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- W2127688575 abstract "Monte Carlo model of evaporation of thin oxide layer on silicon substrate was suggested. Algorithm of chemical reactions was modified to valid treatment of Si-SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> system. This improvement allows simulation of high-temperature evaporation of thin dioxide layers, and explains available experimental data." @default.
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- W2127688575 date "2009-07-01" @default.
- W2127688575 modified "2023-10-16" @default.
- W2127688575 title "Monte carlo simulation of thin silicon dioxide layer evaporation" @default.
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- W2127688575 doi "https://doi.org/10.1109/edm.2009.5173931" @default.
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