FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2129084498> ?p ?o ?g. }

• W2129084498 abstract "This paper presents the development and characterization of a low temperature plasma-assisted direct wafer bonding process for structured silicon wafer pairs. We have achieved spontaneous bonding at room temperature with a surface energy of up to 1.2 J/m/sup 2/. It turned out that the bonding process is not deteriorated by the history of the wafers, even after etching for several hours. The yield of the process is 80-95%. A blister test was used to determine the bond strength and the failure distribution for different plasma gases and annealing treatments. Film stress of the bonded interfacial oxide was found to transfer to the bonding partner. Selective wafer bonding was made by structuring the interfacial oxide layer. Design rules for proper bonding are given." @default.
• W2129084498 created "2016-06-24" @default.
• W2129084498 creator A5005853373 @default.
• W2129084498 creator A5033531048 @default.
• W2129084498 creator A5085559230 @default.
• W2129084498 date "2004-08-02" @default.
• W2129084498 modified "2023-09-28" @default.
• W2129084498 title "Low temperature plasma-assisted wafer bonding and bond-interface stress characterization" @default.
• W2129084498 cites W1560224562 @default.
• W2129084498 cites W1964958541 @default.
• W2129084498 cites W2035198111 @default.
• W2129084498 doi "https://doi.org/10.1109/mems.2004.1290672" @default.
• W2129084498 hasPublicationYear "2004" @default.
• W2129084498 type Work @default.
• W2129084498 sameAs 2129084498 @default.
• W2129084498 citedByCount "3" @default.
• W2129084498 crossrefType "proceedings-article" @default.
• W2129084498 hasAuthorship W2129084498A5005853373 @default.
• W2129084498 hasAuthorship W2129084498A5033531048 @default.
• W2129084498 hasAuthorship W2129084498A5085559230 @default.
• W2129084498 hasConcept C100460472 @default.
• W2129084498 hasConcept C107187091 @default.
• W2129084498 hasConcept C121332964 @default.
• W2129084498 hasConcept C122032599 @default.
• W2129084498 hasConcept C138885662 @default.
• W2129084498 hasConcept C159985019 @default.
• W2129084498 hasConcept C160671074 @default.
• W2129084498 hasConcept C171250308 @default.
• W2129084498 hasConcept C178790620 @default.
• W2129084498 hasConcept C185592680 @default.
• W2129084498 hasConcept C191897082 @default.
• W2129084498 hasConcept C192562407 @default.
• W2129084498 hasConcept C201414436 @default.
• W2129084498 hasConcept C21036866 @default.
• W2129084498 hasConcept C2777855556 @default.
• W2129084498 hasConcept C2778071519 @default.
• W2129084498 hasConcept C2779133538 @default.
• W2129084498 hasConcept C2779227376 @default.
• W2129084498 hasConcept C2779851234 @default.
• W2129084498 hasConcept C2779869380 @default.
• W2129084498 hasConcept C2780841128 @default.
• W2129084498 hasConcept C32909587 @default.
• W2129084498 hasConcept C41895202 @default.
• W2129084498 hasConcept C49040817 @default.
• W2129084498 hasConcept C544956773 @default.
• W2129084498 hasConcept C62520636 @default.
• W2129084498 hasConcept C82706917 @default.
• W2129084498 hasConceptScore W2129084498C100460472 @default.
• W2129084498 hasConceptScore W2129084498C107187091 @default.
• W2129084498 hasConceptScore W2129084498C121332964 @default.
• W2129084498 hasConceptScore W2129084498C122032599 @default.
• W2129084498 hasConceptScore W2129084498C138885662 @default.
• W2129084498 hasConceptScore W2129084498C159985019 @default.
• W2129084498 hasConceptScore W2129084498C160671074 @default.
• W2129084498 hasConceptScore W2129084498C171250308 @default.
• W2129084498 hasConceptScore W2129084498C178790620 @default.
• W2129084498 hasConceptScore W2129084498C185592680 @default.
• W2129084498 hasConceptScore W2129084498C191897082 @default.
• W2129084498 hasConceptScore W2129084498C192562407 @default.
• W2129084498 hasConceptScore W2129084498C201414436 @default.
• W2129084498 hasConceptScore W2129084498C21036866 @default.
• W2129084498 hasConceptScore W2129084498C2777855556 @default.
• W2129084498 hasConceptScore W2129084498C2778071519 @default.
• W2129084498 hasConceptScore W2129084498C2779133538 @default.
• W2129084498 hasConceptScore W2129084498C2779227376 @default.
• W2129084498 hasConceptScore W2129084498C2779851234 @default.
• W2129084498 hasConceptScore W2129084498C2779869380 @default.
• W2129084498 hasConceptScore W2129084498C2780841128 @default.
• W2129084498 hasConceptScore W2129084498C32909587 @default.
• W2129084498 hasConceptScore W2129084498C41895202 @default.
• W2129084498 hasConceptScore W2129084498C49040817 @default.
• W2129084498 hasConceptScore W2129084498C544956773 @default.
• W2129084498 hasConceptScore W2129084498C62520636 @default.
• W2129084498 hasConceptScore W2129084498C82706917 @default.
• W2129084498 hasLocation W21290844981 @default.
• W2129084498 hasOpenAccess W2129084498 @default.
• W2129084498 hasPrimaryLocation W21290844981 @default.
• W2129084498 hasRelatedWork W1552156432 @default.
• W2129084498 hasRelatedWork W1564500734 @default.
• W2129084498 hasRelatedWork W1906666741 @default.
• W2129084498 hasRelatedWork W1921331855 @default.
• W2129084498 hasRelatedWork W1976401081 @default.
• W2129084498 hasRelatedWork W1980615010 @default.
• W2129084498 hasRelatedWork W1986456852 @default.
• W2129084498 hasRelatedWork W1994196515 @default.
• W2129084498 hasRelatedWork W2009155770 @default.
• W2129084498 hasRelatedWork W2029050535 @default.
• W2129084498 hasRelatedWork W2029637008 @default.
• W2129084498 hasRelatedWork W2051037192 @default.
• W2129084498 hasRelatedWork W2078175237 @default.
• W2129084498 hasRelatedWork W2086028483 @default.
• W2129084498 hasRelatedWork W2113879483 @default.
• W2129084498 hasRelatedWork W2142923993 @default.
• W2129084498 hasRelatedWork W2153680634 @default.
• W2129084498 hasRelatedWork W2171418261 @default.
• W2129084498 hasRelatedWork W2181939277 @default.
• W2129084498 hasRelatedWork W3175758893 @default.
• W2129084498 isParatext "false" @default.
• W2129084498 isRetracted "false" @default.
• W2129084498 magId "2129084498" @default.

• next