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- W2125903967 abstract "Thermal and fluid behavior are governing factors for the via processing of semiconducting substrates. In order to investigate the fundamentals, nanosecond (ns) time-resolved visualization of ns-pulse Nd:YAG laser ablation of SiC substrate has been performed for various conditions. Time-resolved visualizations have been conducted by using a ultra high speed camera with the frame rate of 200 million frames/second for the first time to reveal the ablation process in a single event with the temporal resolution of 5 ns. Both self-emitting light from the ablation plume and the shadow image due to the refractive index profile are visualized. The results show unique features for each spatial beam profiles (Gaussian, quasi-flat top, annular) with different beam energy. Combined with the previous experimental observations, the results help modeling the thermo-fluid numerical modeling of the ablation process." @default.
- W2125903967 created "2016-06-24" @default.
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- W2125903967 date "2014-05-01" @default.
- W2125903967 modified "2023-09-27" @default.
- W2125903967 title "Nanosecond time-resolved visualization of short pulse laser ablation processes for various laser beam profiles" @default.
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- W2125903967 doi "https://doi.org/10.1109/itherm.2014.6892428" @default.
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