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• W2128336851 endingPage "184" @default.
• W2128336851 startingPage "137" @default.
• W2128336851 abstract "Mechanistic understanding of the reactions of small molecules containing C, N and O with Si surfaces is not only fundamentally interesting but also practically important to the development of SiC, SiN, SiO, SiCN and diamond thin films. This article reviews the recent experimental and theoretical work on the reactions of a dozen of [C, N, O]-containing molecules with single-crystal surfaces of Si, including N precursors (ammonia (NH 3 ), hydrazine (N 2 H 4 ) and hydrazoic acid (HN 3 )), CO-containing molecules (carbon monoxide (CO), formaldehyde (CH 2 O), acetaldehyde (CH 3 CHO), formic acid (HCOOH), methanol (CH 3 OH) and ketene (CH 2 CO)), CN-containing molecules (hydrogen cyanide (HCN), cyanogen (C 2 N 2 ), acetonitrile (CH 3 CN) and methylhydrazine (CH 3 N 2 H 3 )), a CNO-containing molecule (formamide (NH 2 CHO)) and some aromatic heterocyclic compounds (pyrrole (C 4 H 5 N), thiophene (C 4 H 4 S), furan (C 4 H 4 O), pyridine (C 5 H 5 N), pyrazine (C 4 H 4 N 2 ) and s -triazine (C 3 H 3 N 3 ))." @default.
• W2128336851 created "2016-06-24" @default.
• W2128336851 creator A5011722221 @default.
• W2128336851 creator A5072691522 @default.
• W2128336851 date "2002-01-01" @default.
• W2128336851 modified "2023-09-27" @default.
• W2128336851 title "Reactions of some [C, N, O]-containing molecules with Si surfaces: Experimental and theoretical studies" @default.
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