Matches in SemOpenAlex for { <https://semopenalex.org/work/W213144727> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W213144727 abstract "Abstract This chapter advocates for the need to engineer the structure of materials deposited in nanoscale features so that the completed device can achieve optimum performance and have good reliability. The examples used to illustrate this point are Cu interconnects for semiconductor devices and the SiO2 insulator layer used for plasma displays. The critical role deposition source technology plays in achieving properly engineered films and the modeling required to optimize source technology will be discussed in detail. The benefits of metrology techniques that allow for assessment of the structure of materials inside nanopatterned features will also be elaborated on. Optimized nanopatterned feature coverage and film properties from the culmination of Cu and SiO2 process and source technology development will be presented. A commentary on future trends in Cu interconnects and plasma displays will bring the chapter to a close." @default.
- W213144727 created "2016-06-24" @default.
- W213144727 creator A5078854187 @default.
- W213144727 creator A5088370134 @default.
- W213144727 date "2015-01-01" @default.
- W213144727 modified "2023-09-24" @default.
- W213144727 title "Plasma deposition and characterization technologies for structural and coverage optimization of materials for nanopatterned devices" @default.
- W213144727 cites W1480160699 @default.
- W213144727 cites W1626099979 @default.
- W213144727 cites W1675701115 @default.
- W213144727 cites W1964745797 @default.
- W213144727 cites W1965896723 @default.
- W213144727 cites W1971883974 @default.
- W213144727 cites W1972908068 @default.
- W213144727 cites W1980505738 @default.
- W213144727 cites W1983590499 @default.
- W213144727 cites W2001211587 @default.
- W213144727 cites W2010945721 @default.
- W213144727 cites W2019915545 @default.
- W213144727 cites W2027722687 @default.
- W213144727 cites W2031762927 @default.
- W213144727 cites W2033658246 @default.
- W213144727 cites W2036628692 @default.
- W213144727 cites W2046139226 @default.
- W213144727 cites W2051816550 @default.
- W213144727 cites W2071455226 @default.
- W213144727 cites W2083221244 @default.
- W213144727 cites W2098130488 @default.
- W213144727 cites W2113165751 @default.
- W213144727 cites W2129475759 @default.
- W213144727 cites W2137347902 @default.
- W213144727 cites W2141682039 @default.
- W213144727 cites W2169833242 @default.
- W213144727 cites W2170675170 @default.
- W213144727 cites W573997810 @default.
- W213144727 cites W589744691 @default.
- W213144727 cites W625498403 @default.
- W213144727 cites W2494738780 @default.
- W213144727 doi "https://doi.org/10.1016/b978-1-78242-228-0.00015-6" @default.
- W213144727 hasPublicationYear "2015" @default.
- W213144727 type Work @default.
- W213144727 sameAs 213144727 @default.
- W213144727 citedByCount "0" @default.
- W213144727 crossrefType "book-chapter" @default.
- W213144727 hasAuthorship W213144727A5078854187 @default.
- W213144727 hasAuthorship W213144727A5088370134 @default.
- W213144727 hasConcept C120665830 @default.
- W213144727 hasConcept C121332964 @default.
- W213144727 hasConcept C163258240 @default.
- W213144727 hasConcept C171250308 @default.
- W213144727 hasConcept C192562407 @default.
- W213144727 hasConcept C195766429 @default.
- W213144727 hasConcept C2779227376 @default.
- W213144727 hasConcept C2780841128 @default.
- W213144727 hasConcept C41008148 @default.
- W213144727 hasConcept C43214815 @default.
- W213144727 hasConcept C45206210 @default.
- W213144727 hasConcept C62520636 @default.
- W213144727 hasConcept C69544855 @default.
- W213144727 hasConceptScore W213144727C120665830 @default.
- W213144727 hasConceptScore W213144727C121332964 @default.
- W213144727 hasConceptScore W213144727C163258240 @default.
- W213144727 hasConceptScore W213144727C171250308 @default.
- W213144727 hasConceptScore W213144727C192562407 @default.
- W213144727 hasConceptScore W213144727C195766429 @default.
- W213144727 hasConceptScore W213144727C2779227376 @default.
- W213144727 hasConceptScore W213144727C2780841128 @default.
- W213144727 hasConceptScore W213144727C41008148 @default.
- W213144727 hasConceptScore W213144727C43214815 @default.
- W213144727 hasConceptScore W213144727C45206210 @default.
- W213144727 hasConceptScore W213144727C62520636 @default.
- W213144727 hasConceptScore W213144727C69544855 @default.
- W213144727 hasLocation W2131447271 @default.
- W213144727 hasOpenAccess W213144727 @default.
- W213144727 hasPrimaryLocation W2131447271 @default.
- W213144727 hasRelatedWork W1990719576 @default.
- W213144727 hasRelatedWork W1992598956 @default.
- W213144727 hasRelatedWork W1997851234 @default.
- W213144727 hasRelatedWork W2084427451 @default.
- W213144727 hasRelatedWork W2102780807 @default.
- W213144727 hasRelatedWork W2105775077 @default.
- W213144727 hasRelatedWork W2121997933 @default.
- W213144727 hasRelatedWork W2131844024 @default.
- W213144727 hasRelatedWork W2159555323 @default.
- W213144727 hasRelatedWork W2165889628 @default.
- W213144727 hasRelatedWork W2179554668 @default.
- W213144727 hasRelatedWork W2493988767 @default.
- W213144727 hasRelatedWork W2545232468 @default.
- W213144727 hasRelatedWork W269436220 @default.
- W213144727 hasRelatedWork W2747681330 @default.
- W213144727 hasRelatedWork W2769909764 @default.
- W213144727 hasRelatedWork W2782032208 @default.
- W213144727 hasRelatedWork W2805679495 @default.
- W213144727 hasRelatedWork W3022313789 @default.
- W213144727 hasRelatedWork W3126673244 @default.
- W213144727 isParatext "false" @default.
- W213144727 isRetracted "false" @default.
- W213144727 magId "213144727" @default.
- W213144727 workType "book-chapter" @default.