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- W2126502104 abstract "In this paper we present a micromachined Thermal Conductivity Detector (TCD), based on the Ultra Low Power (ULP) technology. The device has been electrically characterized with different Helium gas flows, via a microfluidic experimental setup. Extraction of global thermo-electric parameters, exploited for the development of an electro-thermal Spice model, has been performed directly from the experimental measurements and from 3-D electro-thermal FEM simulations of the device. The resulting Spice model agrees very well with the measurements, with a maximum error less than 0.22%." @default.
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- W2126502104 date "2011-05-01" @default.
- W2126502104 modified "2023-10-16" @default.
- W2126502104 title "Measurements, FEM simulation and spice modeling of a Thermal Conductivity Detector" @default.
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- W2126502104 doi "https://doi.org/10.1109/imtc.2011.5944118" @default.
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