Matches in SemOpenAlex for { <https://semopenalex.org/work/W2127183750> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2127183750 abstract "This work investigates the barrier capability of W layers as well as WSiN/WSi x /W stacked layers against Cu diffusion. The W layers were selectively chemical vapor deposited (CVD) in contact holes to a thickness of about 450 nm using SiH 4 reduction of WF 6 . We found that the CVD-W layers functioned as effective barriers against Cu diffusion, and the Cu/W(450 nm)/p + -n junction diodes were able to sustain a 30 min furnace annealing up to 650°C without causing degradation in electrical characteristics. The use of WSiN/WSi x /W stacked layers as diffusion layers further improved the thermal stability of Cu/WSiN/WSi x /W(450 nm)/p + -n junction diodes to at least 700°C, The WSi x layers were deposited by CVD to a thickness of 75 nm using SiH 4 /WF 6 chemistry, and the subsequent in situ N 2 plasma treatment produced a very thin layer of WSiN on the WSi x surface. This thin WSiN layer was very thermally stable and effective in suppressing Cu diffusion. Failure of barrier capability for the W films was presumably due to interdiffusion of Cu and Si along grain boundaries of the W films, and the interdiffusion was probably enhanced by the formation of WSi 2 . The formation of WSi 2 consumed the W layer and Si substrate, resulting in a volume change in barrier layer, which, in turn, developed local defects, such as microcracks and stress-induced weak points, and thus provided fast paths for Cu diffusion." @default.
- W2127183750 created "2016-06-24" @default.
- W2127183750 creator A5006347675 @default.
- W2127183750 creator A5067178743 @default.
- W2127183750 creator A5089996516 @default.
- W2127183750 date "1999-02-01" @default.
- W2127183750 modified "2023-09-26" @default.
- W2127183750 title "Barrier Capabilities of Selective Chemical Vapor Deposited W Films and WSiN / WSi x / W Stacked Layers Against Cu Diffusion" @default.
- W2127183750 doi "https://doi.org/10.1149/1.1391671" @default.
- W2127183750 hasPublicationYear "1999" @default.
- W2127183750 type Work @default.
- W2127183750 sameAs 2127183750 @default.
- W2127183750 citedByCount "11" @default.
- W2127183750 countsByYear W21271837502015 @default.
- W2127183750 countsByYear W21271837502018 @default.
- W2127183750 crossrefType "journal-article" @default.
- W2127183750 hasAuthorship W2127183750A5006347675 @default.
- W2127183750 hasAuthorship W2127183750A5067178743 @default.
- W2127183750 hasAuthorship W2127183750A5089996516 @default.
- W2127183750 hasConcept C113196181 @default.
- W2127183750 hasConcept C121332964 @default.
- W2127183750 hasConcept C127413603 @default.
- W2127183750 hasConcept C159985019 @default.
- W2127183750 hasConcept C171250308 @default.
- W2127183750 hasConcept C185592680 @default.
- W2127183750 hasConcept C192562407 @default.
- W2127183750 hasConcept C2777855556 @default.
- W2127183750 hasConcept C2778836790 @default.
- W2127183750 hasConcept C2779227376 @default.
- W2127183750 hasConcept C2779833192 @default.
- W2127183750 hasConcept C42360764 @default.
- W2127183750 hasConcept C43617362 @default.
- W2127183750 hasConcept C47908070 @default.
- W2127183750 hasConcept C49040817 @default.
- W2127183750 hasConcept C57410435 @default.
- W2127183750 hasConcept C69357855 @default.
- W2127183750 hasConcept C78434282 @default.
- W2127183750 hasConcept C87976508 @default.
- W2127183750 hasConcept C97355855 @default.
- W2127183750 hasConceptScore W2127183750C113196181 @default.
- W2127183750 hasConceptScore W2127183750C121332964 @default.
- W2127183750 hasConceptScore W2127183750C127413603 @default.
- W2127183750 hasConceptScore W2127183750C159985019 @default.
- W2127183750 hasConceptScore W2127183750C171250308 @default.
- W2127183750 hasConceptScore W2127183750C185592680 @default.
- W2127183750 hasConceptScore W2127183750C192562407 @default.
- W2127183750 hasConceptScore W2127183750C2777855556 @default.
- W2127183750 hasConceptScore W2127183750C2778836790 @default.
- W2127183750 hasConceptScore W2127183750C2779227376 @default.
- W2127183750 hasConceptScore W2127183750C2779833192 @default.
- W2127183750 hasConceptScore W2127183750C42360764 @default.
- W2127183750 hasConceptScore W2127183750C43617362 @default.
- W2127183750 hasConceptScore W2127183750C47908070 @default.
- W2127183750 hasConceptScore W2127183750C49040817 @default.
- W2127183750 hasConceptScore W2127183750C57410435 @default.
- W2127183750 hasConceptScore W2127183750C69357855 @default.
- W2127183750 hasConceptScore W2127183750C78434282 @default.
- W2127183750 hasConceptScore W2127183750C87976508 @default.
- W2127183750 hasConceptScore W2127183750C97355855 @default.
- W2127183750 hasLocation W21271837501 @default.
- W2127183750 hasOpenAccess W2127183750 @default.
- W2127183750 hasPrimaryLocation W21271837501 @default.
- W2127183750 hasRelatedWork W1969410029 @default.
- W2127183750 hasRelatedWork W2027228089 @default.
- W2127183750 hasRelatedWork W2028793278 @default.
- W2127183750 hasRelatedWork W2067641825 @default.
- W2127183750 hasRelatedWork W2135009368 @default.
- W2127183750 hasRelatedWork W1497782426 @default.
- W2127183750 hasRelatedWork W1532104872 @default.
- W2127183750 hasRelatedWork W1544747672 @default.
- W2127183750 hasRelatedWork W1564401055 @default.
- W2127183750 hasRelatedWork W1566695409 @default.
- W2127183750 hasRelatedWork W1575316269 @default.
- W2127183750 hasRelatedWork W1845421603 @default.
- W2127183750 hasRelatedWork W1907422666 @default.
- W2127183750 hasRelatedWork W1929674024 @default.
- W2127183750 hasRelatedWork W2163787558 @default.
- W2127183750 hasRelatedWork W2258344280 @default.
- W2127183750 hasRelatedWork W232371879 @default.
- W2127183750 hasRelatedWork W2394782578 @default.
- W2127183750 hasRelatedWork W2460117808 @default.
- W2127183750 hasRelatedWork W2472567911 @default.
- W2127183750 isParatext "false" @default.
- W2127183750 isRetracted "false" @default.
- W2127183750 magId "2127183750" @default.
- W2127183750 workType "article" @default.