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- W2127657711 abstract "Charge injection and trapping within the metalZnO-Si02-Si (MZOS) structure is the well-known cause of a serious bias instability routinely exhibited by ZnO-on-Si surface acoustic wave devices. Herein we report and describe the attainment of d.c. stable MZOS device structures. Through a simple modification in the standard MZOS fabrication procedure, devices have been produced which, under dark conditions. attain a repeatable d.c. operating point within seconds after applying the desired d.c. bias. Fabrication details, data illustrating the achieved degree of bias stability, and comparative surface acoustic wave device characteristics are presented. A physical model explaining the observed stability is also discussed." @default.
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- W2127657711 date "1981-01-01" @default.
- W2127657711 modified "2023-09-27" @default.
- W2127657711 title "Bias Stable Zinc Oxide-On-Silicon Surface Acoustic Wave Devices" @default.
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- W2127657711 doi "https://doi.org/10.1109/ultsym.1981.197728" @default.
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