Matches in SemOpenAlex for { <https://semopenalex.org/work/W2126906904> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2126906904 abstract "In this paper, we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work, the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expression for central deflection of corrugated diaphragm and its relationship with residual stress. Then, the capacitance and sensitivity of sensor using corrugated diaphragm with residual stress are calculated under bias voltage and pressure. The analytical results are compared with simulation using a Finite Element Method (FEM). The results show that the new analytical model is very close with simulation results." @default.
- W2126906904 created "2016-06-24" @default.
- W2126906904 creator A5026398130 @default.
- W2126906904 creator A5058632036 @default.
- W2126906904 date "2013-11-01" @default.
- W2126906904 modified "2023-09-27" @default.
- W2126906904 title "Accurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress" @default.
- W2126906904 cites W1973061307 @default.
- W2126906904 cites W1977106220 @default.
- W2126906904 cites W1987753622 @default.
- W2126906904 cites W2009753015 @default.
- W2126906904 cites W2032812810 @default.
- W2126906904 cites W2047152173 @default.
- W2126906904 cites W2064148984 @default.
- W2126906904 cites W2074042551 @default.
- W2126906904 cites W2095203365 @default.
- W2126906904 cites W2102542198 @default.
- W2126906904 cites W2108305939 @default.
- W2126906904 cites W2114911649 @default.
- W2126906904 cites W2136694505 @default.
- W2126906904 cites W2149305455 @default.
- W2126906904 cites W2151926534 @default.
- W2126906904 cites W2173696150 @default.
- W2126906904 doi "https://doi.org/10.5829/idosi.ije.2014.27.01a.09" @default.
- W2126906904 hasPublicationYear "2013" @default.
- W2126906904 type Work @default.
- W2126906904 sameAs 2126906904 @default.
- W2126906904 citedByCount "3" @default.
- W2126906904 countsByYear W21269069042015 @default.
- W2126906904 countsByYear W21269069042016 @default.
- W2126906904 countsByYear W21269069042017 @default.
- W2126906904 crossrefType "journal-article" @default.
- W2126906904 hasAuthorship W2126906904A5026398130 @default.
- W2126906904 hasAuthorship W2126906904A5058632036 @default.
- W2126906904 hasConcept C11413529 @default.
- W2126906904 hasConcept C121332964 @default.
- W2126906904 hasConcept C127413603 @default.
- W2126906904 hasConcept C138885662 @default.
- W2126906904 hasConcept C155512373 @default.
- W2126906904 hasConcept C159985019 @default.
- W2126906904 hasConcept C164292776 @default.
- W2126906904 hasConcept C17525397 @default.
- W2126906904 hasConcept C192562407 @default.
- W2126906904 hasConcept C198394728 @default.
- W2126906904 hasConcept C21036866 @default.
- W2126906904 hasConcept C24890656 @default.
- W2126906904 hasConcept C30066665 @default.
- W2126906904 hasConcept C37292000 @default.
- W2126906904 hasConcept C37977207 @default.
- W2126906904 hasConcept C41008148 @default.
- W2126906904 hasConcept C41895202 @default.
- W2126906904 hasConcept C49040817 @default.
- W2126906904 hasConcept C62520636 @default.
- W2126906904 hasConcept C66938386 @default.
- W2126906904 hasConceptScore W2126906904C11413529 @default.
- W2126906904 hasConceptScore W2126906904C121332964 @default.
- W2126906904 hasConceptScore W2126906904C127413603 @default.
- W2126906904 hasConceptScore W2126906904C138885662 @default.
- W2126906904 hasConceptScore W2126906904C155512373 @default.
- W2126906904 hasConceptScore W2126906904C159985019 @default.
- W2126906904 hasConceptScore W2126906904C164292776 @default.
- W2126906904 hasConceptScore W2126906904C17525397 @default.
- W2126906904 hasConceptScore W2126906904C192562407 @default.
- W2126906904 hasConceptScore W2126906904C198394728 @default.
- W2126906904 hasConceptScore W2126906904C21036866 @default.
- W2126906904 hasConceptScore W2126906904C24890656 @default.
- W2126906904 hasConceptScore W2126906904C30066665 @default.
- W2126906904 hasConceptScore W2126906904C37292000 @default.
- W2126906904 hasConceptScore W2126906904C37977207 @default.
- W2126906904 hasConceptScore W2126906904C41008148 @default.
- W2126906904 hasConceptScore W2126906904C41895202 @default.
- W2126906904 hasConceptScore W2126906904C49040817 @default.
- W2126906904 hasConceptScore W2126906904C62520636 @default.
- W2126906904 hasConceptScore W2126906904C66938386 @default.
- W2126906904 hasIssue "1 (A)" @default.
- W2126906904 hasLocation W21269069041 @default.
- W2126906904 hasOpenAccess W2126906904 @default.
- W2126906904 hasPrimaryLocation W21269069041 @default.
- W2126906904 hasRelatedWork W1502236827 @default.
- W2126906904 hasRelatedWork W1975837158 @default.
- W2126906904 hasRelatedWork W2039595258 @default.
- W2126906904 hasRelatedWork W2126906904 @default.
- W2126906904 hasRelatedWork W2139228874 @default.
- W2126906904 hasRelatedWork W2367996690 @default.
- W2126906904 hasRelatedWork W2388937300 @default.
- W2126906904 hasRelatedWork W2582914922 @default.
- W2126906904 hasRelatedWork W2903336294 @default.
- W2126906904 hasRelatedWork W1706162024 @default.
- W2126906904 hasVolume "27" @default.
- W2126906904 isParatext "false" @default.
- W2126906904 isRetracted "false" @default.
- W2126906904 magId "2126906904" @default.
- W2126906904 workType "article" @default.