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• W2131736324 endingPage "1467" @default.
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• W2131736324 abstract "Fabrication and thermal characterization of a resistance temperature detector (RTD) heater and microthermocouples (MTs) on silicon substrates have been reported in this paper. The influence of film thickness and nickel-gold (Au) electroplating on RTD on its steady-state temperature with respect to its steady-state electrical power input and resistance is studied. Further, the thermal effects of multiple thermocouples in a thermopile as well as the effects of Au layers in the contact pads of the thermopiles on their open-circuit Seebeck voltage are studied. Therein lies the novelty of this paper. The in situ operating relationships for the RTD heater and the MT are provided" @default.
• W2131736324 created "2016-06-24" @default.
• W2131736324 creator A5055307653 @default.
• W2131736324 creator A5057570987 @default.
• W2131736324 date "2006-12-01" @default.
• W2131736324 modified "2023-09-23" @default.
• W2131736324 title "Effect of Thin Film Thicknesses and Materials on the Response of RTDs and Microthermocouples" @default.
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• W2131736324 doi "https://doi.org/10.1109/jsen.2006.884167" @default.
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