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• W2126682014 abstract "One of the most important parameters in an SOI-DRAM process is to maintain an excellent gate oxide integrity. Recently, many papers related to microdefects in a SIMOX wafer itself, which cause gate oxide failure, have been reported. However, little study on process induced defects in real device fabrication, especially high density DRAMs, has been done. We find a crucial issue in SOI-DRAM on a SIMOX substrate is a high dose implantation-induced-defect generation (IIDG) during source/drain (S/D) implantation. We propose that a reduced S/D implantation dose is a key factor to achieve a high density DRAM and a possible mechanism for the IIDG in a SIMOX wafer is also discussed." @default.
• W2126682014 created "2016-06-24" @default.
• W2126682014 creator A5003315307 @default.
• W2126682014 creator A5013133451 @default.
• W2126682014 creator A5016284979 @default.
• W2126682014 creator A5046688257 @default.
• W2126682014 creator A5047150963 @default.
• W2126682014 creator A5047464971 @default.
• W2126682014 creator A5056786803 @default.
• W2126682014 creator A5084817376 @default.
• W2126682014 date "2002-11-19" @default.
• W2126682014 modified "2023-09-24" @default.
• W2126682014 title "Implantation-induced-defect generation during device fabrication on a SIMOX substrate" @default.
• W2126682014 cites W2009765192 @default.
• W2126682014 cites W2327061707 @default.
• W2126682014 cites W2334830360 @default.
• W2126682014 doi "https://doi.org/10.1109/soi.1995.526508" @default.
• W2126682014 hasPublicationYear "2002" @default.
• W2126682014 type Work @default.
• W2126682014 sameAs 2126682014 @default.
• W2126682014 citedByCount "0" @default.
• W2126682014 crossrefType "proceedings-article" @default.
• W2126682014 hasAuthorship W2126682014A5003315307 @default.
• W2126682014 hasAuthorship W2126682014A5013133451 @default.
• W2126682014 hasAuthorship W2126682014A5016284979 @default.
• W2126682014 hasAuthorship W2126682014A5046688257 @default.
• W2126682014 hasAuthorship W2126682014A5047150963 @default.
• W2126682014 hasAuthorship W2126682014A5047464971 @default.
• W2126682014 hasAuthorship W2126682014A5056786803 @default.
• W2126682014 hasAuthorship W2126682014A5084817376 @default.
• W2126682014 hasConcept C111368507 @default.
• W2126682014 hasConcept C119599485 @default.
• W2126682014 hasConcept C127313418 @default.
• W2126682014 hasConcept C127413603 @default.
• W2126682014 hasConcept C136525101 @default.
• W2126682014 hasConcept C142724271 @default.
• W2126682014 hasConcept C145148216 @default.
• W2126682014 hasConcept C160671074 @default.
• W2126682014 hasConcept C165801399 @default.
• W2126682014 hasConcept C172385210 @default.
• W2126682014 hasConcept C178790620 @default.
• W2126682014 hasConcept C185592680 @default.
• W2126682014 hasConcept C192562407 @default.
• W2126682014 hasConcept C204787440 @default.
• W2126682014 hasConcept C2361726 @default.
• W2126682014 hasConcept C2777289219 @default.
• W2126682014 hasConcept C41823505 @default.
• W2126682014 hasConcept C49040817 @default.
• W2126682014 hasConcept C53143962 @default.
• W2126682014 hasConcept C544956773 @default.
• W2126682014 hasConcept C71924100 @default.
• W2126682014 hasConcept C7366592 @default.
• W2126682014 hasConceptScore W2126682014C111368507 @default.
• W2126682014 hasConceptScore W2126682014C119599485 @default.
• W2126682014 hasConceptScore W2126682014C127313418 @default.
• W2126682014 hasConceptScore W2126682014C127413603 @default.
• W2126682014 hasConceptScore W2126682014C136525101 @default.
• W2126682014 hasConceptScore W2126682014C142724271 @default.
• W2126682014 hasConceptScore W2126682014C145148216 @default.
• W2126682014 hasConceptScore W2126682014C160671074 @default.
• W2126682014 hasConceptScore W2126682014C165801399 @default.
• W2126682014 hasConceptScore W2126682014C172385210 @default.
• W2126682014 hasConceptScore W2126682014C178790620 @default.
• W2126682014 hasConceptScore W2126682014C185592680 @default.
• W2126682014 hasConceptScore W2126682014C192562407 @default.
• W2126682014 hasConceptScore W2126682014C204787440 @default.
• W2126682014 hasConceptScore W2126682014C2361726 @default.
• W2126682014 hasConceptScore W2126682014C2777289219 @default.
• W2126682014 hasConceptScore W2126682014C41823505 @default.
• W2126682014 hasConceptScore W2126682014C49040817 @default.
• W2126682014 hasConceptScore W2126682014C53143962 @default.
• W2126682014 hasConceptScore W2126682014C544956773 @default.
• W2126682014 hasConceptScore W2126682014C71924100 @default.
• W2126682014 hasConceptScore W2126682014C7366592 @default.
• W2126682014 hasLocation W21266820141 @default.
• W2126682014 hasOpenAccess W2126682014 @default.
• W2126682014 hasPrimaryLocation W21266820141 @default.
• W2126682014 hasRelatedWork W1496014619 @default.
• W2126682014 hasRelatedWork W1526491876 @default.
• W2126682014 hasRelatedWork W1926528629 @default.
• W2126682014 hasRelatedWork W1975905183 @default.
• W2126682014 hasRelatedWork W1976793248 @default.
• W2126682014 hasRelatedWork W198087910 @default.
• W2126682014 hasRelatedWork W2034073245 @default.
• W2126682014 hasRelatedWork W2035830431 @default.
• W2126682014 hasRelatedWork W2081187872 @default.
• W2126682014 hasRelatedWork W2105307917 @default.
• W2126682014 hasRelatedWork W2126926618 @default.
• W2126682014 hasRelatedWork W2128955878 @default.
• W2126682014 hasRelatedWork W2147151386 @default.
• W2126682014 hasRelatedWork W2150066775 @default.
• W2126682014 hasRelatedWork W2154178503 @default.
• W2126682014 hasRelatedWork W2157599433 @default.
• W2126682014 hasRelatedWork W2169255782 @default.
• W2126682014 hasRelatedWork W2808385636 @default.
• W2126682014 hasRelatedWork W1738999447 @default.
• W2126682014 hasRelatedWork W3002648240 @default.
• W2126682014 isParatext "false" @default.
• W2126682014 isRetracted "false" @default.
• W2126682014 magId "2126682014" @default.

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