Matches in SemOpenAlex for { <https://semopenalex.org/work/W2127699852> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2127699852 abstract "Automotive applications require full dielectric isolation of the high voltage and analog components. Such isolation is typically realized by BCD technologies built on SOI. The drawbacks of using SOI wafers, i.e. deviation from the baseline bulk CMOS and increased overall cost, can be addressed by manufacturing local SOI islands in the standard bulk wafer. This paper presents a method to manufacture a local buried oxide using LoBOX technology and its integration to baseline CMOS. Our LoBOX technology is based on a sacrificial SiGe layer buried in bulk substrate and subsequently replaced with oxide. It is a general isolation solution that allows flexible local SOI and local BOX thickness. We have integrated our LoBOX technology in a 130 nm bulk CMOS process to demonstrate its feasibility. The manufactured HV transistors isolated with local BOX, feature almost identical performance as those manufactured on commercial SOI wafers." @default.
- W2127699852 created "2016-06-24" @default.
- W2127699852 creator A5002686049 @default.
- W2127699852 creator A5013124520 @default.
- W2127699852 creator A5027058846 @default.
- W2127699852 creator A5065923157 @default.
- W2127699852 date "2007-05-01" @default.
- W2127699852 modified "2023-09-27" @default.
- W2127699852 title "Local buried oxide technology for HV transistors integrated in CMOS" @default.
- W2127699852 cites W1567082832 @default.
- W2127699852 cites W1919451367 @default.
- W2127699852 cites W2028742200 @default.
- W2127699852 cites W2098907708 @default.
- W2127699852 cites W2120356497 @default.
- W2127699852 cites W2343764477 @default.
- W2127699852 cites W2539610281 @default.
- W2127699852 cites W3151552715 @default.
- W2127699852 cites W2158642578 @default.
- W2127699852 doi "https://doi.org/10.1109/ispsd.2007.4294937" @default.
- W2127699852 hasPublicationYear "2007" @default.
- W2127699852 type Work @default.
- W2127699852 sameAs 2127699852 @default.
- W2127699852 citedByCount "1" @default.
- W2127699852 crossrefType "proceedings-article" @default.
- W2127699852 hasAuthorship W2127699852A5002686049 @default.
- W2127699852 hasAuthorship W2127699852A5013124520 @default.
- W2127699852 hasAuthorship W2127699852A5027058846 @default.
- W2127699852 hasAuthorship W2127699852A5065923157 @default.
- W2127699852 hasConcept C111368507 @default.
- W2127699852 hasConcept C119599485 @default.
- W2127699852 hasConcept C127313418 @default.
- W2127699852 hasConcept C127413603 @default.
- W2127699852 hasConcept C160671074 @default.
- W2127699852 hasConcept C165801399 @default.
- W2127699852 hasConcept C172385210 @default.
- W2127699852 hasConcept C192562407 @default.
- W2127699852 hasConcept C2361726 @default.
- W2127699852 hasConcept C24326235 @default.
- W2127699852 hasConcept C2777289219 @default.
- W2127699852 hasConcept C46362747 @default.
- W2127699852 hasConcept C49040817 @default.
- W2127699852 hasConcept C53143962 @default.
- W2127699852 hasConcept C544956773 @default.
- W2127699852 hasConceptScore W2127699852C111368507 @default.
- W2127699852 hasConceptScore W2127699852C119599485 @default.
- W2127699852 hasConceptScore W2127699852C127313418 @default.
- W2127699852 hasConceptScore W2127699852C127413603 @default.
- W2127699852 hasConceptScore W2127699852C160671074 @default.
- W2127699852 hasConceptScore W2127699852C165801399 @default.
- W2127699852 hasConceptScore W2127699852C172385210 @default.
- W2127699852 hasConceptScore W2127699852C192562407 @default.
- W2127699852 hasConceptScore W2127699852C2361726 @default.
- W2127699852 hasConceptScore W2127699852C24326235 @default.
- W2127699852 hasConceptScore W2127699852C2777289219 @default.
- W2127699852 hasConceptScore W2127699852C46362747 @default.
- W2127699852 hasConceptScore W2127699852C49040817 @default.
- W2127699852 hasConceptScore W2127699852C53143962 @default.
- W2127699852 hasConceptScore W2127699852C544956773 @default.
- W2127699852 hasLocation W21276998521 @default.
- W2127699852 hasOpenAccess W2127699852 @default.
- W2127699852 hasPrimaryLocation W21276998521 @default.
- W2127699852 hasRelatedWork W135418979 @default.
- W2127699852 hasRelatedWork W1598050953 @default.
- W2127699852 hasRelatedWork W1627672357 @default.
- W2127699852 hasRelatedWork W1850314507 @default.
- W2127699852 hasRelatedWork W1974256110 @default.
- W2127699852 hasRelatedWork W1975823115 @default.
- W2127699852 hasRelatedWork W2046708502 @default.
- W2127699852 hasRelatedWork W2049017294 @default.
- W2127699852 hasRelatedWork W2117377230 @default.
- W2127699852 hasRelatedWork W2127699852 @default.
- W2127699852 isParatext "false" @default.
- W2127699852 isRetracted "false" @default.
- W2127699852 magId "2127699852" @default.
- W2127699852 workType "article" @default.