Matches in SemOpenAlex for { <https://semopenalex.org/work/W2126297552> ?p ?o ?g. }
- W2126297552 endingPage "1520" @default.
- W2126297552 startingPage "1516" @default.
- W2126297552 abstract "Dense, ordered arrays of <100>-oriented Si nanorods with uniform aspect ratios up to 5:1 and a uniform diameter of 15 nm were fabricated by block copolymer lithography based on the inverse of the traditional cylindrical hole strategy and reactive ion etching. The reported approach combines control over diameter, orientation, and position of the nanorods and compatibility with complementary metal oxide semiconductor (CMOS) technology because no nonvolatile metals generating deep levels in silicon, such as gold or iron, are involved. The Si nanorod arrays exhibit the same degree of order as the block copolymer templates." @default.
- W2126297552 created "2016-06-24" @default.
- W2126297552 creator A5018027230 @default.
- W2126297552 creator A5020171024 @default.
- W2126297552 creator A5029685348 @default.
- W2126297552 creator A5038024347 @default.
- W2126297552 creator A5041163341 @default.
- W2126297552 creator A5042098091 @default.
- W2126297552 creator A5064340656 @default.
- W2126297552 creator A5064353342 @default.
- W2126297552 creator A5064358362 @default.
- W2126297552 date "2007-05-26" @default.
- W2126297552 modified "2023-09-25" @default.
- W2126297552 title "Ordered Arrays of 〈100〉-Oriented Silicon Nanorods by CMOS-Compatible Block Copolymer Lithography" @default.
- W2126297552 cites W1589061476 @default.
- W2126297552 cites W1977919655 @default.
- W2126297552 cites W1981053820 @default.
- W2126297552 cites W1985633457 @default.
- W2126297552 cites W1997498714 @default.
- W2126297552 cites W2003398981 @default.
- W2126297552 cites W2005261685 @default.
- W2126297552 cites W2009646965 @default.
- W2126297552 cites W2017656280 @default.
- W2126297552 cites W2021515738 @default.
- W2126297552 cites W2023579904 @default.
- W2126297552 cites W2026017682 @default.
- W2126297552 cites W2033324428 @default.
- W2126297552 cites W2036237341 @default.
- W2126297552 cites W2044357338 @default.
- W2126297552 cites W2045699160 @default.
- W2126297552 cites W2046914999 @default.
- W2126297552 cites W2052638041 @default.
- W2126297552 cites W2053746708 @default.
- W2126297552 cites W2081479784 @default.
- W2126297552 cites W2082528095 @default.
- W2126297552 cites W2083174643 @default.
- W2126297552 cites W2088291505 @default.
- W2126297552 cites W2090073487 @default.
- W2126297552 cites W2092597061 @default.
- W2126297552 cites W2093421311 @default.
- W2126297552 cites W2093640652 @default.
- W2126297552 cites W2094331980 @default.
- W2126297552 cites W2094629353 @default.
- W2126297552 cites W2095253276 @default.
- W2126297552 cites W2103923057 @default.
- W2126297552 cites W2103998521 @default.
- W2126297552 cites W2118625035 @default.
- W2126297552 cites W2142353285 @default.
- W2126297552 cites W2160391936 @default.
- W2126297552 cites W2161549992 @default.
- W2126297552 cites W2165571551 @default.
- W2126297552 cites W2167222993 @default.
- W2126297552 cites W2171158267 @default.
- W2126297552 cites W2952047585 @default.
- W2126297552 doi "https://doi.org/10.1021/nl070275d" @default.
- W2126297552 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/17530809" @default.
- W2126297552 hasPublicationYear "2007" @default.
- W2126297552 type Work @default.
- W2126297552 sameAs 2126297552 @default.
- W2126297552 citedByCount "111" @default.
- W2126297552 countsByYear W21262975522012 @default.
- W2126297552 countsByYear W21262975522013 @default.
- W2126297552 countsByYear W21262975522014 @default.
- W2126297552 countsByYear W21262975522015 @default.
- W2126297552 countsByYear W21262975522016 @default.
- W2126297552 countsByYear W21262975522017 @default.
- W2126297552 countsByYear W21262975522018 @default.
- W2126297552 countsByYear W21262975522019 @default.
- W2126297552 countsByYear W21262975522020 @default.
- W2126297552 countsByYear W21262975522021 @default.
- W2126297552 countsByYear W21262975522022 @default.
- W2126297552 countsByYear W21262975522023 @default.
- W2126297552 crossrefType "journal-article" @default.
- W2126297552 hasAuthorship W2126297552A5018027230 @default.
- W2126297552 hasAuthorship W2126297552A5020171024 @default.
- W2126297552 hasAuthorship W2126297552A5029685348 @default.
- W2126297552 hasAuthorship W2126297552A5038024347 @default.
- W2126297552 hasAuthorship W2126297552A5041163341 @default.
- W2126297552 hasAuthorship W2126297552A5042098091 @default.
- W2126297552 hasAuthorship W2126297552A5064340656 @default.
- W2126297552 hasAuthorship W2126297552A5064353342 @default.
- W2126297552 hasAuthorship W2126297552A5064358362 @default.
- W2126297552 hasConcept C100460472 @default.
- W2126297552 hasConcept C126201875 @default.
- W2126297552 hasConcept C130472188 @default.
- W2126297552 hasConcept C15920480 @default.
- W2126297552 hasConcept C159985019 @default.
- W2126297552 hasConcept C171250308 @default.
- W2126297552 hasConcept C192562407 @default.
- W2126297552 hasConcept C204223013 @default.
- W2126297552 hasConcept C2779227376 @default.
- W2126297552 hasConcept C49040817 @default.
- W2126297552 hasConcept C521977710 @default.
- W2126297552 hasConcept C544956773 @default.
- W2126297552 hasConcept C82714645 @default.
- W2126297552 hasConceptScore W2126297552C100460472 @default.
- W2126297552 hasConceptScore W2126297552C126201875 @default.
- W2126297552 hasConceptScore W2126297552C130472188 @default.