Matches in SemOpenAlex for { <https://semopenalex.org/work/W2130654108> ?p ?o ?g. }
- W2130654108 endingPage "L6" @default.
- W2130654108 startingPage "L6" @default.
- W2130654108 abstract "We have developed an inductively coupled plasma etching process for fabrication of high-aspect-ratio hole-type photonic crystals in InP, which are of interest for optical devices involving the telecommunication wavelength of 1550nm. The etching was performed at 250°C using Cl2∕O2 chemistry for sidewall passivation. The process yields nearly cylindrical features with an aspect ratio larger than 10 for hole diameters near 0.25μm. This makes them very suitable for high-quality photonic crystal patterns." @default.
- W2130654108 created "2016-06-24" @default.
- W2130654108 creator A5017710214 @default.
- W2130654108 creator A5032498984 @default.
- W2130654108 creator A5053809265 @default.
- W2130654108 creator A5058539546 @default.
- W2130654108 creator A5064704983 @default.
- W2130654108 date "2006-01-01" @default.
- W2130654108 modified "2023-09-26" @default.
- W2130654108 title "Cl[sub 2]∕O[sub 2]-inductively coupled plasma etching of deep hole-type photonic crystals in InP" @default.
- W2130654108 cites W1926094870 @default.
- W2130654108 cites W1968490203 @default.
- W2130654108 cites W1989283442 @default.
- W2130654108 cites W1990308077 @default.
- W2130654108 cites W1995281324 @default.
- W2130654108 cites W1996606143 @default.
- W2130654108 cites W2001906419 @default.
- W2130654108 cites W2002351105 @default.
- W2130654108 cites W2005395289 @default.
- W2130654108 cites W2009839557 @default.
- W2130654108 cites W2034597894 @default.
- W2130654108 cites W2039068705 @default.
- W2130654108 cites W2044803126 @default.
- W2130654108 cites W2065159930 @default.
- W2130654108 cites W2070399349 @default.
- W2130654108 cites W2098318039 @default.
- W2130654108 doi "https://doi.org/10.1116/1.2151915" @default.
- W2130654108 hasPublicationYear "2006" @default.
- W2130654108 type Work @default.
- W2130654108 sameAs 2130654108 @default.
- W2130654108 citedByCount "42" @default.
- W2130654108 countsByYear W21306541082012 @default.
- W2130654108 countsByYear W21306541082014 @default.
- W2130654108 countsByYear W21306541082015 @default.
- W2130654108 countsByYear W21306541082016 @default.
- W2130654108 countsByYear W21306541082017 @default.
- W2130654108 countsByYear W21306541082018 @default.
- W2130654108 countsByYear W21306541082019 @default.
- W2130654108 countsByYear W21306541082021 @default.
- W2130654108 countsByYear W21306541082023 @default.
- W2130654108 crossrefType "journal-article" @default.
- W2130654108 hasAuthorship W2130654108A5017710214 @default.
- W2130654108 hasAuthorship W2130654108A5032498984 @default.
- W2130654108 hasAuthorship W2130654108A5053809265 @default.
- W2130654108 hasAuthorship W2130654108A5058539546 @default.
- W2130654108 hasAuthorship W2130654108A5064704983 @default.
- W2130654108 hasBestOaLocation W21306541082 @default.
- W2130654108 hasConcept C100460472 @default.
- W2130654108 hasConcept C107187091 @default.
- W2130654108 hasConcept C121332964 @default.
- W2130654108 hasConcept C130472188 @default.
- W2130654108 hasConcept C136525101 @default.
- W2130654108 hasConcept C142724271 @default.
- W2130654108 hasConcept C171250308 @default.
- W2130654108 hasConcept C192562407 @default.
- W2130654108 hasConcept C204787440 @default.
- W2130654108 hasConcept C20788544 @default.
- W2130654108 hasConcept C2779227376 @default.
- W2130654108 hasConcept C33574316 @default.
- W2130654108 hasConcept C49040817 @default.
- W2130654108 hasConcept C62520636 @default.
- W2130654108 hasConcept C6260449 @default.
- W2130654108 hasConcept C71924100 @default.
- W2130654108 hasConcept C75302062 @default.
- W2130654108 hasConcept C82706917 @default.
- W2130654108 hasConcept C95974651 @default.
- W2130654108 hasConceptScore W2130654108C100460472 @default.
- W2130654108 hasConceptScore W2130654108C107187091 @default.
- W2130654108 hasConceptScore W2130654108C121332964 @default.
- W2130654108 hasConceptScore W2130654108C130472188 @default.
- W2130654108 hasConceptScore W2130654108C136525101 @default.
- W2130654108 hasConceptScore W2130654108C142724271 @default.
- W2130654108 hasConceptScore W2130654108C171250308 @default.
- W2130654108 hasConceptScore W2130654108C192562407 @default.
- W2130654108 hasConceptScore W2130654108C204787440 @default.
- W2130654108 hasConceptScore W2130654108C20788544 @default.
- W2130654108 hasConceptScore W2130654108C2779227376 @default.
- W2130654108 hasConceptScore W2130654108C33574316 @default.
- W2130654108 hasConceptScore W2130654108C49040817 @default.
- W2130654108 hasConceptScore W2130654108C62520636 @default.
- W2130654108 hasConceptScore W2130654108C6260449 @default.
- W2130654108 hasConceptScore W2130654108C71924100 @default.
- W2130654108 hasConceptScore W2130654108C75302062 @default.
- W2130654108 hasConceptScore W2130654108C82706917 @default.
- W2130654108 hasConceptScore W2130654108C95974651 @default.
- W2130654108 hasIssue "1" @default.
- W2130654108 hasLocation W21306541081 @default.
- W2130654108 hasLocation W21306541082 @default.
- W2130654108 hasLocation W21306541083 @default.
- W2130654108 hasOpenAccess W2130654108 @default.
- W2130654108 hasPrimaryLocation W21306541081 @default.
- W2130654108 hasRelatedWork W1544774047 @default.
- W2130654108 hasRelatedWork W1966405528 @default.
- W2130654108 hasRelatedWork W1992176398 @default.
- W2130654108 hasRelatedWork W2059112004 @default.
- W2130654108 hasRelatedWork W2094799427 @default.
- W2130654108 hasRelatedWork W2112155479 @default.
- W2130654108 hasRelatedWork W2136502888 @default.