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- W2129315316 abstract "This paper considers model uncertainty in the run-to-run control problem from a probabilistic viewpoint. The methodology assumes that the model parameters are stochastic and uses experimental input-output data off-line to characterize the probability distribution of the model parameters. This naturally leads to the notions of probability of stability and probability of performance as a means of evaluating run-to-run controllers. Analytic formulas for the probability of stability are given for the particular case of an EWMA controller. When considering a more general notion of performance, the Monte Carlo method is used to approximate the probability of performance to a high degree of confidence. This probabilistic approach to run-to-run control is then illustrated on a virtual plasma etching reactor. Finally, the reliability of the method is investigated." @default.
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- W2129315316 date "1998-01-01" @default.
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- W2129315316 title "A probabilistic approach to run-to-run control" @default.
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- W2129315316 doi "https://doi.org/10.1109/66.728563" @default.
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