Matches in SemOpenAlex for { <https://semopenalex.org/work/W2126632548> ?p ?o ?g. }
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- W2126632548 endingPage "H450" @default.
- W2126632548 startingPage "H450" @default.
- W2126632548 abstract "We recently reported low specific contact resistance values of NiSi and PtSi to silicon. In recent publications, such low values were attributed to dopant segregation. In this work, we tested this hypothesis by spreading resistance probe and secondary ion mass spectroscopy analyses. The observed weak dopant segregation could not explain lowering the contact resistance by orders of magnitude. Interface damage, intentionally created using Ni ion implantation, led to an increase of contact resistance (1–2 orders). We conclude that the low contact resistance is intrinsic to a high-quality silicide-silicon interface and can be obtained without active dopant segregation." @default.
- W2126632548 created "2016-06-24" @default.
- W2126632548 creator A5008300217 @default.
- W2126632548 creator A5034409493 @default.
- W2126632548 creator A5064237688 @default.
- W2126632548 creator A5074959897 @default.
- W2126632548 date "2010-01-01" @default.
- W2126632548 modified "2023-09-24" @default.
- W2126632548 title "Low Specific Contact Resistance of NiSi and PtSi to Si: Impact of Interface" @default.
- W2126632548 cites W2053384616 @default.
- W2126632548 cites W2081875192 @default.
- W2126632548 cites W2102803355 @default.
- W2126632548 cites W2107415773 @default.
- W2126632548 cites W2111577163 @default.
- W2126632548 cites W2115628776 @default.
- W2126632548 cites W2119041249 @default.
- W2126632548 cites W2125286558 @default.
- W2126632548 cites W2165003161 @default.
- W2126632548 cites W2499844158 @default.
- W2126632548 doi "https://doi.org/10.1149/1.3493906" @default.
- W2126632548 hasPublicationYear "2010" @default.
- W2126632548 type Work @default.
- W2126632548 sameAs 2126632548 @default.
- W2126632548 citedByCount "2" @default.
- W2126632548 countsByYear W21266325482012 @default.
- W2126632548 crossrefType "journal-article" @default.
- W2126632548 hasAuthorship W2126632548A5008300217 @default.
- W2126632548 hasAuthorship W2126632548A5034409493 @default.
- W2126632548 hasAuthorship W2126632548A5064237688 @default.
- W2126632548 hasAuthorship W2126632548A5074959897 @default.
- W2126632548 hasConcept C123671423 @default.
- W2126632548 hasConcept C145148216 @default.
- W2126632548 hasConcept C171250308 @default.
- W2126632548 hasConcept C178790620 @default.
- W2126632548 hasConcept C185592680 @default.
- W2126632548 hasConcept C191952053 @default.
- W2126632548 hasConcept C192562407 @default.
- W2126632548 hasConcept C207521374 @default.
- W2126632548 hasConcept C2779227376 @default.
- W2126632548 hasConcept C2780081452 @default.
- W2126632548 hasConcept C2780901251 @default.
- W2126632548 hasConcept C49040817 @default.
- W2126632548 hasConcept C544956773 @default.
- W2126632548 hasConcept C57863236 @default.
- W2126632548 hasConcept C77671233 @default.
- W2126632548 hasConceptScore W2126632548C123671423 @default.
- W2126632548 hasConceptScore W2126632548C145148216 @default.
- W2126632548 hasConceptScore W2126632548C171250308 @default.
- W2126632548 hasConceptScore W2126632548C178790620 @default.
- W2126632548 hasConceptScore W2126632548C185592680 @default.
- W2126632548 hasConceptScore W2126632548C191952053 @default.
- W2126632548 hasConceptScore W2126632548C192562407 @default.
- W2126632548 hasConceptScore W2126632548C207521374 @default.
- W2126632548 hasConceptScore W2126632548C2779227376 @default.
- W2126632548 hasConceptScore W2126632548C2780081452 @default.
- W2126632548 hasConceptScore W2126632548C2780901251 @default.
- W2126632548 hasConceptScore W2126632548C49040817 @default.
- W2126632548 hasConceptScore W2126632548C544956773 @default.
- W2126632548 hasConceptScore W2126632548C57863236 @default.
- W2126632548 hasConceptScore W2126632548C77671233 @default.
- W2126632548 hasIssue "12" @default.
- W2126632548 hasLocation W21266325481 @default.
- W2126632548 hasOpenAccess W2126632548 @default.
- W2126632548 hasPrimaryLocation W21266325481 @default.
- W2126632548 hasRelatedWork W1968467978 @default.
- W2126632548 hasRelatedWork W2010053156 @default.
- W2126632548 hasRelatedWork W2036414364 @default.
- W2126632548 hasRelatedWork W2082713480 @default.
- W2126632548 hasRelatedWork W2104325811 @default.
- W2126632548 hasRelatedWork W2139637680 @default.
- W2126632548 hasRelatedWork W2902946006 @default.
- W2126632548 hasRelatedWork W4280640876 @default.
- W2126632548 hasRelatedWork W4285399024 @default.
- W2126632548 hasRelatedWork W2513177783 @default.
- W2126632548 hasVolume "13" @default.
- W2126632548 isParatext "false" @default.
- W2126632548 isRetracted "false" @default.
- W2126632548 magId "2126632548" @default.
- W2126632548 workType "article" @default.