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- W2132030731 abstract "A high-density digital versatile disk (HD-DVD) is being developed, aiming for high definition television. It is thought that the capacity of HD-DVD would be 15 GB, for example when its track pitch is 0.42 µm, its minimum mark length must be 0.22 µm. To fabricate such a high-density optical disk, we develop an exposure method using a photoresist mask. Super-resolution is also studied in order to make the exposure beam diameter smaller." @default.
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- W2132030731 date "2000-02-01" @default.
- W2132030731 modified "2023-10-14" @default.
- W2132030731 title "Exposure Method Using Photoresist Mask for High-Density Optical Disk Mastering" @default.
- W2132030731 doi "https://doi.org/10.1143/jjap.39.806" @default.
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