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- W2130594907 abstract "The authors present a nonplanar surface profile measurement method wherein in-plane and out-of-plane coordinates are independently measured using two different techniques, and the data are correlated to give an overall surface profile. The first technique uses computer-controlled optical equipment to determine the in-plane grid locations in an x-y coordinate system. In the other, Moire interferometry is used to determine the out-of-plane depth to give the z-coordinates. The z data are then correlated with the x-y data to define the surface profile. The procedure used is described, along with some preliminary results. >" @default.
- W2130594907 created "2016-06-24" @default.
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- W2130594907 date "2003-01-07" @default.
- W2130594907 modified "2023-09-23" @default.
- W2130594907 title "Nonplanar surface profile measurements systems" @default.
- W2130594907 doi "https://doi.org/10.1109/ssst.1989.72525" @default.
- W2130594907 hasPublicationYear "2003" @default.
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