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• W2126940417 abstract "Control of the interfacial crystallographic structure between a dielectric film and a gate electrode is one of the most critical issues for assuring the high performance and the reliability of a stacked MOS structure using high-k dielectric thin films. In this study, quantum chemical molecular dynamics was applied to explicate the mechanism of degradation of interfacial integrity of the gate stack systems which is caused by point defects. We found that point defects such as oxygen and carbon interstitials deteriorate the electronic quality of a hafnium dioxide film and the W/HfO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> interface structure. The estimated results were confirmed by experiments using synchrotron-radiation photoemission spectroscopy." @default.
• W2126940417 created "2016-06-24" @default.
• W2126940417 creator A5004453040 @default.
• W2126940417 creator A5009219051 @default.
• W2126940417 creator A5023904638 @default.
• W2126940417 date "2009-09-01" @default.
• W2126940417 modified "2023-09-27" @default.
• W2126940417 title "Quantum Chemical Molecular Dynamics Study of Degradation Mechanism of Interface Integrity between a HfO2 Thin Film and a Metal Gate Electrode" @default.
• W2126940417 cites W1980342082 @default.
• W2126940417 cites W2003645630 @default.
• W2126940417 cites W2019017977 @default.
• W2126940417 cites W2049079467 @default.
• W2126940417 cites W2049677585 @default.
• W2126940417 cites W2112554416 @default.
• W2126940417 cites W2546317231 @default.
• W2126940417 doi "https://doi.org/10.1109/sispad.2009.5290215" @default.
• W2126940417 hasPublicationYear "2009" @default.
• W2126940417 type Work @default.
• W2126940417 sameAs 2126940417 @default.
• W2126940417 citedByCount "3" @default.
• W2126940417 countsByYear W21269404172012 @default.
• W2126940417 crossrefType "proceedings-article" @default.
• W2126940417 hasAuthorship W2126940417A5004453040 @default.
• W2126940417 hasAuthorship W2126940417A5009219051 @default.
• W2126940417 hasAuthorship W2126940417A5023904638 @default.
• W2126940417 hasConcept C119599485 @default.
• W2126940417 hasConcept C120665830 @default.
• W2126940417 hasConcept C121332964 @default.
• W2126940417 hasConcept C127413603 @default.
• W2126940417 hasConcept C133386390 @default.
• W2126940417 hasConcept C147597530 @default.
• W2126940417 hasConcept C147789679 @default.
• W2126940417 hasConcept C159467904 @default.
• W2126940417 hasConcept C16332341 @default.
• W2126940417 hasConcept C165801399 @default.
• W2126940417 hasConcept C166972891 @default.
• W2126940417 hasConcept C171250308 @default.
• W2126940417 hasConcept C172385210 @default.
• W2126940417 hasConcept C17525397 @default.
• W2126940417 hasConcept C175708663 @default.
• W2126940417 hasConcept C185592680 @default.
• W2126940417 hasConcept C19067145 @default.
• W2126940417 hasConcept C191897082 @default.
• W2126940417 hasConcept C192562407 @default.
• W2126940417 hasConcept C199360897 @default.
• W2126940417 hasConcept C2361726 @default.
• W2126940417 hasConcept C41008148 @default.
• W2126940417 hasConcept C42360764 @default.
• W2126940417 hasConcept C49040817 @default.
• W2126940417 hasConcept C51140833 @default.
• W2126940417 hasConcept C51286037 @default.
• W2126940417 hasConcept C534791751 @default.
• W2126940417 hasConcept C546638069 @default.
• W2126940417 hasConcept C59593255 @default.
• W2126940417 hasConcept C9395851 @default.
• W2126940417 hasConceptScore W2126940417C119599485 @default.
• W2126940417 hasConceptScore W2126940417C120665830 @default.
• W2126940417 hasConceptScore W2126940417C121332964 @default.
• W2126940417 hasConceptScore W2126940417C127413603 @default.
• W2126940417 hasConceptScore W2126940417C133386390 @default.
• W2126940417 hasConceptScore W2126940417C147597530 @default.
• W2126940417 hasConceptScore W2126940417C147789679 @default.
• W2126940417 hasConceptScore W2126940417C159467904 @default.
• W2126940417 hasConceptScore W2126940417C16332341 @default.
• W2126940417 hasConceptScore W2126940417C165801399 @default.
• W2126940417 hasConceptScore W2126940417C166972891 @default.
• W2126940417 hasConceptScore W2126940417C171250308 @default.
• W2126940417 hasConceptScore W2126940417C172385210 @default.
• W2126940417 hasConceptScore W2126940417C17525397 @default.
• W2126940417 hasConceptScore W2126940417C175708663 @default.
• W2126940417 hasConceptScore W2126940417C185592680 @default.
• W2126940417 hasConceptScore W2126940417C19067145 @default.
• W2126940417 hasConceptScore W2126940417C191897082 @default.
• W2126940417 hasConceptScore W2126940417C192562407 @default.
• W2126940417 hasConceptScore W2126940417C199360897 @default.
• W2126940417 hasConceptScore W2126940417C2361726 @default.
• W2126940417 hasConceptScore W2126940417C41008148 @default.
• W2126940417 hasConceptScore W2126940417C42360764 @default.
• W2126940417 hasConceptScore W2126940417C49040817 @default.
• W2126940417 hasConceptScore W2126940417C51140833 @default.
• W2126940417 hasConceptScore W2126940417C51286037 @default.
• W2126940417 hasConceptScore W2126940417C534791751 @default.
• W2126940417 hasConceptScore W2126940417C546638069 @default.
• W2126940417 hasConceptScore W2126940417C59593255 @default.
• W2126940417 hasConceptScore W2126940417C9395851 @default.
• W2126940417 hasLocation W21269404171 @default.
• W2126940417 hasOpenAccess W2126940417 @default.
• W2126940417 hasPrimaryLocation W21269404171 @default.
• W2126940417 hasRelatedWork W1976476146 @default.
• W2126940417 hasRelatedWork W2001775478 @default.
• W2126940417 hasRelatedWork W2025198207 @default.
• W2126940417 hasRelatedWork W2050297371 @default.
• W2126940417 hasRelatedWork W2055782189 @default.
• W2126940417 hasRelatedWork W2066851646 @default.
• W2126940417 hasRelatedWork W2080963344 @default.
• W2126940417 hasRelatedWork W2082242015 @default.
• W2126940417 hasRelatedWork W2090447549 @default.
• W2126940417 hasRelatedWork W2136663809 @default.
• W2126940417 hasRelatedWork W2153574962 @default.
• W2126940417 hasRelatedWork W2158260131 @default.

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