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• W2126170836 abstract "This paper introduces a new concept for implementing millimeter-wave filters intended for monolithic integration. The approach uses silicon micromachining and wafer bonding techniques to create inverted-microstrip transmission lines in air and radio frequency (RF)-coupled cantilevers. A third-order filter demonstrated a measured insertion loss of only 0.54 dB at 76.5 GHz. Simple MEMS tuning of 60-GHz coupled-line resonators has also been demonstrated for the first time. This paper could form the basis for a new type of low-loss tunable distributed-element RF microelectromechanical system filter technology for millimeter-wave applications." @default.
• W2126170836 created "2016-06-24" @default.
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• W2126170836 date "2008-06-01" @default.
• W2126170836 modified "2023-10-01" @default.
• W2126170836 title "Micromachined RF-Coupled Cantilever Inverted-Microstrip Millimeter-Wave Filters" @default.
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• W2126170836 doi "https://doi.org/10.1109/jmems.2008.922081" @default.
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