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- W2126317650 abstract "This paper presents a new technique for thickness control in film forming processes. The technique utilizes fuzzy logic and neural network methods to achieve a MIMO controller that accounts for strong interactions between the thickness in different lanes and for the large time delay between the actuators and the sensor. Experimental results demonstrate the performance of the controller." @default.
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- W2126317650 date "2002-11-27" @default.
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- W2126317650 title "Fuzzy-neural control of film forming processes" @default.
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- W2126317650 doi "https://doi.org/10.1109/fuzzy.1998.687542" @default.
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