Matches in SemOpenAlex for { <https://semopenalex.org/work/W2126265909> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2126265909 abstract "This work is describes the first unified network-defect-level model for B diffusion in SiO/sub 2/ for use in process simulation. Models have been developed to explain silicon processing effects on B diffusion through thin gate oxides. With these models we can predict the enhanced B diffusion effects in poly Si/SiO/sub 2/ structures from BF/sub 2/ implants, wet oxidation and exposure to H/sub 2/ ambients, and the concentration of N in nitrided oxides in reducing B diffusion. We have also shown for the first time that there is an oxide thickness dependence on B diffusion." @default.
- W2126265909 created "2016-06-24" @default.
- W2126265909 creator A5006448685 @default.
- W2126265909 date "2002-11-19" @default.
- W2126265909 modified "2023-09-27" @default.
- W2126265909 title "Unified model of boron diffusion in thin gate oxides: effects of F, H/sub 2/, N, oxide thickness and injected Si interstitials" @default.
- W2126265909 cites W1001750094 @default.
- W2126265909 cites W1968809098 @default.
- W2126265909 cites W1991500344 @default.
- W2126265909 cites W1998705057 @default.
- W2126265909 cites W2003308838 @default.
- W2126265909 cites W2042016535 @default.
- W2126265909 cites W2048250584 @default.
- W2126265909 cites W2498190793 @default.
- W2126265909 doi "https://doi.org/10.1109/iedm.1995.497188" @default.
- W2126265909 hasPublicationYear "2002" @default.
- W2126265909 type Work @default.
- W2126265909 sameAs 2126265909 @default.
- W2126265909 citedByCount "2" @default.
- W2126265909 crossrefType "proceedings-article" @default.
- W2126265909 hasAuthorship W2126265909A5006448685 @default.
- W2126265909 hasConcept C119599485 @default.
- W2126265909 hasConcept C121332964 @default.
- W2126265909 hasConcept C127413603 @default.
- W2126265909 hasConcept C13862629 @default.
- W2126265909 hasConcept C165801399 @default.
- W2126265909 hasConcept C171250308 @default.
- W2126265909 hasConcept C172385210 @default.
- W2126265909 hasConcept C178790620 @default.
- W2126265909 hasConcept C185592680 @default.
- W2126265909 hasConcept C18762648 @default.
- W2126265909 hasConcept C19067145 @default.
- W2126265909 hasConcept C191897082 @default.
- W2126265909 hasConcept C192562407 @default.
- W2126265909 hasConcept C2361726 @default.
- W2126265909 hasConcept C2779227376 @default.
- W2126265909 hasConcept C2779851234 @default.
- W2126265909 hasConcept C3017618536 @default.
- W2126265909 hasConcept C41008148 @default.
- W2126265909 hasConcept C49040817 @default.
- W2126265909 hasConcept C501308230 @default.
- W2126265909 hasConcept C544956773 @default.
- W2126265909 hasConcept C56739046 @default.
- W2126265909 hasConcept C68710425 @default.
- W2126265909 hasConcept C69357855 @default.
- W2126265909 hasConcept C97355855 @default.
- W2126265909 hasConceptScore W2126265909C119599485 @default.
- W2126265909 hasConceptScore W2126265909C121332964 @default.
- W2126265909 hasConceptScore W2126265909C127413603 @default.
- W2126265909 hasConceptScore W2126265909C13862629 @default.
- W2126265909 hasConceptScore W2126265909C165801399 @default.
- W2126265909 hasConceptScore W2126265909C171250308 @default.
- W2126265909 hasConceptScore W2126265909C172385210 @default.
- W2126265909 hasConceptScore W2126265909C178790620 @default.
- W2126265909 hasConceptScore W2126265909C185592680 @default.
- W2126265909 hasConceptScore W2126265909C18762648 @default.
- W2126265909 hasConceptScore W2126265909C19067145 @default.
- W2126265909 hasConceptScore W2126265909C191897082 @default.
- W2126265909 hasConceptScore W2126265909C192562407 @default.
- W2126265909 hasConceptScore W2126265909C2361726 @default.
- W2126265909 hasConceptScore W2126265909C2779227376 @default.
- W2126265909 hasConceptScore W2126265909C2779851234 @default.
- W2126265909 hasConceptScore W2126265909C3017618536 @default.
- W2126265909 hasConceptScore W2126265909C41008148 @default.
- W2126265909 hasConceptScore W2126265909C49040817 @default.
- W2126265909 hasConceptScore W2126265909C501308230 @default.
- W2126265909 hasConceptScore W2126265909C544956773 @default.
- W2126265909 hasConceptScore W2126265909C56739046 @default.
- W2126265909 hasConceptScore W2126265909C68710425 @default.
- W2126265909 hasConceptScore W2126265909C69357855 @default.
- W2126265909 hasConceptScore W2126265909C97355855 @default.
- W2126265909 hasLocation W21262659091 @default.
- W2126265909 hasOpenAccess W2126265909 @default.
- W2126265909 hasPrimaryLocation W21262659091 @default.
- W2126265909 hasRelatedWork W1977991479 @default.
- W2126265909 hasRelatedWork W1990850462 @default.
- W2126265909 hasRelatedWork W1997391125 @default.
- W2126265909 hasRelatedWork W2003308838 @default.
- W2126265909 hasRelatedWork W2048208733 @default.
- W2126265909 hasRelatedWork W2064473101 @default.
- W2126265909 hasRelatedWork W2075684187 @default.
- W2126265909 hasRelatedWork W2081335663 @default.
- W2126265909 hasRelatedWork W2167022685 @default.
- W2126265909 hasRelatedWork W2322054428 @default.
- W2126265909 hasRelatedWork W2326806442 @default.
- W2126265909 hasRelatedWork W2338176868 @default.
- W2126265909 hasRelatedWork W2944097240 @default.
- W2126265909 hasRelatedWork W2946356308 @default.
- W2126265909 hasRelatedWork W3045825521 @default.
- W2126265909 hasRelatedWork W3119982466 @default.
- W2126265909 hasRelatedWork W3192176733 @default.
- W2126265909 hasRelatedWork W2187206870 @default.
- W2126265909 hasRelatedWork W2272366423 @default.
- W2126265909 hasRelatedWork W2513105289 @default.
- W2126265909 isParatext "false" @default.
- W2126265909 isRetracted "false" @default.
- W2126265909 magId "2126265909" @default.
- W2126265909 workType "article" @default.