Matches in SemOpenAlex for { <https://semopenalex.org/work/W2128622492> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2128622492 endingPage "50" @default.
- W2128622492 startingPage "42" @default.
- W2128622492 abstract "In this article, we have reported the fabrication and characterization of some basic building block of a new type of CNT-array based BEOL: vias using vertical dense arrays of semiconducting CNTs and RF MEM switches using horizontal dense arrays of a mixture of metallic and semiconducting tubes. A density of CNTs up to 2.5 1012 cm~2 is reported in 1 μm diameter vias, which is, to our best knowledge, the highest density so far achieved. The CNT horizontal membranes have a Young's modulus of the order of 8.5 GPa and a resistiv ity of 0.0083 Ω cm, respectively, these are by far not optimized but they offer for the first time the possibility to build a fully functional capacitive RF MEM switch. RF measurements of the mechanical switch show isolation higher then 10 dB at high frequency (up to 6 GHz) and a low actuation voltage (less than 10 V). The reported electrical and mechanical properties are unique compared to metal-based RF MEM switches and, after further optimization, seem to hold promise for future improved performance and novel functionality." @default.
- W2128622492 created "2016-06-24" @default.
- W2128622492 creator A5053654772 @default.
- W2128622492 creator A5056592766 @default.
- W2128622492 creator A5091039694 @default.
- W2128622492 date "2011-12-01" @default.
- W2128622492 modified "2023-10-18" @default.
- W2128622492 title "Integration for All Configurations" @default.
- W2128622492 cites W1565896037 @default.
- W2128622492 cites W1848792155 @default.
- W2128622492 cites W1980516378 @default.
- W2128622492 cites W1990248011 @default.
- W2128622492 cites W2008771485 @default.
- W2128622492 cites W2010953919 @default.
- W2128622492 cites W2016786333 @default.
- W2128622492 cites W2018858346 @default.
- W2128622492 cites W2055862408 @default.
- W2128622492 cites W2058448241 @default.
- W2128622492 cites W2092103516 @default.
- W2128622492 cites W2099129928 @default.
- W2128622492 cites W2122340547 @default.
- W2128622492 cites W2122480103 @default.
- W2128622492 cites W2125637540 @default.
- W2128622492 cites W2130100946 @default.
- W2128622492 cites W2131895808 @default.
- W2128622492 cites W2136336272 @default.
- W2128622492 cites W2145371851 @default.
- W2128622492 cites W2156285590 @default.
- W2128622492 cites W2546537270 @default.
- W2128622492 cites W2950266978 @default.
- W2128622492 doi "https://doi.org/10.1109/mmm.2011.942700" @default.
- W2128622492 hasPublicationYear "2011" @default.
- W2128622492 type Work @default.
- W2128622492 sameAs 2128622492 @default.
- W2128622492 citedByCount "4" @default.
- W2128622492 countsByYear W21286224922013 @default.
- W2128622492 countsByYear W21286224922014 @default.
- W2128622492 countsByYear W21286224922015 @default.
- W2128622492 crossrefType "journal-article" @default.
- W2128622492 hasAuthorship W2128622492A5053654772 @default.
- W2128622492 hasAuthorship W2128622492A5056592766 @default.
- W2128622492 hasAuthorship W2128622492A5091039694 @default.
- W2128622492 hasConcept C119599485 @default.
- W2128622492 hasConcept C127413603 @default.
- W2128622492 hasConcept C136525101 @default.
- W2128622492 hasConcept C142724271 @default.
- W2128622492 hasConcept C165801399 @default.
- W2128622492 hasConcept C171250308 @default.
- W2128622492 hasConcept C192562407 @default.
- W2128622492 hasConcept C204787440 @default.
- W2128622492 hasConcept C206755178 @default.
- W2128622492 hasConcept C24326235 @default.
- W2128622492 hasConcept C2524010 @default.
- W2128622492 hasConcept C2777210771 @default.
- W2128622492 hasConcept C2780841128 @default.
- W2128622492 hasConcept C33923547 @default.
- W2128622492 hasConcept C49040817 @default.
- W2128622492 hasConcept C71924100 @default.
- W2128622492 hasConcept C74064498 @default.
- W2128622492 hasConceptScore W2128622492C119599485 @default.
- W2128622492 hasConceptScore W2128622492C127413603 @default.
- W2128622492 hasConceptScore W2128622492C136525101 @default.
- W2128622492 hasConceptScore W2128622492C142724271 @default.
- W2128622492 hasConceptScore W2128622492C165801399 @default.
- W2128622492 hasConceptScore W2128622492C171250308 @default.
- W2128622492 hasConceptScore W2128622492C192562407 @default.
- W2128622492 hasConceptScore W2128622492C204787440 @default.
- W2128622492 hasConceptScore W2128622492C206755178 @default.
- W2128622492 hasConceptScore W2128622492C24326235 @default.
- W2128622492 hasConceptScore W2128622492C2524010 @default.
- W2128622492 hasConceptScore W2128622492C2777210771 @default.
- W2128622492 hasConceptScore W2128622492C2780841128 @default.
- W2128622492 hasConceptScore W2128622492C33923547 @default.
- W2128622492 hasConceptScore W2128622492C49040817 @default.
- W2128622492 hasConceptScore W2128622492C71924100 @default.
- W2128622492 hasConceptScore W2128622492C74064498 @default.
- W2128622492 hasIssue "7" @default.
- W2128622492 hasLocation W21286224921 @default.
- W2128622492 hasOpenAccess W2128622492 @default.
- W2128622492 hasPrimaryLocation W21286224921 @default.
- W2128622492 hasRelatedWork W1631339324 @default.
- W2128622492 hasRelatedWork W2000891963 @default.
- W2128622492 hasRelatedWork W2022434681 @default.
- W2128622492 hasRelatedWork W2035430492 @default.
- W2128622492 hasRelatedWork W2084228094 @default.
- W2128622492 hasRelatedWork W2121913744 @default.
- W2128622492 hasRelatedWork W2754462113 @default.
- W2128622492 hasRelatedWork W3039921875 @default.
- W2128622492 hasRelatedWork W4240308501 @default.
- W2128622492 hasRelatedWork W65622877 @default.
- W2128622492 hasVolume "12" @default.
- W2128622492 isParatext "false" @default.
- W2128622492 isRetracted "false" @default.
- W2128622492 magId "2128622492" @default.
- W2128622492 workType "article" @default.