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- W2127177546 abstract "The effective removal of nano particles from silicon wafer surface was demonstrated using the self-channeled plasma filament excited by a femtosecond (130 fs) Ti:Sapphire laser (lambda <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>p</sub> =790 nm). This process has achieved successfully the removal of 100 nm sized polystyrene latex (PSL) particles from the surface. The photoinduced self-channeled plasma filament in air reached a length of approximately 110-130 mm from the first focal spot with the diameters ranging from 40 to 50 mum at the input intensities more than 1.0 times 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>14</sup> W/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . By the scan of wafer using the X-Y-Z stage during self-channeled plasma filament, the removal variation of nano particles on surface was observed in situ before and after plasma filament occurred. The cleaning efficiency was strongly dependent on the gap distance between the plasma filament and the surface. The removal efficiency of nano particles reached to 97% with no damage on the surface when the gap is 150 mum." @default.
- W2127177546 created "2016-06-24" @default.
- W2127177546 creator A5013947247 @default.
- W2127177546 creator A5022255280 @default.
- W2127177546 creator A5054508030 @default.
- W2127177546 creator A5075928866 @default.
- W2127177546 creator A5086834547 @default.
- W2127177546 date "2009-08-01" @default.
- W2127177546 modified "2023-10-16" @default.
- W2127177546 title "Removal of nano particles on silicon wafer by self-channeled plasma filament" @default.
- W2127177546 doi "https://doi.org/10.1109/cleopr.2009.5292259" @default.
- W2127177546 hasPublicationYear "2009" @default.
- W2127177546 type Work @default.
- W2127177546 sameAs 2127177546 @default.
- W2127177546 citedByCount "0" @default.
- W2127177546 crossrefType "proceedings-article" @default.
- W2127177546 hasAuthorship W2127177546A5013947247 @default.
- W2127177546 hasAuthorship W2127177546A5022255280 @default.
- W2127177546 hasAuthorship W2127177546A5054508030 @default.
- W2127177546 hasAuthorship W2127177546A5075928866 @default.
- W2127177546 hasAuthorship W2127177546A5086834547 @default.
- W2127177546 hasConcept C113196181 @default.
- W2127177546 hasConcept C120665830 @default.
- W2127177546 hasConcept C121332964 @default.
- W2127177546 hasConcept C14228908 @default.
- W2127177546 hasConcept C159985019 @default.
- W2127177546 hasConcept C160671074 @default.
- W2127177546 hasConcept C167735695 @default.
- W2127177546 hasConcept C171250308 @default.
- W2127177546 hasConcept C185544564 @default.
- W2127177546 hasConcept C185592680 @default.
- W2127177546 hasConcept C192562407 @default.
- W2127177546 hasConcept C2780064504 @default.
- W2127177546 hasConcept C2780357685 @default.
- W2127177546 hasConcept C43617362 @default.
- W2127177546 hasConcept C49040817 @default.
- W2127177546 hasConcept C520434653 @default.
- W2127177546 hasConcept C544956773 @default.
- W2127177546 hasConcept C82706917 @default.
- W2127177546 hasConceptScore W2127177546C113196181 @default.
- W2127177546 hasConceptScore W2127177546C120665830 @default.
- W2127177546 hasConceptScore W2127177546C121332964 @default.
- W2127177546 hasConceptScore W2127177546C14228908 @default.
- W2127177546 hasConceptScore W2127177546C159985019 @default.
- W2127177546 hasConceptScore W2127177546C160671074 @default.
- W2127177546 hasConceptScore W2127177546C167735695 @default.
- W2127177546 hasConceptScore W2127177546C171250308 @default.
- W2127177546 hasConceptScore W2127177546C185544564 @default.
- W2127177546 hasConceptScore W2127177546C185592680 @default.
- W2127177546 hasConceptScore W2127177546C192562407 @default.
- W2127177546 hasConceptScore W2127177546C2780064504 @default.
- W2127177546 hasConceptScore W2127177546C2780357685 @default.
- W2127177546 hasConceptScore W2127177546C43617362 @default.
- W2127177546 hasConceptScore W2127177546C49040817 @default.
- W2127177546 hasConceptScore W2127177546C520434653 @default.
- W2127177546 hasConceptScore W2127177546C544956773 @default.
- W2127177546 hasConceptScore W2127177546C82706917 @default.
- W2127177546 hasLocation W21271775461 @default.
- W2127177546 hasOpenAccess W2127177546 @default.
- W2127177546 hasPrimaryLocation W21271775461 @default.
- W2127177546 hasRelatedWork W1618995463 @default.
- W2127177546 hasRelatedWork W1975013726 @default.
- W2127177546 hasRelatedWork W1986476914 @default.
- W2127177546 hasRelatedWork W2079454491 @default.
- W2127177546 hasRelatedWork W2126884885 @default.
- W2127177546 hasRelatedWork W2361131938 @default.
- W2127177546 hasRelatedWork W2608763484 @default.
- W2127177546 hasRelatedWork W2901127937 @default.
- W2127177546 hasRelatedWork W3009661934 @default.
- W2127177546 hasRelatedWork W1649198519 @default.
- W2127177546 isParatext "false" @default.
- W2127177546 isRetracted "false" @default.
- W2127177546 magId "2127177546" @default.
- W2127177546 workType "article" @default.