Matches in SemOpenAlex for { <https://semopenalex.org/work/W2131006132> ?p ?o ?g. }
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- W2131006132 endingPage "1518" @default.
- W2131006132 startingPage "1513" @default.
- W2131006132 abstract "The results of a study of SiNx, SiO2, and Si etching in a high-density electron cyclotron resonance plasma using mixtures containing SF6, NF3, N2, O2, and Ar are presented. Higher selectivities of SiNx etching over SiO2 (up to ∼100) were achieved with NF3, while higher selectivities over Si (up to 5–10) were obtained with SF6-based mixtures. Plasma and surface processes responsible for etching are analyzed, and mechanisms of nitride etching in NF3-based plasmas are proposed." @default.
- W2131006132 created "2016-06-24" @default.
- W2131006132 creator A5005158119 @default.
- W2131006132 creator A5031090013 @default.
- W2131006132 creator A5033287607 @default.
- W2131006132 creator A5078844204 @default.
- W2131006132 date "2004-07-01" @default.
- W2131006132 modified "2023-10-01" @default.
- W2131006132 title "Mechanisms of silicon nitride etching by electron cyclotron resonance plasmas using SF6- and NF3-based gas mixtures" @default.
- W2131006132 cites W1618911772 @default.
- W2131006132 cites W1653809286 @default.
- W2131006132 cites W1975271377 @default.
- W2131006132 cites W1981652398 @default.
- W2131006132 cites W1989518193 @default.
- W2131006132 cites W2021491943 @default.
- W2131006132 cites W2046836154 @default.
- W2131006132 cites W2102078994 @default.
- W2131006132 cites W2154981357 @default.
- W2131006132 cites W2172065341 @default.
- W2131006132 doi "https://doi.org/10.1116/1.1701858" @default.
- W2131006132 hasPublicationYear "2004" @default.
- W2131006132 type Work @default.
- W2131006132 sameAs 2131006132 @default.
- W2131006132 citedByCount "10" @default.
- W2131006132 countsByYear W21310061322014 @default.
- W2131006132 countsByYear W21310061322016 @default.
- W2131006132 countsByYear W21310061322021 @default.
- W2131006132 countsByYear W21310061322022 @default.
- W2131006132 crossrefType "journal-article" @default.
- W2131006132 hasAuthorship W2131006132A5005158119 @default.
- W2131006132 hasAuthorship W2131006132A5031090013 @default.
- W2131006132 hasAuthorship W2131006132A5033287607 @default.
- W2131006132 hasAuthorship W2131006132A5078844204 @default.
- W2131006132 hasConcept C100460472 @default.
- W2131006132 hasConcept C107187091 @default.
- W2131006132 hasConcept C113196181 @default.
- W2131006132 hasConcept C121332964 @default.
- W2131006132 hasConcept C125485243 @default.
- W2131006132 hasConcept C1291036 @default.
- W2131006132 hasConcept C130472188 @default.
- W2131006132 hasConcept C145148216 @default.
- W2131006132 hasConcept C147120987 @default.
- W2131006132 hasConcept C175361016 @default.
- W2131006132 hasConcept C178790620 @default.
- W2131006132 hasConcept C185592680 @default.
- W2131006132 hasConcept C192562407 @default.
- W2131006132 hasConcept C194760766 @default.
- W2131006132 hasConcept C2777431650 @default.
- W2131006132 hasConcept C2779227376 @default.
- W2131006132 hasConcept C544956773 @default.
- W2131006132 hasConcept C62520636 @default.
- W2131006132 hasConcept C82706917 @default.
- W2131006132 hasConceptScore W2131006132C100460472 @default.
- W2131006132 hasConceptScore W2131006132C107187091 @default.
- W2131006132 hasConceptScore W2131006132C113196181 @default.
- W2131006132 hasConceptScore W2131006132C121332964 @default.
- W2131006132 hasConceptScore W2131006132C125485243 @default.
- W2131006132 hasConceptScore W2131006132C1291036 @default.
- W2131006132 hasConceptScore W2131006132C130472188 @default.
- W2131006132 hasConceptScore W2131006132C145148216 @default.
- W2131006132 hasConceptScore W2131006132C147120987 @default.
- W2131006132 hasConceptScore W2131006132C175361016 @default.
- W2131006132 hasConceptScore W2131006132C178790620 @default.
- W2131006132 hasConceptScore W2131006132C185592680 @default.
- W2131006132 hasConceptScore W2131006132C192562407 @default.
- W2131006132 hasConceptScore W2131006132C194760766 @default.
- W2131006132 hasConceptScore W2131006132C2777431650 @default.
- W2131006132 hasConceptScore W2131006132C2779227376 @default.
- W2131006132 hasConceptScore W2131006132C544956773 @default.
- W2131006132 hasConceptScore W2131006132C62520636 @default.
- W2131006132 hasConceptScore W2131006132C82706917 @default.
- W2131006132 hasIssue "4" @default.
- W2131006132 hasLocation W21310061321 @default.
- W2131006132 hasOpenAccess W2131006132 @default.
- W2131006132 hasPrimaryLocation W21310061321 @default.
- W2131006132 hasRelatedWork W1538606258 @default.
- W2131006132 hasRelatedWork W1964670930 @default.
- W2131006132 hasRelatedWork W2032552246 @default.
- W2131006132 hasRelatedWork W2034252264 @default.
- W2131006132 hasRelatedWork W2045553774 @default.
- W2131006132 hasRelatedWork W2057185012 @default.
- W2131006132 hasRelatedWork W2146849087 @default.
- W2131006132 hasRelatedWork W2164353131 @default.
- W2131006132 hasRelatedWork W4283652497 @default.
- W2131006132 hasRelatedWork W849260343 @default.
- W2131006132 hasVolume "22" @default.
- W2131006132 isParatext "false" @default.
- W2131006132 isRetracted "false" @default.
- W2131006132 magId "2131006132" @default.
- W2131006132 workType "article" @default.