConceptScore W2125290596C49040817 @default.
• W2125290596 hasConceptScore W2125290596C53524968 @default.
• W2125290596 hasConceptScore W2125290596C544956773 @default.
• W2125290596 hasConceptScore W2125290596C71924100 @default.
• W2125290596 hasConceptScore W2125290596C72768775 @default.
• W2125290596 hasConceptScore W2125290596C98045186 @default.
• W2125290596 hasConceptScore W2125290596C98214594 @default.
• W2125290596 hasLocation W21252905961 @default.
• W2125290596 hasOpenAccess W2125290596 @default.
• W2125290596 hasPrimaryLocation W21252905961 @default.
• W2125290596 hasRelatedWork W1583782657 @default.
• W2125290596 hasRelatedWork W1877107399 @default.
• W2125290596 hasRelatedWork W1964739452 @default.
• W2125290596 hasRelatedWork W1975337849 @default.
• W2125290596 hasRelatedWork W1989794150 @default.
• W2125290596 hasRelatedWork W1991609495 @default.
• W2125290596 hasRelatedWork W1995506222 @default.
• W2125290596 hasRelatedWork W1998623467 @default.
• W2125290596 hasRelatedWork W2022061958 @default.

• next