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- W2130235344 endingPage "C112" @default.
- W2130235344 startingPage "C112" @default.
- W2130235344 abstract "A detailed kinetic model is formulated for the decomposition of chlorosilanes [e.g., silicon tetrachloride and methyltrichlorosilane MTS)] in mixtures of and under conditions encountered when these mixtures are used to deposit on solid substrates or to form powders in the gas phase. A complete mechanistic model for the water gas-shift reaction is included as a subset in the overall homogeneous mechanism. The kinetic model is introduced into the transport and reaction model of a plug-flow reactor, and the overall model is used to investigate the sensitivity of gas-phase composition on the operating conditions, the residence time in the reactor, and some key steps in the pathways of the homogeneous chemistry of the process. Two sources of silicon are used in the computations, namely, silicon tetrachloride and methyltrichlorosilane. The results of the computations reveal that at the same conditions the major components of the gas phase reach partial equilibrium at shorter residence times in the MTS system. In both systems, the gas phase approaches equilibrium at residence times that are much greater than those typically encountered in chemical vapor deposition reactors. The concentrations of compounds and water vapor are much higher in the MTS system. In agreement with past experimental observations, this result suggests that silica should be deposited at higher rates from mixtures containing MTS. © 2002 The Electrochemical Society. All rights reserved." @default.
- W2130235344 created "2016-06-24" @default.
- W2130235344 creator A5008347622 @default.
- W2130235344 creator A5073880813 @default.
- W2130235344 date "2002-01-01" @default.
- W2130235344 modified "2023-09-24" @default.
- W2130235344 title "Mathematical Modeling of the Gas-Phase Chemistry in the Decomposition of Chlorosilanes in Mixtures of Carbon Dioxide and Hydrogen at High Temperatures" @default.
- W2130235344 cites W1618584074 @default.
- W2130235344 cites W1974655044 @default.
- W2130235344 cites W1975259354 @default.
- W2130235344 cites W1983196951 @default.
- W2130235344 cites W2000222213 @default.
- W2130235344 cites W2007238958 @default.
- W2130235344 cites W2012771569 @default.
- W2130235344 cites W2019018338 @default.
- W2130235344 cites W2021285795 @default.
- W2130235344 cites W2025391839 @default.
- W2130235344 cites W2029569966 @default.
- W2130235344 cites W2039495070 @default.
- W2130235344 cites W2039625656 @default.
- W2130235344 cites W2041409101 @default.
- W2130235344 cites W2047359792 @default.
- W2130235344 cites W2048338849 @default.
- W2130235344 cites W2050515590 @default.
- W2130235344 cites W2051959027 @default.
- W2130235344 cites W2052165313 @default.
- W2130235344 cites W2053899204 @default.
- W2130235344 cites W2054914927 @default.
- W2130235344 cites W2067001048 @default.
- W2130235344 cites W2067441325 @default.
- W2130235344 cites W2084218844 @default.
- W2130235344 cites W2126450914 @default.
- W2130235344 cites W2133685242 @default.
- W2130235344 cites W2134074445 @default.
- W2130235344 cites W2164419025 @default.
- W2130235344 cites W2170485121 @default.
- W2130235344 cites W2171093331 @default.
- W2130235344 cites W2318411092 @default.
- W2130235344 cites W2327997795 @default.
- W2130235344 cites W2952791253 @default.
- W2130235344 cites W343090255 @default.
- W2130235344 cites W2091252569 @default.
- W2130235344 doi "https://doi.org/10.1149/1.1432671" @default.
- W2130235344 hasPublicationYear "2002" @default.
- W2130235344 type Work @default.
- W2130235344 sameAs 2130235344 @default.
- W2130235344 citedByCount "7" @default.
- W2130235344 crossrefType "journal-article" @default.
- W2130235344 hasAuthorship W2130235344A5008347622 @default.
- W2130235344 hasAuthorship W2130235344A5073880813 @default.
- W2130235344 hasConcept C124681953 @default.
- W2130235344 hasConcept C127413603 @default.
- W2130235344 hasConcept C178790620 @default.
- W2130235344 hasConcept C179104552 @default.
- W2130235344 hasConcept C185592680 @default.
- W2130235344 hasConcept C187320778 @default.
- W2130235344 hasConcept C2775913793 @default.
- W2130235344 hasConcept C2776412973 @default.
- W2130235344 hasConcept C42360764 @default.
- W2130235344 hasConcept C512968161 @default.
- W2130235344 hasConcept C544956773 @default.
- W2130235344 hasConceptScore W2130235344C124681953 @default.
- W2130235344 hasConceptScore W2130235344C127413603 @default.
- W2130235344 hasConceptScore W2130235344C178790620 @default.
- W2130235344 hasConceptScore W2130235344C179104552 @default.
- W2130235344 hasConceptScore W2130235344C185592680 @default.
- W2130235344 hasConceptScore W2130235344C187320778 @default.
- W2130235344 hasConceptScore W2130235344C2775913793 @default.
- W2130235344 hasConceptScore W2130235344C2776412973 @default.
- W2130235344 hasConceptScore W2130235344C42360764 @default.
- W2130235344 hasConceptScore W2130235344C512968161 @default.
- W2130235344 hasConceptScore W2130235344C544956773 @default.
- W2130235344 hasIssue "2" @default.
- W2130235344 hasLocation W21302353441 @default.
- W2130235344 hasOpenAccess W2130235344 @default.
- W2130235344 hasPrimaryLocation W21302353441 @default.
- W2130235344 hasRelatedWork W1982363571 @default.
- W2130235344 hasRelatedWork W2018854413 @default.
- W2130235344 hasRelatedWork W2064284973 @default.
- W2130235344 hasRelatedWork W2086148145 @default.
- W2130235344 hasRelatedWork W2316939796 @default.
- W2130235344 hasRelatedWork W2318431781 @default.
- W2130235344 hasRelatedWork W2606660291 @default.
- W2130235344 hasRelatedWork W2607003041 @default.
- W2130235344 hasRelatedWork W2748952813 @default.
- W2130235344 hasRelatedWork W3043749580 @default.
- W2130235344 hasVolume "149" @default.
- W2130235344 isParatext "false" @default.
- W2130235344 isRetracted "false" @default.
- W2130235344 magId "2130235344" @default.
- W2130235344 workType "article" @default.