Matches in SemOpenAlex for { <https://semopenalex.org/work/W2130496244> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2130496244 endingPage "1418" @default.
- W2130496244 startingPage "1415" @default.
- W2130496244 abstract "Phosphorus diffusion in an infrared conveyor belt furnace is a common method of forming the emitter of wafer-based Si solar cells. Here diffusion was performed using thinner source layers ( 3/spl times/10/sup 21/ P/cm/sup 3/) than in common practice (thickness >100 nm, [P] </spl sim/3/spl times/10/sup 20/ P/cm/sup 3/). Advantages of thin layers include reduction of chemical emissions and of the time required to etch the layer in HF after diffusion. The emitter profile was controlled by using design of experiments techniques. Diffusion profile were measured by spreading resistance analysis. The measured profiles agreed well with approximations based on four-point probe measurements and TSUPREM-4 software simulations." @default.
- W2130496244 created "2016-06-24" @default.
- W2130496244 creator A5027120465 @default.
- W2130496244 creator A5042196583 @default.
- W2130496244 creator A5044504962 @default.
- W2130496244 creator A5072137907 @default.
- W2130496244 date "2003-05-18" @default.
- W2130496244 modified "2023-09-24" @default.
- W2130496244 title "Infrared emitter diffusion using thin and heavily-doped phosphorus source layers" @default.
- W2130496244 cites W1547805280 @default.
- W2130496244 cites W2014367837 @default.
- W2130496244 cites W2084665798 @default.
- W2130496244 cites W2154365816 @default.
- W2130496244 hasPublicationYear "2003" @default.
- W2130496244 type Work @default.
- W2130496244 sameAs 2130496244 @default.
- W2130496244 citedByCount "0" @default.
- W2130496244 crossrefType "journal-article" @default.
- W2130496244 hasAuthorship W2130496244A5027120465 @default.
- W2130496244 hasAuthorship W2130496244A5042196583 @default.
- W2130496244 hasAuthorship W2130496244A5044504962 @default.
- W2130496244 hasAuthorship W2130496244A5072137907 @default.
- W2130496244 hasConcept C113196181 @default.
- W2130496244 hasConcept C120665830 @default.
- W2130496244 hasConcept C121332964 @default.
- W2130496244 hasConcept C158355884 @default.
- W2130496244 hasConcept C160671074 @default.
- W2130496244 hasConcept C171250308 @default.
- W2130496244 hasConcept C185592680 @default.
- W2130496244 hasConcept C19067145 @default.
- W2130496244 hasConcept C192562407 @default.
- W2130496244 hasConcept C207521374 @default.
- W2130496244 hasConcept C2779227376 @default.
- W2130496244 hasConcept C43617362 @default.
- W2130496244 hasConcept C46918542 @default.
- W2130496244 hasConcept C49040817 @default.
- W2130496244 hasConcept C57863236 @default.
- W2130496244 hasConcept C69357855 @default.
- W2130496244 hasConcept C97355855 @default.
- W2130496244 hasConceptScore W2130496244C113196181 @default.
- W2130496244 hasConceptScore W2130496244C120665830 @default.
- W2130496244 hasConceptScore W2130496244C121332964 @default.
- W2130496244 hasConceptScore W2130496244C158355884 @default.
- W2130496244 hasConceptScore W2130496244C160671074 @default.
- W2130496244 hasConceptScore W2130496244C171250308 @default.
- W2130496244 hasConceptScore W2130496244C185592680 @default.
- W2130496244 hasConceptScore W2130496244C19067145 @default.
- W2130496244 hasConceptScore W2130496244C192562407 @default.
- W2130496244 hasConceptScore W2130496244C207521374 @default.
- W2130496244 hasConceptScore W2130496244C2779227376 @default.
- W2130496244 hasConceptScore W2130496244C43617362 @default.
- W2130496244 hasConceptScore W2130496244C46918542 @default.
- W2130496244 hasConceptScore W2130496244C49040817 @default.
- W2130496244 hasConceptScore W2130496244C57863236 @default.
- W2130496244 hasConceptScore W2130496244C69357855 @default.
- W2130496244 hasConceptScore W2130496244C97355855 @default.
- W2130496244 hasLocation W21304962441 @default.
- W2130496244 hasOpenAccess W2130496244 @default.
- W2130496244 hasPrimaryLocation W21304962441 @default.
- W2130496244 hasRelatedWork W1505497273 @default.
- W2130496244 hasRelatedWork W1505858002 @default.
- W2130496244 hasRelatedWork W1744487392 @default.
- W2130496244 hasRelatedWork W1790400348 @default.
- W2130496244 hasRelatedWork W1878710886 @default.
- W2130496244 hasRelatedWork W1932453886 @default.
- W2130496244 hasRelatedWork W1942786082 @default.
- W2130496244 hasRelatedWork W1964674969 @default.
- W2130496244 hasRelatedWork W2006920638 @default.
- W2130496244 hasRelatedWork W2104707065 @default.
- W2130496244 hasRelatedWork W2109285778 @default.
- W2130496244 hasRelatedWork W2109349993 @default.
- W2130496244 hasRelatedWork W2134896695 @default.
- W2130496244 hasRelatedWork W2136786125 @default.
- W2130496244 hasRelatedWork W2146102729 @default.
- W2130496244 hasRelatedWork W2153366222 @default.
- W2130496244 hasRelatedWork W2155398478 @default.
- W2130496244 hasRelatedWork W2164731945 @default.
- W2130496244 hasRelatedWork W2538668925 @default.
- W2130496244 hasRelatedWork W306707260 @default.
- W2130496244 hasVolume "2" @default.
- W2130496244 isParatext "false" @default.
- W2130496244 isRetracted "false" @default.
- W2130496244 magId "2130496244" @default.
- W2130496244 workType "article" @default.