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• W2130697029 abstract "We report a new on-chip method for actuating an optical fiber in 2-axes. Opposing comb-drive actuators with integrated 3-D wedges (fabricated using gray-scale technology [ 1, 2]) create a translatable, variable height v-groove to alter the horizontal and vertical alignment of an optical fiber cantilever. Such an actuator is attractive for on-chip active alignment of fiber optics to edge-coupled optoelectronic devices. The design and fabrication of this variable height actuator is conducive to batch fabrication since all structural components are fabricated in silicon using a single lithography and dry-etching step. Actuation of a cleaved fiber tip > 20 µ m in each direction is demonstrated." @default.
• W2130697029 created "2016-06-24" @default.
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• W2130697029 date "2006-05-25" @default.
• W2130697029 modified "2023-09-27" @default.
• W2130697029 title "On-Chip 2-Axis Optical Fiber Actuator Using Gray-Scale Technology" @default.
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• W2130697029 doi "https://doi.org/10.1109/memsys.2006.1627787" @default.
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