FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2127267422> ?p ?o ?g. }

• W2127267422 endingPage "655" @default.
• W2127267422 startingPage "646" @default.
• W2127267422 abstract "The sensitivity of a micromachined convective accelerometer filled with different gases at various conditions is theoretically and experimentally investigated. It is shown that the sensitivity of the accelerometer is proportional to the Rayleigh number for the contained gas. The Rayleigh numbers for nine gases are calculated, and the corresponding sensitivity improvements are predicted. To test our predictions, bulk silicon micromachining technology is used to fabricate and package several thermal accelerometers. A precision rotary stage is set up enclosing a packaged device into a gas chamber and rotating its sensitive axis against gravity. Data acquisition is done by a high-precision digital multimeter over full cycle rotations for seven candidate gases: nitrogen (N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> ), argon (Ar), carbon dioxide (CO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> ), sulfur hexafluoride (SF <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>6</sub> ), hexafluoroethane (C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> F <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>6</sub> ), octafluoropropane ( C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> F <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>8</sub> ), and octafluorocyclobutane ( C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</sub> F <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>8</sub> ). The measured sensitivities are in good agreement with the theoretical predictions. An upper limit to the sensitivity improvement by boosting the Rayleigh number for the contained gas is measured. Sensitivity decline beyond a critical Rayleigh number is reported for the first time since the advent of the convective accelerometers without proof mass." @default.
• W2127267422 created "2016-06-24" @default.
• W2127267422 creator A5026310341 @default.
• W2127267422 creator A5038302440 @default.
• W2127267422 creator A5068871627 @default.
• W2127267422 date "2012-06-01" @default.
• W2127267422 modified "2023-10-16" @default.
• W2127267422 title "Sensitivity Improvement of Micromachined Convective Accelerometers" @default.
• W2127267422 cites W1965148421 @default.
• W2127267422 cites W1968130624 @default.
• W2127267422 cites W1978933275 @default.
• W2127267422 cites W2012399204 @default.
• W2127267422 cites W2037246137 @default.
• W2127267422 cites W2057763316 @default.
• W2127267422 cites W2058377865 @default.
• W2127267422 cites W2084521614 @default.
• W2127267422 cites W2124085110 @default.
• W2127267422 cites W2156668337 @default.
• W2127267422 cites W2163466976 @default.
• W2127267422 cites W2507132027 @default.
• W2127267422 cites W2536671996 @default.
• W2127267422 cites W2545944727 @default.
• W2127267422 doi "https://doi.org/10.1109/jmems.2012.2189366" @default.
• W2127267422 hasPublicationYear "2012" @default.
• W2127267422 type Work @default.
• W2127267422 sameAs 2127267422 @default.
• W2127267422 citedByCount "25" @default.
• W2127267422 countsByYear W21272674222012 @default.
• W2127267422 countsByYear W21272674222013 @default.
• W2127267422 countsByYear W21272674222014 @default.
• W2127267422 countsByYear W21272674222015 @default.
• W2127267422 countsByYear W21272674222017 @default.
• W2127267422 countsByYear W21272674222018 @default.
• W2127267422 countsByYear W21272674222019 @default.
• W2127267422 countsByYear W21272674222020 @default.
• W2127267422 countsByYear W21272674222021 @default.
• W2127267422 countsByYear W21272674222022 @default.
• W2127267422 crossrefType "journal-article" @default.
• W2127267422 hasAuthorship W2127267422A5026310341 @default.
• W2127267422 hasAuthorship W2127267422A5038302440 @default.
• W2127267422 hasAuthorship W2127267422A5068871627 @default.
• W2127267422 hasConcept C111919701 @default.
• W2127267422 hasConcept C113196181 @default.
• W2127267422 hasConcept C11413529 @default.
• W2127267422 hasConcept C127413603 @default.
• W2127267422 hasConcept C185592680 @default.
• W2127267422 hasConcept C21200559 @default.
• W2127267422 hasConcept C24326235 @default.
• W2127267422 hasConcept C41008148 @default.
• W2127267422 hasConcept C43617362 @default.
• W2127267422 hasConcept C89805583 @default.
• W2127267422 hasConceptScore W2127267422C111919701 @default.
• W2127267422 hasConceptScore W2127267422C113196181 @default.
• W2127267422 hasConceptScore W2127267422C11413529 @default.
• W2127267422 hasConceptScore W2127267422C127413603 @default.
• W2127267422 hasConceptScore W2127267422C185592680 @default.
• W2127267422 hasConceptScore W2127267422C21200559 @default.
• W2127267422 hasConceptScore W2127267422C24326235 @default.
• W2127267422 hasConceptScore W2127267422C41008148 @default.
• W2127267422 hasConceptScore W2127267422C43617362 @default.
• W2127267422 hasConceptScore W2127267422C89805583 @default.
• W2127267422 hasIssue "3" @default.
• W2127267422 hasLocation W21272674221 @default.
• W2127267422 hasOpenAccess W2127267422 @default.
• W2127267422 hasPrimaryLocation W21272674221 @default.
• W2127267422 hasRelatedWork W2055982894 @default.
• W2127267422 hasRelatedWork W2241383474 @default.
• W2127267422 hasRelatedWork W2350735367 @default.
• W2127267422 hasRelatedWork W2359831757 @default.
• W2127267422 hasRelatedWork W2367743327 @default.
• W2127267422 hasRelatedWork W2999010947 @default.
• W2127267422 hasRelatedWork W3024056985 @default.
• W2127267422 hasRelatedWork W3127172666 @default.
• W2127267422 hasRelatedWork W3204757950 @default.
• W2127267422 hasRelatedWork W2416817555 @default.
• W2127267422 hasVolume "21" @default.
• W2127267422 isParatext "false" @default.
• W2127267422 isRetracted "false" @default.
• W2127267422 magId "2127267422" @default.
• W2127267422 workType "article" @default.