Matches in SemOpenAlex for { <https://semopenalex.org/work/W2125377543> ?p ?o ?g. }
- W2125377543 endingPage "1968" @default.
- W2125377543 startingPage "1961" @default.
- W2125377543 abstract "Spiral inductors and different types of transmission lines are fabricated by using copper (Cu)-damascene interconnects and high-resistivity silicon (HRS) or sapphire substrates. The fabrication process is compatible with the concepts of silicon device fabrication. Spiral inductors with 1.4-nH inductance have quality factors (Q) of 30 at 5.2 GHz and 40 at 5.8 GHz for the HRS and the sapphire substrates, respectively. 80-nH inductors have Q's as high as 13. The transmission-line losses are near 4 dB/cm at 10 GHz for microstrips, inverted microstrips, and coplanar lines, which are sufficiently small for maximum line lengths within typical silicon-chip areas. This paper shows that inductors with high Q's for lumped-element designs in the 1-10-GHz range and transmission lines with low losses for distributed-element designs beyond 10 GHz can be made available with the proposed adjustments to commercial silicon technology." @default.
- W2125377543 created "2016-06-24" @default.
- W2125377543 creator A5004317600 @default.
- W2125377543 creator A5074267030 @default.
- W2125377543 creator A5077697454 @default.
- W2125377543 creator A5089315602 @default.
- W2125377543 date "1997-01-01" @default.
- W2125377543 modified "2023-10-14" @default.
- W2125377543 title "Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates" @default.
- W2125377543 cites W1510162750 @default.
- W2125377543 cites W2014758918 @default.
- W2125377543 cites W2015780315 @default.
- W2125377543 cites W2074794933 @default.
- W2125377543 cites W2109832933 @default.
- W2125377543 cites W2141547815 @default.
- W2125377543 cites W2149761042 @default.
- W2125377543 cites W2160509477 @default.
- W2125377543 cites W2161593954 @default.
- W2125377543 cites W2163768806 @default.
- W2125377543 cites W2167222234 @default.
- W2125377543 cites W2168842454 @default.
- W2125377543 cites W2891596161 @default.
- W2125377543 doi "https://doi.org/10.1109/22.641804" @default.
- W2125377543 hasPublicationYear "1997" @default.
- W2125377543 type Work @default.
- W2125377543 sameAs 2125377543 @default.
- W2125377543 citedByCount "132" @default.
- W2125377543 countsByYear W21253775432012 @default.
- W2125377543 countsByYear W21253775432013 @default.
- W2125377543 countsByYear W21253775432016 @default.
- W2125377543 countsByYear W21253775432017 @default.
- W2125377543 countsByYear W21253775432018 @default.
- W2125377543 countsByYear W21253775432019 @default.
- W2125377543 countsByYear W21253775432020 @default.
- W2125377543 countsByYear W21253775432022 @default.
- W2125377543 countsByYear W21253775432023 @default.
- W2125377543 crossrefType "journal-article" @default.
- W2125377543 hasAuthorship W2125377543A5004317600 @default.
- W2125377543 hasAuthorship W2125377543A5074267030 @default.
- W2125377543 hasAuthorship W2125377543A5077697454 @default.
- W2125377543 hasAuthorship W2125377543A5089315602 @default.
- W2125377543 hasConcept C116372231 @default.
- W2125377543 hasConcept C119599485 @default.
- W2125377543 hasConcept C127413603 @default.
- W2125377543 hasConcept C128450285 @default.
- W2125377543 hasConcept C133386390 @default.
- W2125377543 hasConcept C136525101 @default.
- W2125377543 hasConcept C142724271 @default.
- W2125377543 hasConcept C144534570 @default.
- W2125377543 hasConcept C165801399 @default.
- W2125377543 hasConcept C192562407 @default.
- W2125377543 hasConcept C194257627 @default.
- W2125377543 hasConcept C204787440 @default.
- W2125377543 hasConcept C24326235 @default.
- W2125377543 hasConcept C29210110 @default.
- W2125377543 hasConcept C33441834 @default.
- W2125377543 hasConcept C3736036 @default.
- W2125377543 hasConcept C44838205 @default.
- W2125377543 hasConcept C46362747 @default.
- W2125377543 hasConcept C49040817 @default.
- W2125377543 hasConcept C544956773 @default.
- W2125377543 hasConcept C71924100 @default.
- W2125377543 hasConcept C76155785 @default.
- W2125377543 hasConceptScore W2125377543C116372231 @default.
- W2125377543 hasConceptScore W2125377543C119599485 @default.
- W2125377543 hasConceptScore W2125377543C127413603 @default.
- W2125377543 hasConceptScore W2125377543C128450285 @default.
- W2125377543 hasConceptScore W2125377543C133386390 @default.
- W2125377543 hasConceptScore W2125377543C136525101 @default.
- W2125377543 hasConceptScore W2125377543C142724271 @default.
- W2125377543 hasConceptScore W2125377543C144534570 @default.
- W2125377543 hasConceptScore W2125377543C165801399 @default.
- W2125377543 hasConceptScore W2125377543C192562407 @default.
- W2125377543 hasConceptScore W2125377543C194257627 @default.
- W2125377543 hasConceptScore W2125377543C204787440 @default.
- W2125377543 hasConceptScore W2125377543C24326235 @default.
- W2125377543 hasConceptScore W2125377543C29210110 @default.
- W2125377543 hasConceptScore W2125377543C33441834 @default.
- W2125377543 hasConceptScore W2125377543C3736036 @default.
- W2125377543 hasConceptScore W2125377543C44838205 @default.
- W2125377543 hasConceptScore W2125377543C46362747 @default.
- W2125377543 hasConceptScore W2125377543C49040817 @default.
- W2125377543 hasConceptScore W2125377543C544956773 @default.
- W2125377543 hasConceptScore W2125377543C71924100 @default.
- W2125377543 hasConceptScore W2125377543C76155785 @default.
- W2125377543 hasIssue "10" @default.
- W2125377543 hasLocation W21253775431 @default.
- W2125377543 hasOpenAccess W2125377543 @default.
- W2125377543 hasPrimaryLocation W21253775431 @default.
- W2125377543 hasRelatedWork W1487788472 @default.
- W2125377543 hasRelatedWork W2120661608 @default.
- W2125377543 hasRelatedWork W2144738648 @default.
- W2125377543 hasRelatedWork W2155843453 @default.
- W2125377543 hasRelatedWork W2196183592 @default.
- W2125377543 hasRelatedWork W2769490182 @default.
- W2125377543 hasRelatedWork W3168403633 @default.
- W2125377543 hasRelatedWork W4226174229 @default.
- W2125377543 hasRelatedWork W4318969874 @default.