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- W2125592904 abstract "In this paper, HfN on Si(100) has similar growth quality and electrical resistivity as HfN on MgO(100) (~30 muOmega-cm ), The resistivity values for HfN films on both substrates are much lower than that of TaN and TiN. Preliminary Cu diffusion test along with its low resistivity suggest that cubic HfN can be a promising candidate for Cu diffusion barriers." @default.
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- W2125592904 date "2007-12-01" @default.
- W2125592904 modified "2023-09-26" @default.
- W2125592904 title "Low resistivity hafnium nitride thin films as diffusion barriers for Cu interconnects" @default.
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- W2125592904 doi "https://doi.org/10.1109/isdrs.2007.4422366" @default.
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