Matches in SemOpenAlex for { <https://semopenalex.org/work/W2126131666> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2126131666 abstract "Improved functional reliability is demonstrated through implementation of a tungsten damascene process for creating local interconnects that results in a cleaner, more planar surface. Reduction in lateral shorts is posited as the driver for the substantial reduction in yield loss and failure following stress conditions." @default.
- W2126131666 created "2016-06-24" @default.
- W2126131666 creator A5032376266 @default.
- W2126131666 creator A5045850102 @default.
- W2126131666 creator A5054922534 @default.
- W2126131666 creator A5089128621 @default.
- W2126131666 creator A5089471823 @default.
- W2126131666 date "2004-09-07" @default.
- W2126131666 modified "2023-09-25" @default.
- W2126131666 title "Damascene tungsten process for local interconnects with improved reliability performance" @default.
- W2126131666 cites W1978279940 @default.
- W2126131666 cites W2117936258 @default.
- W2126131666 cites W2148198133 @default.
- W2126131666 cites W2168940071 @default.
- W2126131666 doi "https://doi.org/10.1109/asmc.2004.1309617" @default.
- W2126131666 hasPublicationYear "2004" @default.
- W2126131666 type Work @default.
- W2126131666 sameAs 2126131666 @default.
- W2126131666 citedByCount "0" @default.
- W2126131666 crossrefType "proceedings-article" @default.
- W2126131666 hasAuthorship W2126131666A5032376266 @default.
- W2126131666 hasAuthorship W2126131666A5045850102 @default.
- W2126131666 hasAuthorship W2126131666A5054922534 @default.
- W2126131666 hasAuthorship W2126131666A5089128621 @default.
- W2126131666 hasAuthorship W2126131666A5089471823 @default.
- W2126131666 hasConcept C111335779 @default.
- W2126131666 hasConcept C111919701 @default.
- W2126131666 hasConcept C116372231 @default.
- W2126131666 hasConcept C121332964 @default.
- W2126131666 hasConcept C121684516 @default.
- W2126131666 hasConcept C123745756 @default.
- W2126131666 hasConcept C127413603 @default.
- W2126131666 hasConcept C134121241 @default.
- W2126131666 hasConcept C134786449 @default.
- W2126131666 hasConcept C163258240 @default.
- W2126131666 hasConcept C191897082 @default.
- W2126131666 hasConcept C192562407 @default.
- W2126131666 hasConcept C200601418 @default.
- W2126131666 hasConcept C24326235 @default.
- W2126131666 hasConcept C2524010 @default.
- W2126131666 hasConcept C33923547 @default.
- W2126131666 hasConcept C41008148 @default.
- W2126131666 hasConcept C43214815 @default.
- W2126131666 hasConcept C542268612 @default.
- W2126131666 hasConcept C62520636 @default.
- W2126131666 hasConcept C76155785 @default.
- W2126131666 hasConcept C98045186 @default.
- W2126131666 hasConceptScore W2126131666C111335779 @default.
- W2126131666 hasConceptScore W2126131666C111919701 @default.
- W2126131666 hasConceptScore W2126131666C116372231 @default.
- W2126131666 hasConceptScore W2126131666C121332964 @default.
- W2126131666 hasConceptScore W2126131666C121684516 @default.
- W2126131666 hasConceptScore W2126131666C123745756 @default.
- W2126131666 hasConceptScore W2126131666C127413603 @default.
- W2126131666 hasConceptScore W2126131666C134121241 @default.
- W2126131666 hasConceptScore W2126131666C134786449 @default.
- W2126131666 hasConceptScore W2126131666C163258240 @default.
- W2126131666 hasConceptScore W2126131666C191897082 @default.
- W2126131666 hasConceptScore W2126131666C192562407 @default.
- W2126131666 hasConceptScore W2126131666C200601418 @default.
- W2126131666 hasConceptScore W2126131666C24326235 @default.
- W2126131666 hasConceptScore W2126131666C2524010 @default.
- W2126131666 hasConceptScore W2126131666C33923547 @default.
- W2126131666 hasConceptScore W2126131666C41008148 @default.
- W2126131666 hasConceptScore W2126131666C43214815 @default.
- W2126131666 hasConceptScore W2126131666C542268612 @default.
- W2126131666 hasConceptScore W2126131666C62520636 @default.
- W2126131666 hasConceptScore W2126131666C76155785 @default.
- W2126131666 hasConceptScore W2126131666C98045186 @default.
- W2126131666 hasLocation W21261316661 @default.
- W2126131666 hasOpenAccess W2126131666 @default.
- W2126131666 hasPrimaryLocation W21261316661 @default.
- W2126131666 hasRelatedWork W1526945721 @default.
- W2126131666 hasRelatedWork W1539725198 @default.
- W2126131666 hasRelatedWork W1640089357 @default.
- W2126131666 hasRelatedWork W1657887109 @default.
- W2126131666 hasRelatedWork W1971317760 @default.
- W2126131666 hasRelatedWork W2006904107 @default.
- W2126131666 hasRelatedWork W2015310552 @default.
- W2126131666 hasRelatedWork W2030360250 @default.
- W2126131666 hasRelatedWork W2081600158 @default.
- W2126131666 hasRelatedWork W2103622580 @default.
- W2126131666 hasRelatedWork W2119039525 @default.
- W2126131666 hasRelatedWork W2124824391 @default.
- W2126131666 hasRelatedWork W2127042836 @default.
- W2126131666 hasRelatedWork W2128930516 @default.
- W2126131666 hasRelatedWork W2162142912 @default.
- W2126131666 hasRelatedWork W2729349366 @default.
- W2126131666 hasRelatedWork W2734399998 @default.
- W2126131666 hasRelatedWork W96865455 @default.
- W2126131666 hasRelatedWork W2217621086 @default.
- W2126131666 hasRelatedWork W2495028648 @default.
- W2126131666 isParatext "false" @default.
- W2126131666 isRetracted "false" @default.
- W2126131666 magId "2126131666" @default.
- W2126131666 workType "article" @default.