Matches in SemOpenAlex for { <https://semopenalex.org/work/W2131073595> ?p ?o ?g. }
- W2131073595 endingPage "550" @default.
- W2131073595 startingPage "543" @default.
- W2131073595 abstract "Spatially defined excitation by a confined primary electron beam is the basis of conventional scanning Auger microscopy. This method encounters a physical limitation in spatial resolution when it is used for the analysis of sidewall surface of micron- and submicron-sized patterns on VLSI semiconductor devices. The limitation arises from scattered primary electrons, which drastically reduce the analytically usable spatial resolution whenever protruding features of the specimen topography are irradiated by the primary beam. A non-conventional approach to improve the selectivity for surfaces of special orientation is presented, making use of the characteristic angular distribution of Auger electron emitted from surfaces. It is shown that by an appropriate modification of the angular spectrometer acceptance, the analytical resolution of sidewalls of VLSI patterns can be increased by more than one order of magnitude." @default.
- W2131073595 created "2016-06-24" @default.
- W2131073595 creator A5000869570 @default.
- W2131073595 date "1991-07-01" @default.
- W2131073595 modified "2023-09-24" @default.
- W2131073595 title "Surface analysis at the sidewalls of VLSI patterns—limitations and capabilities of spatially resolved Auger electron spectroscopy" @default.
- W2131073595 cites W1572697502 @default.
- W2131073595 cites W1971123572 @default.
- W2131073595 cites W1974558316 @default.
- W2131073595 cites W1985442184 @default.
- W2131073595 cites W1997670883 @default.
- W2131073595 cites W1999101707 @default.
- W2131073595 cites W2016845798 @default.
- W2131073595 cites W2044639037 @default.
- W2131073595 cites W2049182962 @default.
- W2131073595 cites W2057983276 @default.
- W2131073595 cites W2072602972 @default.
- W2131073595 cites W2073960437 @default.
- W2131073595 cites W2077618587 @default.
- W2131073595 cites W2078004366 @default.
- W2131073595 cites W2078415967 @default.
- W2131073595 cites W2078474212 @default.
- W2131073595 cites W2116658790 @default.
- W2131073595 cites W2128667283 @default.
- W2131073595 cites W2139501211 @default.
- W2131073595 cites W2149692615 @default.
- W2131073595 cites W2152981642 @default.
- W2131073595 cites W2159761136 @default.
- W2131073595 cites W2171418108 @default.
- W2131073595 cites W2267751398 @default.
- W2131073595 cites W2313836822 @default.
- W2131073595 cites W2573382804 @default.
- W2131073595 doi "https://doi.org/10.1002/sia.740170802" @default.
- W2131073595 hasPublicationYear "1991" @default.
- W2131073595 type Work @default.
- W2131073595 sameAs 2131073595 @default.
- W2131073595 citedByCount "7" @default.
- W2131073595 countsByYear W21310735952012 @default.
- W2131073595 crossrefType "journal-article" @default.
- W2131073595 hasAuthorship W2131073595A5000869570 @default.
- W2131073595 hasConcept C114614502 @default.
- W2131073595 hasConcept C120665830 @default.
- W2131073595 hasConcept C121332964 @default.
- W2131073595 hasConcept C133848361 @default.
- W2131073595 hasConcept C136764020 @default.
- W2131073595 hasConcept C138268822 @default.
- W2131073595 hasConcept C14580979 @default.
- W2131073595 hasConcept C147120987 @default.
- W2131073595 hasConcept C149635348 @default.
- W2131073595 hasConcept C154945302 @default.
- W2131073595 hasConcept C171627272 @default.
- W2131073595 hasConcept C184779094 @default.
- W2131073595 hasConcept C185544564 @default.
- W2131073595 hasConcept C192562407 @default.
- W2131073595 hasConcept C205372480 @default.
- W2131073595 hasConcept C25442681 @default.
- W2131073595 hasConcept C2780615836 @default.
- W2131073595 hasConcept C2780646311 @default.
- W2131073595 hasConcept C33923547 @default.
- W2131073595 hasConcept C41008148 @default.
- W2131073595 hasConcept C62520636 @default.
- W2131073595 hasConceptScore W2131073595C114614502 @default.
- W2131073595 hasConceptScore W2131073595C120665830 @default.
- W2131073595 hasConceptScore W2131073595C121332964 @default.
- W2131073595 hasConceptScore W2131073595C133848361 @default.
- W2131073595 hasConceptScore W2131073595C136764020 @default.
- W2131073595 hasConceptScore W2131073595C138268822 @default.
- W2131073595 hasConceptScore W2131073595C14580979 @default.
- W2131073595 hasConceptScore W2131073595C147120987 @default.
- W2131073595 hasConceptScore W2131073595C149635348 @default.
- W2131073595 hasConceptScore W2131073595C154945302 @default.
- W2131073595 hasConceptScore W2131073595C171627272 @default.
- W2131073595 hasConceptScore W2131073595C184779094 @default.
- W2131073595 hasConceptScore W2131073595C185544564 @default.
- W2131073595 hasConceptScore W2131073595C192562407 @default.
- W2131073595 hasConceptScore W2131073595C205372480 @default.
- W2131073595 hasConceptScore W2131073595C25442681 @default.
- W2131073595 hasConceptScore W2131073595C2780615836 @default.
- W2131073595 hasConceptScore W2131073595C2780646311 @default.
- W2131073595 hasConceptScore W2131073595C33923547 @default.
- W2131073595 hasConceptScore W2131073595C41008148 @default.
- W2131073595 hasConceptScore W2131073595C62520636 @default.
- W2131073595 hasIssue "8" @default.
- W2131073595 hasLocation W21310735951 @default.
- W2131073595 hasOpenAccess W2131073595 @default.
- W2131073595 hasPrimaryLocation W21310735951 @default.
- W2131073595 hasRelatedWork W1987866125 @default.
- W2131073595 hasRelatedWork W1989876162 @default.
- W2131073595 hasRelatedWork W1999324254 @default.
- W2131073595 hasRelatedWork W2024068061 @default.
- W2131073595 hasRelatedWork W2049182962 @default.
- W2131073595 hasRelatedWork W2137331603 @default.
- W2131073595 hasRelatedWork W2313836822 @default.
- W2131073595 hasRelatedWork W2801988585 @default.
- W2131073595 hasRelatedWork W3022040408 @default.
- W2131073595 hasRelatedWork W4380355260 @default.
- W2131073595 hasVolume "17" @default.
- W2131073595 isParatext "false" @default.