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- W2127213674 abstract "A microfabricated floating-element sensor for the measurement of wall shear stress is developed. The design objective is to measure shear stress in the range of 0.1 to 2 Pa, with a spatial resolution of O(100 /spl mu/m). The sensor is micromachined in an ultra-thin silicon wafer using wafer bonding and DRIE techniques. Preliminary test results have been obtained by applying an electrostatic force to the sensor instead of a fluid force. The floating element deflection is then measured using direct and differential capacitance techniques as well as an optical method for additional confirmation of the results. These test results have been compared to theoretical simulations using MEMCAD software. The results show that with this sensor design it is possible to measure a shear force as small as 5 nN /spl plusmn/ 0.5 nN, corresponding to a shear stress level of 0.05 Pa /spl plusmn/ 0.005 Pa." @default.
- W2127213674 created "2016-06-24" @default.
- W2127213674 creator A5030137262 @default.
- W2127213674 creator A5073295823 @default.
- W2127213674 creator A5083743347 @default.
- W2127213674 date "2002-11-14" @default.
- W2127213674 modified "2023-09-22" @default.
- W2127213674 title "A MEMS device for measurement of skin friction with capacitive sensing" @default.
- W2127213674 cites W1543411560 @default.
- W2127213674 cites W2003258049 @default.
- W2127213674 cites W2041774218 @default.
- W2127213674 cites W2044580101 @default.
- W2127213674 cites W2064331996 @default.
- W2127213674 cites W2069214830 @default.
- W2127213674 cites W2166804708 @default.
- W2127213674 cites W2917177732 @default.
- W2127213674 doi "https://doi.org/10.1109/memsc.2001.992728" @default.
- W2127213674 hasPublicationYear "2002" @default.
- W2127213674 type Work @default.
- W2127213674 sameAs 2127213674 @default.
- W2127213674 citedByCount "3" @default.
- W2127213674 countsByYear W21272136742014 @default.
- W2127213674 countsByYear W21272136742016 @default.
- W2127213674 countsByYear W21272136742018 @default.
- W2127213674 crossrefType "proceedings-article" @default.
- W2127213674 hasAuthorship W2127213674A5030137262 @default.
- W2127213674 hasAuthorship W2127213674A5073295823 @default.
- W2127213674 hasAuthorship W2127213674A5083743347 @default.
- W2127213674 hasConcept C100460472 @default.
- W2127213674 hasConcept C119599485 @default.
- W2127213674 hasConcept C120665830 @default.
- W2127213674 hasConcept C121332964 @default.
- W2127213674 hasConcept C124634506 @default.
- W2127213674 hasConcept C127413603 @default.
- W2127213674 hasConcept C130472188 @default.
- W2127213674 hasConcept C159985019 @default.
- W2127213674 hasConcept C160671074 @default.
- W2127213674 hasConcept C17525397 @default.
- W2127213674 hasConcept C192562407 @default.
- W2127213674 hasConcept C206755178 @default.
- W2127213674 hasConcept C21141959 @default.
- W2127213674 hasConcept C22140971 @default.
- W2127213674 hasConcept C24890656 @default.
- W2127213674 hasConcept C2779227376 @default.
- W2127213674 hasConcept C2781355719 @default.
- W2127213674 hasConcept C30066665 @default.
- W2127213674 hasConcept C37977207 @default.
- W2127213674 hasConcept C49040817 @default.
- W2127213674 hasConcept C62520636 @default.
- W2127213674 hasConcept C66938386 @default.
- W2127213674 hasConceptScore W2127213674C100460472 @default.
- W2127213674 hasConceptScore W2127213674C119599485 @default.
- W2127213674 hasConceptScore W2127213674C120665830 @default.
- W2127213674 hasConceptScore W2127213674C121332964 @default.
- W2127213674 hasConceptScore W2127213674C124634506 @default.
- W2127213674 hasConceptScore W2127213674C127413603 @default.
- W2127213674 hasConceptScore W2127213674C130472188 @default.
- W2127213674 hasConceptScore W2127213674C159985019 @default.
- W2127213674 hasConceptScore W2127213674C160671074 @default.
- W2127213674 hasConceptScore W2127213674C17525397 @default.
- W2127213674 hasConceptScore W2127213674C192562407 @default.
- W2127213674 hasConceptScore W2127213674C206755178 @default.
- W2127213674 hasConceptScore W2127213674C21141959 @default.
- W2127213674 hasConceptScore W2127213674C22140971 @default.
- W2127213674 hasConceptScore W2127213674C24890656 @default.
- W2127213674 hasConceptScore W2127213674C2779227376 @default.
- W2127213674 hasConceptScore W2127213674C2781355719 @default.
- W2127213674 hasConceptScore W2127213674C30066665 @default.
- W2127213674 hasConceptScore W2127213674C37977207 @default.
- W2127213674 hasConceptScore W2127213674C49040817 @default.
- W2127213674 hasConceptScore W2127213674C62520636 @default.
- W2127213674 hasConceptScore W2127213674C66938386 @default.
- W2127213674 hasLocation W21272136741 @default.
- W2127213674 hasOpenAccess W2127213674 @default.
- W2127213674 hasPrimaryLocation W21272136741 @default.
- W2127213674 hasRelatedWork W101207940 @default.
- W2127213674 hasRelatedWork W1015492330 @default.
- W2127213674 hasRelatedWork W143915571 @default.
- W2127213674 hasRelatedWork W1479876241 @default.
- W2127213674 hasRelatedWork W1494434525 @default.
- W2127213674 hasRelatedWork W1506569659 @default.
- W2127213674 hasRelatedWork W1507435465 @default.
- W2127213674 hasRelatedWork W153038439 @default.
- W2127213674 hasRelatedWork W1544338245 @default.
- W2127213674 hasRelatedWork W1548842569 @default.
- W2127213674 hasRelatedWork W1558154657 @default.
- W2127213674 hasRelatedWork W1559267763 @default.
- W2127213674 hasRelatedWork W1569721147 @default.
- W2127213674 hasRelatedWork W1581278401 @default.
- W2127213674 hasRelatedWork W1581317947 @default.
- W2127213674 hasRelatedWork W1582414166 @default.
- W2127213674 hasRelatedWork W94085438 @default.
- W2127213674 hasRelatedWork W964489982 @default.
- W2127213674 hasRelatedWork W990270315 @default.
- W2127213674 hasRelatedWork W996925589 @default.
- W2127213674 isParatext "false" @default.
- W2127213674 isRetracted "false" @default.
- W2127213674 magId "2127213674" @default.
- W2127213674 workType "article" @default.