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• W2127688370 endingPage "526" @default.
• W2127688370 startingPage "521" @default.
• W2127688370 abstract "In this paper, we report the RHEED and XPS studies of the decomposition of silicon dioxide by the bombardment of metal ions and the growth of ultrathin crystalline zirconia oxide film on silicon. Through XPS analysis, it was found that silicon dioxide could be decomposed by the bombardment of Zr ions in high temperature and lower partial pressure. Silicon dioxide was decomposed into evaporated silicon oxide, while part of the oxygen in silicon dioxide reacted with metal Zr ions to form stable zirconia oxide film. The metal ions reacted with silicon dioxide homogenously. Because of the smoothness of native silicon dioxide surface and atomically abrupt silicon dioxide interface with silicon, native oxide layer on silicon wafer was evenly removed and a sharp stable crystalline zirconia oxide interface with silicon was formed. The crystalline yittria-stabilized zirconia oxide (YSZ) film with equivalent electrical oxide thickness 1.46 nm show excellent electrical properties, the interface state density less than 2 × 10 11 eV -1 cm -2 and leakage current 1.1 × 10 -3 A/cm 2 at 1.0 V bias. It demonstrates that this method can be used to the deposition of high-κ metal oxide as alternative dielectrics for future generation device." @default.
• W2127688370 created "2016-06-24" @default.
• W2127688370 creator A5006375134 @default.
• W2127688370 creator A5034537681 @default.
• W2127688370 creator A5046348753 @default.
• W2127688370 creator A5051418089 @default.
• W2127688370 creator A5053660345 @default.
• W2127688370 creator A5059537255 @default.
• W2127688370 creator A5061889690 @default.
• W2127688370 creator A5064265202 @default.
• W2127688370 creator A5065542566 @default.
• W2127688370 creator A5067239685 @default.
• W2127688370 creator A5074554334 @default.
• W2127688370 creator A5087299509 @default.
• W2127688370 date "2001-10-01" @default.
• W2127688370 modified "2023-09-24" @default.
• W2127688370 title "RHEED AND XPS STUDIES OF THE DECOMPOSITION OF SILICON DIOXIDE BY THE BOMBARDMENT OF METAL IONS" @default.
• W2127688370 cites W1494800870 @default.
• W2127688370 cites W154577535 @default.
• W2127688370 cites W1555753450 @default.
• W2127688370 cites W1671323197 @default.
• W2127688370 cites W1981444261 @default.
• W2127688370 cites W1992343392 @default.
• W2127688370 cites W1997030988 @default.
• W2127688370 cites W2002765787 @default.
• W2127688370 cites W2010572625 @default.
• W2127688370 cites W2019592005 @default.
• W2127688370 cites W2020548988 @default.
• W2127688370 cites W2024166218 @default.
• W2127688370 cites W2028992594 @default.
• W2127688370 cites W2037337254 @default.
• W2127688370 cites W2038274823 @default.
• W2127688370 cites W2053322905 @default.
• W2127688370 cites W2053544722 @default.
• W2127688370 cites W2062268908 @default.
• W2127688370 cites W2063989016 @default.
• W2127688370 cites W2070388895 @default.
• W2127688370 cites W2072451721 @default.
• W2127688370 cites W2078740676 @default.
• W2127688370 cites W2079816033 @default.
• W2127688370 doi "https://doi.org/10.1142/s0218625x01001282" @default.
• W2127688370 hasPublicationYear "2001" @default.
• W2127688370 type Work @default.
• W2127688370 sameAs 2127688370 @default.
• W2127688370 citedByCount "0" @default.
• W2127688370 crossrefType "journal-article" @default.
• W2127688370 hasAuthorship W2127688370A5006375134 @default.
• W2127688370 hasAuthorship W2127688370A5034537681 @default.
• W2127688370 hasAuthorship W2127688370A5046348753 @default.
• W2127688370 hasAuthorship W2127688370A5051418089 @default.
• W2127688370 hasAuthorship W2127688370A5053660345 @default.
• W2127688370 hasAuthorship W2127688370A5059537255 @default.
• W2127688370 hasAuthorship W2127688370A5061889690 @default.
• W2127688370 hasAuthorship W2127688370A5064265202 @default.
• W2127688370 hasAuthorship W2127688370A5065542566 @default.
• W2127688370 hasAuthorship W2127688370A5067239685 @default.
• W2127688370 hasAuthorship W2127688370A5074554334 @default.
• W2127688370 hasAuthorship W2127688370A5087299509 @default.
• W2127688370 hasConcept C113196181 @default.
• W2127688370 hasConcept C123609680 @default.
• W2127688370 hasConcept C127413603 @default.
• W2127688370 hasConcept C134132462 @default.
• W2127688370 hasConcept C159985019 @default.
• W2127688370 hasConcept C160671074 @default.
• W2127688370 hasConcept C162743726 @default.
• W2127688370 hasConcept C171250308 @default.
• W2127688370 hasConcept C175708663 @default.
• W2127688370 hasConcept C178790620 @default.
• W2127688370 hasConcept C179104552 @default.
• W2127688370 hasConcept C185592680 @default.
• W2127688370 hasConcept C191897082 @default.
• W2127688370 hasConcept C192562407 @default.
• W2127688370 hasConcept C195114451 @default.
• W2127688370 hasConcept C26953177 @default.
• W2127688370 hasConcept C2777431650 @default.
• W2127688370 hasConcept C2779089622 @default.
• W2127688370 hasConcept C2779105228 @default.
• W2127688370 hasConcept C2779227376 @default.
• W2127688370 hasConcept C2779667780 @default.
• W2127688370 hasConcept C2779851234 @default.
• W2127688370 hasConcept C42360764 @default.
• W2127688370 hasConcept C544956773 @default.
• W2127688370 hasConcept C87359718 @default.
• W2127688370 hasConceptScore W2127688370C113196181 @default.
• W2127688370 hasConceptScore W2127688370C123609680 @default.
• W2127688370 hasConceptScore W2127688370C127413603 @default.
• W2127688370 hasConceptScore W2127688370C134132462 @default.
• W2127688370 hasConceptScore W2127688370C159985019 @default.
• W2127688370 hasConceptScore W2127688370C160671074 @default.
• W2127688370 hasConceptScore W2127688370C162743726 @default.
• W2127688370 hasConceptScore W2127688370C171250308 @default.
• W2127688370 hasConceptScore W2127688370C175708663 @default.
• W2127688370 hasConceptScore W2127688370C178790620 @default.
• W2127688370 hasConceptScore W2127688370C179104552 @default.
• W2127688370 hasConceptScore W2127688370C185592680 @default.
• W2127688370 hasConceptScore W2127688370C191897082 @default.
• W2127688370 hasConceptScore W2127688370C192562407 @default.
• W2127688370 hasConceptScore W2127688370C195114451 @default.

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