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• W2130320281 abstract "This paper describes methods for the extraction of sheet resistance from V/I measurements made on four-terminal sheet resistors incorporated into electrical linewidth test structures patterned with nonplanar geometries in monocrystalline silicon-on-insulator films. The end application is using the uniquely high repeatability and low cost of electrical CD (critical dimension) metrology to serve as a secondary reference in establishing a traceability path for CD-reference artifacts." @default.
• W2130320281 created "2016-06-24" @default.
• W2130320281 creator A5003759437 @default.
• W2130320281 creator A5003935666 @default.
• W2130320281 creator A5006348532 @default.
• W2130320281 creator A5023569907 @default.
• W2130320281 creator A5029336281 @default.
• W2130320281 creator A5029366819 @default.
• W2130320281 creator A5034758454 @default.
• W2130320281 creator A5059055706 @default.
• W2130320281 creator A5076450477 @default.
• W2130320281 date "2002-11-27" @default.
• W2130320281 modified "2023-09-27" @default.
• W2130320281 title "Extraction of sheet resistance from four-terminal sheet resistors replicated in monocrystalline films with non-planar geometries" @default.
• W2130320281 cites W2017209251 @default.
• W2130320281 cites W2035879195 @default.
• W2130320281 cites W2085930721 @default.
• W2130320281 cites W2112528275 @default.
• W2130320281 cites W2114118116 @default.
• W2130320281 cites W2124449326 @default.
• W2130320281 cites W2146026441 @default.
• W2130320281 cites W2168569035 @default.
• W2130320281 cites W2490343118 @default.
• W2130320281 cites W2543120882 @default.
• W2130320281 cites W2571303395 @default.
• W2130320281 cites W1037065705 @default.
• W2130320281 cites W1575401747 @default.
• W2130320281 cites W2466517918 @default.
• W2130320281 doi "https://doi.org/10.1109/icmts.1998.688030" @default.
• W2130320281 hasPublicationYear "2002" @default.
• W2130320281 type Work @default.
• W2130320281 sameAs 2130320281 @default.
• W2130320281 citedByCount "1" @default.
• W2130320281 crossrefType "proceedings-article" @default.
• W2130320281 hasAuthorship W2130320281A5003759437 @default.
• W2130320281 hasAuthorship W2130320281A5003935666 @default.
• W2130320281 hasAuthorship W2130320281A5006348532 @default.
• W2130320281 hasAuthorship W2130320281A5023569907 @default.
• W2130320281 hasAuthorship W2130320281A5029336281 @default.
• W2130320281 hasAuthorship W2130320281A5029366819 @default.
• W2130320281 hasAuthorship W2130320281A5034758454 @default.
• W2130320281 hasAuthorship W2130320281A5059055706 @default.
• W2130320281 hasAuthorship W2130320281A5076450477 @default.
• W2130320281 hasConcept C115903868 @default.
• W2130320281 hasConcept C119599485 @default.
• W2130320281 hasConcept C120665830 @default.
• W2130320281 hasConcept C121332964 @default.
• W2130320281 hasConcept C121684516 @default.
• W2130320281 hasConcept C127413603 @default.
• W2130320281 hasConcept C134786449 @default.
• W2130320281 hasConcept C137488568 @default.
• W2130320281 hasConcept C153876917 @default.
• W2130320281 hasConcept C154020017 @default.
• W2130320281 hasConcept C159985019 @default.
• W2130320281 hasConcept C160671074 @default.
• W2130320281 hasConcept C165801399 @default.
• W2130320281 hasConcept C185592680 @default.
• W2130320281 hasConcept C192562407 @default.
• W2130320281 hasConcept C195766429 @default.
• W2130320281 hasConcept C26953177 @default.
• W2130320281 hasConcept C2779227376 @default.
• W2130320281 hasConcept C2779664074 @default.
• W2130320281 hasConcept C41008148 @default.
• W2130320281 hasConcept C43617362 @default.
• W2130320281 hasConcept C49040817 @default.
• W2130320281 hasConcept C544956773 @default.
• W2130320281 hasConcept C66825105 @default.
• W2130320281 hasConcept C76155785 @default.
• W2130320281 hasConcept C94857076 @default.
• W2130320281 hasConceptScore W2130320281C115903868 @default.
• W2130320281 hasConceptScore W2130320281C119599485 @default.
• W2130320281 hasConceptScore W2130320281C120665830 @default.
• W2130320281 hasConceptScore W2130320281C121332964 @default.
• W2130320281 hasConceptScore W2130320281C121684516 @default.
• W2130320281 hasConceptScore W2130320281C127413603 @default.
• W2130320281 hasConceptScore W2130320281C134786449 @default.
• W2130320281 hasConceptScore W2130320281C137488568 @default.
• W2130320281 hasConceptScore W2130320281C153876917 @default.
• W2130320281 hasConceptScore W2130320281C154020017 @default.
• W2130320281 hasConceptScore W2130320281C159985019 @default.
• W2130320281 hasConceptScore W2130320281C160671074 @default.
• W2130320281 hasConceptScore W2130320281C165801399 @default.
• W2130320281 hasConceptScore W2130320281C185592680 @default.
• W2130320281 hasConceptScore W2130320281C192562407 @default.
• W2130320281 hasConceptScore W2130320281C195766429 @default.
• W2130320281 hasConceptScore W2130320281C26953177 @default.
• W2130320281 hasConceptScore W2130320281C2779227376 @default.
• W2130320281 hasConceptScore W2130320281C2779664074 @default.
• W2130320281 hasConceptScore W2130320281C41008148 @default.
• W2130320281 hasConceptScore W2130320281C43617362 @default.
• W2130320281 hasConceptScore W2130320281C49040817 @default.
• W2130320281 hasConceptScore W2130320281C544956773 @default.
• W2130320281 hasConceptScore W2130320281C66825105 @default.
• W2130320281 hasConceptScore W2130320281C76155785 @default.
• W2130320281 hasConceptScore W2130320281C94857076 @default.
• W2130320281 hasLocation W21303202811 @default.
• W2130320281 hasOpenAccess W2130320281 @default.
• W2130320281 hasPrimaryLocation W21303202811 @default.
• W2130320281 hasRelatedWork W1905153792 @default.
• W2130320281 hasRelatedWork W1976856814 @default.

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