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- W2125673831 abstract "In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (>96%), large mechanical scan angles (/spl plusmn/4.4/spl deg/ and /spl plusmn/3.4/spl deg/), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1/spl times/N/sup 2/ wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 /spl mu/m is also achieved. [1496]." @default.
- W2125673831 created "2016-06-24" @default.
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- W2125673831 date "2005-12-01" @default.
- W2125673831 modified "2023-09-27" @default.
- W2125673831 title "Gimbal-less MEMS two-axis optical scanner array with high fill-factor" @default.
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- W2125673831 doi "https://doi.org/10.1109/jmems.2005.859193" @default.
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