FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2128079427> ?p ?o ?g. }

• W2128079427 abstract "In 1991, M. Bruel (1) invented and patented the Smart Cut technology to fabricate Silicon On Insulator (SOI) substrates. The process relies on the transfer of a high quality single crystal layer from one wafer to another: implantation of gaseous ions in a single crystal wafer, direct bonding on a stiffener and splitting (Fig 1). The invention of this SOI process combined with the entrepreneurship of SOITEC paved the way to high quality SOI substrates mass production. Today, SOI is a mature product (up to 300mm diameter) and now developments are focused on the integration of new materials and functionalities in order to improve device performances and enlarge the application spectrum." @default.
• W2128079427 created "2016-06-24" @default.
• W2128079427 creator A5004087886 @default.
• W2128079427 creator A5004315842 @default.
• W2128079427 creator A5007776830 @default.
• W2128079427 creator A5008648057 @default.
• W2128079427 creator A5011044726 @default.
• W2128079427 creator A5020557565 @default.
• W2128079427 creator A5025691364 @default.
• W2128079427 creator A5026052355 @default.
• W2128079427 creator A5028774619 @default.
• W2128079427 creator A5029392909 @default.
• W2128079427 creator A5031387606 @default.
• W2128079427 creator A5034373348 @default.
• W2128079427 creator A5035621415 @default.
• W2128079427 creator A5045610872 @default.
• W2128079427 creator A5052811647 @default.
• W2128079427 creator A5061363679 @default.
• W2128079427 creator A5065001562 @default.
• W2128079427 creator A5076856577 @default.
• W2128079427 creator A5079991262 @default.
• W2128079427 creator A5083023348 @default.
• W2128079427 date "2010-12-01" @default.
• W2128079427 modified "2023-10-05" @default.
• W2128079427 title "Engineered substrates for future More Moore and More than Moore integrated devices" @default.
• W2128079427 cites W1973671776 @default.
• W2128079427 cites W2045155776 @default.
• W2128079427 cites W2051990439 @default.
• W2128079427 cites W2094036037 @default.
• W2128079427 cites W2119553442 @default.
• W2128079427 doi "https://doi.org/10.1109/iedm.2010.5703285" @default.
• W2128079427 hasPublicationYear "2010" @default.
• W2128079427 type Work @default.
• W2128079427 sameAs 2128079427 @default.
• W2128079427 citedByCount "16" @default.
• W2128079427 countsByYear W21280794272015 @default.
• W2128079427 countsByYear W21280794272016 @default.
• W2128079427 countsByYear W21280794272017 @default.
• W2128079427 countsByYear W21280794272019 @default.
• W2128079427 countsByYear W21280794272020 @default.
• W2128079427 countsByYear W21280794272021 @default.
• W2128079427 countsByYear W21280794272022 @default.
• W2128079427 countsByYear W21280794272023 @default.
• W2128079427 crossrefType "proceedings-article" @default.
• W2128079427 hasAuthorship W2128079427A5004087886 @default.
• W2128079427 hasAuthorship W2128079427A5004315842 @default.
• W2128079427 hasAuthorship W2128079427A5007776830 @default.
• W2128079427 hasAuthorship W2128079427A5008648057 @default.
• W2128079427 hasAuthorship W2128079427A5011044726 @default.
• W2128079427 hasAuthorship W2128079427A5020557565 @default.
• W2128079427 hasAuthorship W2128079427A5025691364 @default.
• W2128079427 hasAuthorship W2128079427A5026052355 @default.
• W2128079427 hasAuthorship W2128079427A5028774619 @default.
• W2128079427 hasAuthorship W2128079427A5029392909 @default.
• W2128079427 hasAuthorship W2128079427A5031387606 @default.
• W2128079427 hasAuthorship W2128079427A5034373348 @default.
• W2128079427 hasAuthorship W2128079427A5035621415 @default.
• W2128079427 hasAuthorship W2128079427A5045610872 @default.
• W2128079427 hasAuthorship W2128079427A5052811647 @default.
• W2128079427 hasAuthorship W2128079427A5061363679 @default.
• W2128079427 hasAuthorship W2128079427A5065001562 @default.
• W2128079427 hasAuthorship W2128079427A5076856577 @default.
• W2128079427 hasAuthorship W2128079427A5079991262 @default.
• W2128079427 hasAuthorship W2128079427A5083023348 @default.
• W2128079427 hasConcept C127413603 @default.
• W2128079427 hasConcept C160671074 @default.
• W2128079427 hasConcept C171250308 @default.
• W2128079427 hasConcept C192562407 @default.
• W2128079427 hasConcept C2779133538 @default.
• W2128079427 hasConcept C2779227376 @default.
• W2128079427 hasConcept C49040817 @default.
• W2128079427 hasConcept C53143962 @default.
• W2128079427 hasConcept C544956773 @default.
• W2128079427 hasConcept C61696701 @default.
• W2128079427 hasConceptScore W2128079427C127413603 @default.
• W2128079427 hasConceptScore W2128079427C160671074 @default.
• W2128079427 hasConceptScore W2128079427C171250308 @default.
• W2128079427 hasConceptScore W2128079427C192562407 @default.
• W2128079427 hasConceptScore W2128079427C2779133538 @default.
• W2128079427 hasConceptScore W2128079427C2779227376 @default.
• W2128079427 hasConceptScore W2128079427C49040817 @default.
• W2128079427 hasConceptScore W2128079427C53143962 @default.
• W2128079427 hasConceptScore W2128079427C544956773 @default.
• W2128079427 hasConceptScore W2128079427C61696701 @default.
• W2128079427 hasLocation W21280794271 @default.
• W2128079427 hasOpenAccess W2128079427 @default.
• W2128079427 hasPrimaryLocation W21280794271 @default.
• W2128079427 hasRelatedWork W1963608777 @default.
• W2128079427 hasRelatedWork W1964253164 @default.
• W2128079427 hasRelatedWork W1966863561 @default.
• W2128079427 hasRelatedWork W1973671776 @default.
• W2128079427 hasRelatedWork W1976739939 @default.
• W2128079427 hasRelatedWork W2048392237 @default.
• W2128079427 hasRelatedWork W2069451452 @default.
• W2128079427 hasRelatedWork W2138637063 @default.
• W2128079427 hasRelatedWork W2147755521 @default.
• W2128079427 hasRelatedWork W237886435 @default.
• W2128079427 isParatext "false" @default.
• W2128079427 isRetracted "false" @default.
• W2128079427 magId "2128079427" @default.

• next