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• W2130512184 abstract "We present a new temperature compensation system for microresonator-based frequency references. It consists of a phase-locked loop (PLL) whose inputs are derived from two microresonators with different temperature coefficients of frequency. The resonators are suspended within an encapsulated cavity and are heated to a constant temperature by the PLL controller, thereby achieving active temperature compensation. We show repeated real-time measurements of three 1.2-MHz prototypes that achieve a frequency stability of ± 1 ppm from -20°C to +80°C, as well as a technique to reduce steady-state frequency errors to ±0.05 ppm using multipoint calibration." @default.
• W2130512184 created "2016-06-24" @default.
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• W2130512184 date "2010-02-01" @default.
• W2130512184 modified "2023-10-02" @default.
• W2130512184 title "Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop" @default.
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• W2130512184 doi "https://doi.org/10.1109/jmems.2009.2035932" @default.
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