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- W2128565501 abstract "Abstract This article presents an electrothermally‐actuated lateral resistive‐contact RF‐MEMS parallel switch for application to low GHz wireless communication bands. The device is driven by a metal electrothermal actuator, which achieves large displacements and contact forces at much lower temperatures than conventional polysilicon electrothermal actuators. It was manufactured on a standard low‐resistivity substrate and its RF performance was improved by suspending the structures 25 μm from the substrate. Measured (at 1 GHz) insertion loss is −0.11 dB, return loss −41 dB, and isolation −22 dB. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 2894–2896, 2007; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22943" @default.
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- W2128565501 date "2007-09-19" @default.
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- W2128565501 title "Electrothermally-actuated RF-MEMS suspended parallel switch" @default.
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