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- W2131067493 endingPage "98" @default.
- W2131067493 startingPage "91" @default.
- W2131067493 abstract "Boron and phosphorus implants into germanium and silicon with energies from 20 to 320 keV and ion doses from 5/spl times/10/sup 13/ to 5/spl times/10/sup 16/ cm/sup -2/ were characterized using secondary ion mass spectrometry. The first four moments of all implants were calculated from the experimental data. Both the phosphorus and boron implants were found to be shallower in the germanium than in the silicon for the same implant parameters and high hole concentrations, as high as 2/spl times/10/sup 20/ cm/sup -3/, were detected by spreading resistance profiling immediately after boron implants without subsequent annealing. Channeling experiments using nuclear reaction analysis also indicated high substitutional fractions (/spl sim/19%) even in the highest dose case immediately after implant. A greater straggle (second moment) is, however, observed in the boron implants in the germanium than in the silicon despite having a shorter projected range in the germanium. Implant profiles predicted by Monte Carlo simulations and Lindhard-Scharff-Schiott theory were calculated to help clarify the implant behavior. Finally, the experimentally obtained moments were used to calculate Pearson distribution fits to the boron and phosphorus implants for rapid simulation of nonamorphizing doses over the entire energy range examined." @default.
- W2131067493 created "2016-06-24" @default.
- W2131067493 creator A5005795316 @default.
- W2131067493 creator A5025682184 @default.
- W2131067493 creator A5034873810 @default.
- W2131067493 creator A5036642061 @default.
- W2131067493 creator A5048321503 @default.
- W2131067493 creator A5006492279 @default.
- W2131067493 date "2005-01-01" @default.
- W2131067493 modified "2023-09-27" @default.
- W2131067493 title "Modeling of Boron and Phosphorus Implantation Into [100] Germanium" @default.
- W2131067493 cites W1513915311 @default.
- W2131067493 cites W1602091373 @default.
- W2131067493 cites W1973016843 @default.
- W2131067493 cites W1988332769 @default.
- W2131067493 cites W2002971549 @default.
- W2131067493 cites W2034739520 @default.
- W2131067493 cites W2037753465 @default.
- W2131067493 cites W2060694311 @default.
- W2131067493 cites W2078996267 @default.
- W2131067493 cites W2085986710 @default.
- W2131067493 cites W2105790057 @default.
- W2131067493 cites W2124196078 @default.
- W2131067493 cites W2137810906 @default.
- W2131067493 doi "https://doi.org/10.1109/ted.2004.841340" @default.
- W2131067493 hasPublicationYear "2005" @default.
- W2131067493 type Work @default.
- W2131067493 sameAs 2131067493 @default.
- W2131067493 citedByCount "30" @default.
- W2131067493 countsByYear W21310674932012 @default.
- W2131067493 countsByYear W21310674932013 @default.
- W2131067493 countsByYear W21310674932014 @default.
- W2131067493 countsByYear W21310674932015 @default.
- W2131067493 countsByYear W21310674932018 @default.
- W2131067493 crossrefType "journal-article" @default.
- W2131067493 hasAuthorship W2131067493A5005795316 @default.
- W2131067493 hasAuthorship W2131067493A5006492279 @default.
- W2131067493 hasAuthorship W2131067493A5025682184 @default.
- W2131067493 hasAuthorship W2131067493A5034873810 @default.
- W2131067493 hasAuthorship W2131067493A5036642061 @default.
- W2131067493 hasAuthorship W2131067493A5048321503 @default.
- W2131067493 hasConcept C107872376 @default.
- W2131067493 hasConcept C113196181 @default.
- W2131067493 hasConcept C145148216 @default.
- W2131067493 hasConcept C177322064 @default.
- W2131067493 hasConcept C178790620 @default.
- W2131067493 hasConcept C185592680 @default.
- W2131067493 hasConcept C191897082 @default.
- W2131067493 hasConcept C192562407 @default.
- W2131067493 hasConcept C207521374 @default.
- W2131067493 hasConcept C2777855556 @default.
- W2131067493 hasConcept C41823505 @default.
- W2131067493 hasConcept C501308230 @default.
- W2131067493 hasConcept C510538283 @default.
- W2131067493 hasConcept C544956773 @default.
- W2131067493 hasConcept C550623735 @default.
- W2131067493 hasConcept C77671233 @default.
- W2131067493 hasConceptScore W2131067493C107872376 @default.
- W2131067493 hasConceptScore W2131067493C113196181 @default.
- W2131067493 hasConceptScore W2131067493C145148216 @default.
- W2131067493 hasConceptScore W2131067493C177322064 @default.
- W2131067493 hasConceptScore W2131067493C178790620 @default.
- W2131067493 hasConceptScore W2131067493C185592680 @default.
- W2131067493 hasConceptScore W2131067493C191897082 @default.
- W2131067493 hasConceptScore W2131067493C192562407 @default.
- W2131067493 hasConceptScore W2131067493C207521374 @default.
- W2131067493 hasConceptScore W2131067493C2777855556 @default.
- W2131067493 hasConceptScore W2131067493C41823505 @default.
- W2131067493 hasConceptScore W2131067493C501308230 @default.
- W2131067493 hasConceptScore W2131067493C510538283 @default.
- W2131067493 hasConceptScore W2131067493C544956773 @default.
- W2131067493 hasConceptScore W2131067493C550623735 @default.
- W2131067493 hasConceptScore W2131067493C77671233 @default.
- W2131067493 hasIssue "1" @default.
- W2131067493 hasLocation W21310674931 @default.
- W2131067493 hasOpenAccess W2131067493 @default.
- W2131067493 hasPrimaryLocation W21310674931 @default.
- W2131067493 hasRelatedWork W1978190580 @default.
- W2131067493 hasRelatedWork W1985325156 @default.
- W2131067493 hasRelatedWork W1992455165 @default.
- W2131067493 hasRelatedWork W1997428111 @default.
- W2131067493 hasRelatedWork W2038218317 @default.
- W2131067493 hasRelatedWork W2048269824 @default.
- W2131067493 hasRelatedWork W2054572570 @default.
- W2131067493 hasRelatedWork W2063677047 @default.
- W2131067493 hasRelatedWork W2131067493 @default.
- W2131067493 hasRelatedWork W2275386326 @default.
- W2131067493 hasVolume "52" @default.
- W2131067493 isParatext "false" @default.
- W2131067493 isRetracted "false" @default.
- W2131067493 magId "2131067493" @default.
- W2131067493 workType "article" @default.