FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2126424583> ?p ?o ?g. }

• W2126424583 endingPage "274" @default.
• W2126424583 startingPage "266" @default.
• W2126424583 abstract "Abstract Hydrogen is an important component of the gas‐phase growth chemistry for GaN, which is typically based on NH 3 and (CH 3 ) 3 Ga, and also the processing environment for subsequent device fabrication (e.g., SiH 4 for dielectric deposition, NH 3 or H 2 annealing ambients), and is found to readily permeate heteroepitaxial material at temperatures ≤200 °C. Its main effect has been the passivation of Mg acceptors in p‐GaN through the formation of neutral Mg‐H complexes, which can be dissociated through minority‐carrier (electron) injection or simple thermal annealing. Atomic hydrogen is also found to passivate a variety of other species in GaN, as detected by a change in the electrical or optical properties of the material. The injection of hydrogen during a large variety of device fabrication steps has been detected by secondary ion mass sprectrometry (SIMS) profiling using 2 H isotopic labeling. Basically all of the acceptor species in GaN, i.e., Mg, C, Ca, and Cd, are found to form complexes with hydrogen." @default.
• W2126424583 created "2016-06-24" @default.
• W2126424583 creator A5016479284 @default.
• W2126424583 creator A5085381025 @default.
• W2126424583 date "2010-12-01" @default.
• W2126424583 modified "2023-09-24" @default.
• W2126424583 title "Role of Hydrogen in the CVD of Wide Bandgap Nitride Semiconductors" @default.
• W2126424583 cites W1594128204 @default.
• W2126424583 cites W1966781398 @default.
• W2126424583 cites W1986074426 @default.
• W2126424583 cites W1989267542 @default.
• W2126424583 cites W1996041743 @default.
• W2126424583 cites W1999568183 @default.
• W2126424583 cites W2001669988 @default.
• W2126424583 cites W2002541771 @default.
• W2126424583 cites W2008112411 @default.
• W2126424583 cites W2011704896 @default.
• W2126424583 cites W2012810212 @default.
• W2126424583 cites W2012968311 @default.
• W2126424583 cites W2016429050 @default.
• W2126424583 cites W2018023228 @default.
• W2126424583 cites W2023173030 @default.
• W2126424583 cites W2026562206 @default.
• W2126424583 cites W2047643355 @default.
• W2126424583 cites W2048781276 @default.
• W2126424583 cites W2049732906 @default.
• W2126424583 cites W2050766260 @default.
• W2126424583 cites W2052076497 @default.
• W2126424583 cites W2054454305 @default.
• W2126424583 cites W2059873816 @default.
• W2126424583 cites W2063107242 @default.
• W2126424583 cites W2063835243 @default.
• W2126424583 cites W2065724515 @default.
• W2126424583 cites W2070086908 @default.
• W2126424583 cites W2072942251 @default.
• W2126424583 cites W2081531408 @default.
• W2126424583 cites W2082095752 @default.
• W2126424583 cites W2084982028 @default.
• W2126424583 cites W2086370831 @default.
• W2126424583 cites W2089214508 @default.
• W2126424583 cites W2094914528 @default.
• W2126424583 cites W2110807185 @default.
• W2126424583 cites W2148931625 @default.
• W2126424583 cites W2158373830 @default.
• W2126424583 cites W2328971818 @default.
• W2126424583 cites W809163751 @default.
• W2126424583 doi "https://doi.org/10.1002/cvde.201000041" @default.
• W2126424583 hasPublicationYear "2010" @default.
• W2126424583 type Work @default.
• W2126424583 sameAs 2126424583 @default.
• W2126424583 citedByCount "9" @default.
• W2126424583 countsByYear W21264245832013 @default.
• W2126424583 countsByYear W21264245832015 @default.
• W2126424583 countsByYear W21264245832016 @default.
• W2126424583 countsByYear W21264245832022 @default.
• W2126424583 crossrefType "journal-article" @default.
• W2126424583 hasAuthorship W2126424583A5016479284 @default.
• W2126424583 hasAuthorship W2126424583A5085381025 @default.
• W2126424583 hasConcept C108225325 @default.
• W2126424583 hasConcept C113196181 @default.
• W2126424583 hasConcept C121332964 @default.
• W2126424583 hasConcept C133386390 @default.
• W2126424583 hasConcept C136525101 @default.
• W2126424583 hasConcept C142724271 @default.
• W2126424583 hasConcept C145148216 @default.
• W2126424583 hasConcept C171250308 @default.
• W2126424583 hasConcept C178790620 @default.
• W2126424583 hasConcept C179104552 @default.
• W2126424583 hasConcept C181966813 @default.
• W2126424583 hasConcept C185592680 @default.
• W2126424583 hasConcept C191897082 @default.
• W2126424583 hasConcept C192562407 @default.
• W2126424583 hasConcept C194760766 @default.
• W2126424583 hasConcept C204787440 @default.
• W2126424583 hasConcept C26873012 @default.
• W2126424583 hasConcept C2777431650 @default.
• W2126424583 hasConcept C2777855556 @default.
• W2126424583 hasConcept C2779227376 @default.
• W2126424583 hasConcept C2779892579 @default.
• W2126424583 hasConcept C33574316 @default.
• W2126424583 hasConcept C49040817 @default.
• W2126424583 hasConcept C512968161 @default.
• W2126424583 hasConcept C544956773 @default.
• W2126424583 hasConcept C57410435 @default.
• W2126424583 hasConcept C57863236 @default.
• W2126424583 hasConcept C71924100 @default.
• W2126424583 hasConcept C77671233 @default.
• W2126424583 hasConceptScore W2126424583C108225325 @default.
• W2126424583 hasConceptScore W2126424583C113196181 @default.
• W2126424583 hasConceptScore W2126424583C121332964 @default.
• W2126424583 hasConceptScore W2126424583C133386390 @default.
• W2126424583 hasConceptScore W2126424583C136525101 @default.
• W2126424583 hasConceptScore W2126424583C142724271 @default.
• W2126424583 hasConceptScore W2126424583C145148216 @default.
• W2126424583 hasConceptScore W2126424583C171250308 @default.
• W2126424583 hasConceptScore W2126424583C178790620 @default.
• W2126424583 hasConceptScore W2126424583C179104552 @default.
• W2126424583 hasConceptScore W2126424583C181966813 @default.

• next