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• W2128781736 abstract "Abstract A particulate-reduction approach has been developed, based on a pulsed supersonic gas-jet that selectively deflects particulates from the deposition stream during pulsed laser deposition of BaTiO 3 thin films. In situ imaging, using an intensified CCD camera, has shown that the desirable atomic, ionic, and molecular species move toward the substrate with velocities on the order of 10 6 cm s −1 , while the undesirable particulates move at velocities on the order of 10 4 cm s −1 and slower. This separation of velocities is sufficient that the pulsed gas-jet can be timed to impact the particulates after the vapor species reach the substrate, but while the particulates are still near the target, allowing for near-maximum deflection. Key parameters with this approach are the sharpness and the timing of the valve opening and closing. Initial results show that at least an order of magnitude reduction in the number of film particulates is achieved." @default.
• W2128781736 created "2016-06-24" @default.
• W2128781736 creator A5008906662 @default.
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• W2128781736 date "1998-05-01" @default.
• W2128781736 modified "2023-09-25" @default.
• W2128781736 title "Particulate reduction in the pulsed laser deposition of barium titanate thin films" @default.
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• W2128781736 doi "https://doi.org/10.1016/s0169-4332(97)00721-6" @default.
• W2128781736 hasPublicationYear "1998" @default.
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