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• W2125973726 endingPage "686" @default.
• W2125973726 startingPage "679" @default.
• W2125973726 abstract "Silicon is the most often used material in micro electromechanical systems (MEMS). Detailed understanding of its mechanical properties as well as the microstructure is crucial for the reliability of MEMS devices. In this paper, we investigate the microstructure changes upon indentation of single crystalline (100) oriented silicon by transmission electron microscopy (TEM) and Raman microscopy. TEM cross sections were prepared by focused ion beam (FIB) at the location of the indent. Raman microscopy and TEM revealed the occurrence of phase transformations and residual stresses upon deformation. Raman microscopy was also used directly on the cross-sectional TEM lamella and thus microstructural details could be correlated to peak shape and peak position. The results show, however, that due to the implanted Ga+ ions in the lamella the silicon Raman peak is shifted significantly to lower wavenumbers. This hinders a quantitative analysis of residual stresses in the lamella. Furthermore, Raman microscopy also possesses the ability to map deformation structures with a lateral resolution in the submicron range. Copyright © 2009 John Wiley & Sons, Ltd." @default.
• W2125973726 created "2016-06-24" @default.
• W2125973726 creator A5075183045 @default.
• W2125973726 creator A5083123480 @default.
• W2125973726 date "2009-06-01" @default.
• W2125973726 modified "2023-09-27" @default.
• W2125973726 title "Correlating Raman peak shifts with phase transformation and defect densities: a comprehensive TEM and Raman study on silicon" @default.
• W2125973726 cites W1540487540 @default.
• W2125973726 cites W1963921973 @default.
• W2125973726 cites W1966650265 @default.
• W2125973726 cites W1974689523 @default.
• W2125973726 cites W1990535745 @default.
• W2125973726 cites W1993485969 @default.
• W2125973726 cites W1997645663 @default.
• W2125973726 cites W2003529174 @default.
• W2125973726 cites W2004664949 @default.
• W2125973726 cites W2006757184 @default.
• W2125973726 cites W2007482718 @default.
• W2125973726 cites W2011490314 @default.
• W2125973726 cites W2012553141 @default.
• W2125973726 cites W2016685542 @default.
• W2125973726 cites W2023419122 @default.
• W2125973726 cites W2027748950 @default.
• W2125973726 cites W2034171152 @default.
• W2125973726 cites W2034693021 @default.
• W2125973726 cites W2050551815 @default.
• W2125973726 cites W2051554740 @default.
• W2125973726 cites W2054352480 @default.
• W2125973726 cites W2058150305 @default.
• W2125973726 cites W2061244172 @default.
• W2125973726 cites W2075822352 @default.
• W2125973726 cites W2081217877 @default.
• W2125973726 cites W2083397591 @default.
• W2125973726 cites W2087525470 @default.
• W2125973726 cites W2088819999 @default.
• W2125973726 cites W2101678649 @default.
• W2125973726 cites W2115295828 @default.
• W2125973726 cites W2137364180 @default.
• W2125973726 cites W2157057971 @default.
• W2125973726 cites W2171786186 @default.
• W2125973726 cites W2402386783 @default.
• W2125973726 cites W4253056353 @default.
• W2125973726 doi "https://doi.org/10.1002/jrs.2181" @default.
• W2125973726 hasPublicationYear "2009" @default.
• W2125973726 type Work @default.
• W2125973726 sameAs 2125973726 @default.
• W2125973726 citedByCount "15" @default.
• W2125973726 countsByYear W21259737262012 @default.
• W2125973726 countsByYear W21259737262015 @default.
• W2125973726 countsByYear W21259737262016 @default.
• W2125973726 countsByYear W21259737262017 @default.
• W2125973726 countsByYear W21259737262021 @default.
• W2125973726 countsByYear W21259737262023 @default.
• W2125973726 crossrefType "journal-article" @default.
• W2125973726 hasAuthorship W2125973726A5075183045 @default.
• W2125973726 hasAuthorship W2125973726A5083123480 @default.
• W2125973726 hasConcept C120665830 @default.
• W2125973726 hasConcept C121332964 @default.
• W2125973726 hasConcept C136301237 @default.
• W2125973726 hasConcept C145148216 @default.
• W2125973726 hasConcept C146088050 @default.
• W2125973726 hasConcept C147080431 @default.
• W2125973726 hasConcept C159985019 @default.
• W2125973726 hasConcept C161866238 @default.
• W2125973726 hasConcept C171250308 @default.
• W2125973726 hasConcept C178790620 @default.
• W2125973726 hasConcept C185592680 @default.
• W2125973726 hasConcept C192562407 @default.
• W2125973726 hasConcept C37292000 @default.
• W2125973726 hasConcept C40003534 @default.
• W2125973726 hasConcept C49040817 @default.
• W2125973726 hasConcept C49326732 @default.
• W2125973726 hasConcept C544956773 @default.
• W2125973726 hasConcept C87976508 @default.
• W2125973726 hasConceptScore W2125973726C120665830 @default.
• W2125973726 hasConceptScore W2125973726C121332964 @default.
• W2125973726 hasConceptScore W2125973726C136301237 @default.
• W2125973726 hasConceptScore W2125973726C145148216 @default.
• W2125973726 hasConceptScore W2125973726C146088050 @default.
• W2125973726 hasConceptScore W2125973726C147080431 @default.
• W2125973726 hasConceptScore W2125973726C159985019 @default.
• W2125973726 hasConceptScore W2125973726C161866238 @default.
• W2125973726 hasConceptScore W2125973726C171250308 @default.
• W2125973726 hasConceptScore W2125973726C178790620 @default.
• W2125973726 hasConceptScore W2125973726C185592680 @default.
• W2125973726 hasConceptScore W2125973726C192562407 @default.
• W2125973726 hasConceptScore W2125973726C37292000 @default.
• W2125973726 hasConceptScore W2125973726C40003534 @default.
• W2125973726 hasConceptScore W2125973726C49040817 @default.
• W2125973726 hasConceptScore W2125973726C49326732 @default.
• W2125973726 hasConceptScore W2125973726C544956773 @default.
• W2125973726 hasConceptScore W2125973726C87976508 @default.
• W2125973726 hasIssue "6" @default.
• W2125973726 hasLocation W21259737261 @default.
• W2125973726 hasOpenAccess W2125973726 @default.
• W2125973726 hasPrimaryLocation W21259737261 @default.
• W2125973726 hasRelatedWork W2004362670 @default.
• W2125973726 hasRelatedWork W2058945371 @default.

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