Matches in SemOpenAlex for { <https://semopenalex.org/work/W2130149296> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2130149296 endingPage "275" @default.
- W2130149296 startingPage "273" @default.
- W2130149296 abstract "We investigate the short-channel performance of trigate silicon nanowire transistors. Drain-induced barrier lowering at a gate length of 25 nm is strongly suppressed by reducing the nanowire width (W <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>NW</sub> ) down to 10 nm. We found that the parasitic resistance (R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>SD</sub> ) of nanowire transistors is dominated by nanowire-shaped source/drain (S/D) regions under the gate spacer whose resistivity is higher than that in wider regions. We succeeded in significant reduction by raised S/D with thin gate spacer whose width is 10 nm. Although the parasitic capacitance (C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>para</sub> ) increases by spacer thinning, C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>para</sub> increase is much smaller than R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>SD</sub> reduction, and great performance improvement is obtained for a W <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>NW</sub> of less than 15 nm." @default.
- W2130149296 created "2016-06-24" @default.
- W2130149296 creator A5013743581 @default.
- W2130149296 creator A5017282115 @default.
- W2130149296 creator A5047364917 @default.
- W2130149296 creator A5087391821 @default.
- W2130149296 date "2011-03-01" @default.
- W2130149296 modified "2023-10-14" @default.
- W2130149296 title "Short-Channel Performance Improvement by Raised Source/Drain Extensions With Thin Spacers in Trigate Silicon Nanowire MOSFETs" @default.
- W2130149296 cites W1560300163 @default.
- W2130149296 cites W1966399193 @default.
- W2130149296 cites W2016491921 @default.
- W2130149296 cites W2016946786 @default.
- W2130149296 cites W2038694080 @default.
- W2130149296 cites W2056587731 @default.
- W2130149296 cites W2073997087 @default.
- W2130149296 cites W2097416349 @default.
- W2130149296 cites W2101087287 @default.
- W2130149296 cites W2110128073 @default.
- W2130149296 cites W2161911860 @default.
- W2130149296 cites W2172215492 @default.
- W2130149296 doi "https://doi.org/10.1109/led.2010.2101043" @default.
- W2130149296 hasPublicationYear "2011" @default.
- W2130149296 type Work @default.
- W2130149296 sameAs 2130149296 @default.
- W2130149296 citedByCount "33" @default.
- W2130149296 countsByYear W21301492962012 @default.
- W2130149296 countsByYear W21301492962013 @default.
- W2130149296 countsByYear W21301492962014 @default.
- W2130149296 countsByYear W21301492962015 @default.
- W2130149296 countsByYear W21301492962016 @default.
- W2130149296 countsByYear W21301492962017 @default.
- W2130149296 countsByYear W21301492962019 @default.
- W2130149296 countsByYear W21301492962020 @default.
- W2130149296 countsByYear W21301492962021 @default.
- W2130149296 crossrefType "journal-article" @default.
- W2130149296 hasAuthorship W2130149296A5013743581 @default.
- W2130149296 hasAuthorship W2130149296A5017282115 @default.
- W2130149296 hasAuthorship W2130149296A5047364917 @default.
- W2130149296 hasAuthorship W2130149296A5087391821 @default.
- W2130149296 hasConcept C119599485 @default.
- W2130149296 hasConcept C121332964 @default.
- W2130149296 hasConcept C127413603 @default.
- W2130149296 hasConcept C171250308 @default.
- W2130149296 hasConcept C17525397 @default.
- W2130149296 hasConcept C184720557 @default.
- W2130149296 hasConcept C192562407 @default.
- W2130149296 hasConcept C30066665 @default.
- W2130149296 hasConcept C49040817 @default.
- W2130149296 hasConcept C544956773 @default.
- W2130149296 hasConcept C62520636 @default.
- W2130149296 hasConcept C74214498 @default.
- W2130149296 hasConceptScore W2130149296C119599485 @default.
- W2130149296 hasConceptScore W2130149296C121332964 @default.
- W2130149296 hasConceptScore W2130149296C127413603 @default.
- W2130149296 hasConceptScore W2130149296C171250308 @default.
- W2130149296 hasConceptScore W2130149296C17525397 @default.
- W2130149296 hasConceptScore W2130149296C184720557 @default.
- W2130149296 hasConceptScore W2130149296C192562407 @default.
- W2130149296 hasConceptScore W2130149296C30066665 @default.
- W2130149296 hasConceptScore W2130149296C49040817 @default.
- W2130149296 hasConceptScore W2130149296C544956773 @default.
- W2130149296 hasConceptScore W2130149296C62520636 @default.
- W2130149296 hasConceptScore W2130149296C74214498 @default.
- W2130149296 hasIssue "3" @default.
- W2130149296 hasLocation W21301492961 @default.
- W2130149296 hasOpenAccess W2130149296 @default.
- W2130149296 hasPrimaryLocation W21301492961 @default.
- W2130149296 hasRelatedWork W134694013 @default.
- W2130149296 hasRelatedWork W1997083299 @default.
- W2130149296 hasRelatedWork W2008614077 @default.
- W2130149296 hasRelatedWork W2033291290 @default.
- W2130149296 hasRelatedWork W2089372549 @default.
- W2130149296 hasRelatedWork W2765462919 @default.
- W2130149296 hasRelatedWork W2775410575 @default.
- W2130149296 hasRelatedWork W3143516596 @default.
- W2130149296 hasRelatedWork W4300780679 @default.
- W2130149296 hasRelatedWork W1669133231 @default.
- W2130149296 hasVolume "32" @default.
- W2130149296 isParatext "false" @default.
- W2130149296 isRetracted "false" @default.
- W2130149296 magId "2130149296" @default.
- W2130149296 workType "article" @default.