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• W2126871340 abstract "Abstract Film bulk acoustic resonators (FBARs) have been evaluated for use as biosensors because of their high sensitivity and small size. This study fabricated a novel human IgE biosensor using shear-mode FBAR devices with c -axis 23°-tilted AlN thin films. Off-axis radio frequency (RF) magnetron sputtering method was used for deposition of c -axis 23°-tilted AlN thin films. The deposition parameters were adopted as working pressure of 5 mTorr, substrate temperature of 300°C, sputtering power of 250 W, and 50 mm distance between off-axis and on-axis. The characteristics of the AlN thin films were investigated by X-ray diffraction and scanning electron microscopy. The frequency response was measured with an HP8720 network analyzer with a CASCADE probe station. The X-ray diffraction revealed (002) preferred wurtzite structure, and the cross-sectional image showed columnar structure with 23°-tilted AlN thin films. In the biosensor, an Au/Cr layer in the FBAR backside cavity was used as the detection layer and the Au surface was modified using self-assembly monolayers (SAMs) method. Then, the antigen and antibody were coated on biosensor through their high specificity property. Finally, the shear-mode FBAR device with k t 2 of 3.18% was obtained, and the average sensitivity for human IgE detection of about 1.425 × 10 5 cm 2 /g was achieved." @default.
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• W2126871340 date "2015-02-18" @default.
• W2126871340 modified "2023-10-18" @default.
• W2126871340 title "Biosensor for human IgE detection using shear-mode FBAR devices" @default.
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• W2126871340 doi "https://doi.org/10.1186/s11671-015-0736-3" @default.
• W2126871340 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/4385051" @default.
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