Matches in SemOpenAlex for { <https://semopenalex.org/work/W2126432007> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2126432007 abstract "We have designed, fabricated, and tested in-plane actuating ferromagnetic MEMS switches and solenoidal inductors, which were produced using a CMOS-compatible back-end process. This process creates compact high-performance devices without high temperature processes (<; 400°C) or etching into the plane of the wafer." @default.
- W2126432007 created "2016-06-24" @default.
- W2126432007 creator A5026598001 @default.
- W2126432007 creator A5026761262 @default.
- W2126432007 creator A5029471409 @default.
- W2126432007 creator A5032717745 @default.
- W2126432007 creator A5065082992 @default.
- W2126432007 creator A5070951403 @default.
- W2126432007 creator A5073166748 @default.
- W2126432007 creator A5083722253 @default.
- W2126432007 date "2009-06-01" @default.
- W2126432007 modified "2023-10-10" @default.
- W2126432007 title "CMOS-compatible back-end process for in-plane actuating ferromagnetic MEMS" @default.
- W2126432007 cites W2004206626 @default.
- W2126432007 cites W2038645738 @default.
- W2126432007 cites W2097204045 @default.
- W2126432007 cites W2128090102 @default.
- W2126432007 cites W2132934670 @default.
- W2126432007 cites W2142207109 @default.
- W2126432007 cites W2148737621 @default.
- W2126432007 cites W2174532409 @default.
- W2126432007 doi "https://doi.org/10.1109/sensor.2009.5285516" @default.
- W2126432007 hasPublicationYear "2009" @default.
- W2126432007 type Work @default.
- W2126432007 sameAs 2126432007 @default.
- W2126432007 citedByCount "6" @default.
- W2126432007 countsByYear W21264320072012 @default.
- W2126432007 countsByYear W21264320072014 @default.
- W2126432007 crossrefType "proceedings-article" @default.
- W2126432007 hasAuthorship W2126432007A5026598001 @default.
- W2126432007 hasAuthorship W2126432007A5026761262 @default.
- W2126432007 hasAuthorship W2126432007A5029471409 @default.
- W2126432007 hasAuthorship W2126432007A5032717745 @default.
- W2126432007 hasAuthorship W2126432007A5065082992 @default.
- W2126432007 hasAuthorship W2126432007A5070951403 @default.
- W2126432007 hasAuthorship W2126432007A5073166748 @default.
- W2126432007 hasAuthorship W2126432007A5083722253 @default.
- W2126432007 hasConcept C100460472 @default.
- W2126432007 hasConcept C111919701 @default.
- W2126432007 hasConcept C119599485 @default.
- W2126432007 hasConcept C127413603 @default.
- W2126432007 hasConcept C144534570 @default.
- W2126432007 hasConcept C160671074 @default.
- W2126432007 hasConcept C165801399 @default.
- W2126432007 hasConcept C171250308 @default.
- W2126432007 hasConcept C192562407 @default.
- W2126432007 hasConcept C2779227376 @default.
- W2126432007 hasConcept C37977207 @default.
- W2126432007 hasConcept C41008148 @default.
- W2126432007 hasConcept C46362747 @default.
- W2126432007 hasConcept C49040817 @default.
- W2126432007 hasConcept C98045186 @default.
- W2126432007 hasConceptScore W2126432007C100460472 @default.
- W2126432007 hasConceptScore W2126432007C111919701 @default.
- W2126432007 hasConceptScore W2126432007C119599485 @default.
- W2126432007 hasConceptScore W2126432007C127413603 @default.
- W2126432007 hasConceptScore W2126432007C144534570 @default.
- W2126432007 hasConceptScore W2126432007C160671074 @default.
- W2126432007 hasConceptScore W2126432007C165801399 @default.
- W2126432007 hasConceptScore W2126432007C171250308 @default.
- W2126432007 hasConceptScore W2126432007C192562407 @default.
- W2126432007 hasConceptScore W2126432007C2779227376 @default.
- W2126432007 hasConceptScore W2126432007C37977207 @default.
- W2126432007 hasConceptScore W2126432007C41008148 @default.
- W2126432007 hasConceptScore W2126432007C46362747 @default.
- W2126432007 hasConceptScore W2126432007C49040817 @default.
- W2126432007 hasConceptScore W2126432007C98045186 @default.
- W2126432007 hasLocation W21264320071 @default.
- W2126432007 hasOpenAccess W2126432007 @default.
- W2126432007 hasPrimaryLocation W21264320071 @default.
- W2126432007 hasRelatedWork W1276653532 @default.
- W2126432007 hasRelatedWork W1551284810 @default.
- W2126432007 hasRelatedWork W1594729555 @default.
- W2126432007 hasRelatedWork W1998915329 @default.
- W2126432007 hasRelatedWork W2013176038 @default.
- W2126432007 hasRelatedWork W2055129172 @default.
- W2126432007 hasRelatedWork W2088630571 @default.
- W2126432007 hasRelatedWork W2103344352 @default.
- W2126432007 hasRelatedWork W2111193199 @default.
- W2126432007 hasRelatedWork W2153094647 @default.
- W2126432007 hasRelatedWork W2155912564 @default.
- W2126432007 hasRelatedWork W2326163210 @default.
- W2126432007 hasRelatedWork W2375823297 @default.
- W2126432007 hasRelatedWork W2542121101 @default.
- W2126432007 hasRelatedWork W2766953445 @default.
- W2126432007 hasRelatedWork W2783281450 @default.
- W2126432007 hasRelatedWork W2905382354 @default.
- W2126432007 hasRelatedWork W2973599361 @default.
- W2126432007 hasRelatedWork W2297138737 @default.
- W2126432007 hasRelatedWork W2753418707 @default.
- W2126432007 isParatext "false" @default.
- W2126432007 isRetracted "false" @default.
- W2126432007 magId "2126432007" @default.
- W2126432007 workType "article" @default.