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- W2126170208 endingPage "408" @default.
- W2126170208 startingPage "395" @default.
- W2126170208 abstract "TiNi thin films have attracted much attention in recent years as intelligent and functional materials because of their unique properties. TiNi thin film based micro-actuators will become the actuator of choice in many aspects in the rapidly growing field of micro-electro-mechanical systems (MEMSs). In this review paper, some critical issues and problems in the development of TiNi thin films are discussed, including preparation and characterization considerations, residual stress and adhesion, frequency improvement, fatigue and stability, modeling of behavior as well as functionally graded or composite thin films. Comparison is made of TiNi SMA micro-actuation with other micro-actuation methods. Different types of TiNi thin film based microdevices, such as microgrippers, microswitches, microvalves and pumps, microsensors, etc. are also described and discussed." @default.
- W2126170208 created "2016-06-24" @default.
- W2126170208 creator A5028716796 @default.
- W2126170208 creator A5048831148 @default.
- W2126170208 creator A5059886125 @default.
- W2126170208 creator A5061970875 @default.
- W2126170208 creator A5086922590 @default.
- W2126170208 date "2004-05-01" @default.
- W2126170208 modified "2023-09-30" @default.
- W2126170208 title "TiNi-based thin films in MEMS applications: a review" @default.
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